UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549
                                  SCHEDULE 14A


    PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES EXCHANGE ACT
                           OF 1934 (AMENDMENT NO. 1)

         Filed by the Registrant                                       [X]
         Filed by a party other than the Registrant                    [ ]

         Check the appropriate box:

[X] Preliminary Proxy Statement

[ ] Definitive Proxy Statement

[ ] Confidential,for Use of the Commission Only(as permitted by Rule14a-6(e)(2))

[ ] Definitive Additional Materials

[ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                            NANOMETRICS INCORPORATED
           ----------------------------------------------------------
                (Name of Registrant as Specified in its Charter)

           ----------------------------------------------------------
     (Name of Person(s) Filing Proxy Statement if other than the Registrant)

         Payment of Filing Fee (Check the appropriate box):
[X] No fee required.
[ ] Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.
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             pursuant to Exchange Act Rule 0-11 (Set forth the amount on which
             the filing fee is calculated and state how it was determined):
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[ ] Fee paid previously with preliminary materials.
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    Rule 0-11(a)(2) and identify the filing for which the offsetting fee was
    paid previously. Identify the previous filing by registration statement
    number, or the Form or Schedule and the date of its filing.
         (1) Amount Previously Paid:
         (2) Form, Schedule or Registration Statement No.:
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                            NANOMETRICS INCORPORATED

                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS


TO THE SHAREHOLDERS OF NANOMETRICS INCORPORATED:

     NOTICE  IS  HEREBY  GIVEN  that  the  annual  meeting  of  shareholders  of
Nanometrics Incorporated, a California corporation (the "Company"), will be held
on Friday,  August 26, 2005 at 1:00 p.m., local time, at the Company's principal
offices located at 1550 Buckeye Drive, Milpitas, California 95035. At the annual
meeting, you will be asked to consider and vote upon the following:

     1. A proposal to elect seven candidates nominated by the board of directors
to serve until the next annual meeting of shareholders at which their respective
successors  are elected  and  qualified,  or until the  earlier of their  death,
resignation or removal.

     2. A proposal to approve the  reincorporation of the Company under the laws
of the State of Delaware through a merger with Big League Merger Corporation,  a
wholly-owned subsidiary of the Company.

     3. Proposals to approve various  governance-related  provisions in the form
of  certificate  of  incorporation  of the  Company  to be  effective  upon  the
completion of the reincorporation merger consisting of the following proposals:

         o      3A--a  proposal to approve a provision  limiting  the  Company's
                stockholders' right to call special meetings of stockholders;

         o      3B--a  proposal to approve a provision  limiting  the  Company's
                stockholders' ability to act by written consent;

         o      3C--a proposal to approve a provision requiring a super-majority
                vote of the Company's  stockholders to amend certain  provisions
                of its certificate of incorporation;

         o      3D--a proposal to approve a provision requiring a super-majority
                vote of the Company's  stockholders to amend certain  provisions
                of the Company's bylaws;

         o      3E--a  proposal to approve a provision  limiting  the  Company's
                stockholders'  right to remove  directors from the board without
                cause;

         o      3F--a  proposal  to approve the  classification  of the board of
                directors into separate classes with staggered terms; and

         o      3G--a proposal to approve a provision limiting cumulative voting
                rights in connection with the election of directors.

     4. A  proposal  to  approve  the  adoption  of the  Company's  2005  Equity
Incentive Plan (the "Plan") and the  reservation  of 1,200,000  shares of common
stock for issuance thereunder.

     5.  A  proposal  to  ratify  the  appointment  of BDO  Seidman,  LLP as the
Company's  independent  registered  public  accounting  firm for the fiscal year
ending December 31, 2005.

     6. Such other  business as may properly  come before the annual  meeting or
any postponements or adjournments thereof.

     The  foregoing  items of  business  are more fully  described  in the proxy
statement accompanying this notice of annual meeting of shareholders.

     Only  shareholders  of record at the close of business on July 12, 2005 are
entitled to notice of and to vote at the annual meeting and any postponements or
adjournments thereof.

     All  shareholders  are  cordially  invited to attend the annual  meeting in
person.  However, to ensure  representation at the annual meeting, you are urged
to mark,  sign,  date and return the enclosed proxy card as promptly as possible
in the  postage-prepaid  envelope enclosed for that purpose.  Any shareholder of
record  attending the annual meeting may vote in person even if that shareholder
previously returned a proxy card for the annual meeting.

                               BY ORDER OF THE BOARD OF DIRECTORS,



                               -------------------
                               Vincent J. Coates
                               Chairman of the Board of Directors and Secretary

Milpitas, California
August __, 2005



                            NANOMETRICS INCORPORATED

                                 PROXY STATEMENT

                 INFORMATION CONCERNING SOLICITATION AND VOTING

General

     This proxy  statement is being provided to the  shareholders of Nanometrics
Incorporated  (the  "Company") as part of a solicitation of proxies by the board
of  directors  for use at the 2005 annual  meeting of  shareholders.  This proxy
statement provides shareholders with information they need to know to be able to
vote or instruct their vote to be cast at the annual meeting.

Date, Time and Place

     The annual  meeting  will be held on Friday,  August 26, 2005 at 1:00 p.m.,
local time, at the Company's  principal  offices  located at 1550 Buckeye Drive,
Milpitas, California 95035.

Purpose; Other Matters

     The annual meeting is being held to consider and vote upon the following:

     1. A proposal to elect seven director nominees to the board of directors to
serve until the next annual meeting of  shareholders  at which their  respective
successors  are elected  and  qualified,  or until the  earlier of their  death,
resignation or removal.

     2. A proposal to approve the  reincorporation of the Company under the laws
of the State of Delaware through a merger with Big League Merger Corporation,  a
wholly-owned subsidiary of the Company.

     3. Proposals to approve various  governance-related  provisions in the form
of  certificate  of  incorporation  of the  Company  to be  effective  upon  the
completion of the reincorporation merger consisting of the following proposals:

         o      3A--a  proposal to approve a provision  limiting  the  Company's
                stockholders' right to call special meetings of stockholders;

         o      3B--a  proposal to approve a provision  limiting  the  Company's
                stockholders' ability to act by written consent;

         o      3C--a proposal to approve a provision requiring a super-majority
                vote of the Company's  stockholders to amend certain  provisions
                of its certificate of incorporation;

         o      3D--a proposal to approve a provision requiring a super-majority
                vote of the Company's  stockholders to amend certain  provisions
                of the Company's bylaws;

         o      3E--a  proposal to approve a provision  limiting  the  Company's
                stockholders'  right to remove  directors from the board without
                cause;

         o      3F--a  proposal  to approve the  classification  of the board of
                directors into separate classes with staggered terms; and

         o      3G--a proposal to approve a provision limiting cumulative voting
                rights in connection with the election of directors.

     4. A  proposal  to  approve  the  adoption  of the  Company's  2005  Equity
Incentive Plan (the "Plan") and the  reservation  of 1,200,000  shares of common
stock for issuance thereunder.

     5.  A  proposal  to  ratify  the  appointment  of BDO  Seidman,  LLP as the
Company's  independent  registered  public  accounting  firm for the fiscal year
ending December 31, 2005.

     Shareholders  will  also be  asked to  consider  and  vote  upon any  other
business as may properly come before the annual meeting or any  adjournments  or
postponements of the annual meeting. The Company does not expect that any matter
other  than the  proposals  presented  in this proxy  statement  will be brought
before the annual meeting.  However, if other matters incident to the conduct of
the  annual  meeting  are  properly  presented  at  the  annual  meeting  or any
adjournment or postponement of the annual meeting,  the persons named as proxies
will vote in accordance with their best judgment with respect to those matters.

     If you vote "AGAINST" any of the  proposals,  the proxy holders will not be
authorized to vote for any  adjournments or postponements of the annual meeting,
including  for the  purpose  of  soliciting  additional  proxies,  unless you so
indicate  by  marking  the  appropriate  box on the  proxy  card for the  annual
meeting.

Recommendation of the Board of Directors

     The board of directors unanimously recommends that you vote:

     o    "FOR" the proposal to elect seven candidates nominated by the board of
          directors to serve until the next annual  meeting of  shareholders  at
          which their respective successors are elected and qualified,  or until
          the earlier of their death, resignation or removal;

     o    "FOR" the proposal to approve the reincorporation of the Company under
          the laws of the State of  Delaware  through a merger  with Big  League
          Merger Corporation, a wholly-owned subsidiary of the Company;


                                       1


     o    "FOR" the  proposals to approve the  governance-related  provisions in
          the  Company's  certificate  of  incorporation  to be  effective  upon
          completion of the reincorporation merger;

     o    "FOR"  the  proposal  to  approve  the  adoption  of the  Plan and the
          reservation   of  1,200,000   shares  of  common  stock  for  issuance
          thereunder; and

     o    "FOR" the proposal to ratify the  appointment  of BDO Seidman,  LLP as
          the Company's  independent  registered  public accounting firm for the
          fiscal year ending December 31, 2005.

Record Date; Outstanding Shares; Voting Rights

     Only  holders  of record of common  stock at the close of  business  on the
record date for the annual meeting, July 12, 2005, are entitled to notice of and
to vote at the annual  meeting.  As of the record  date,  there were  12,793,207
shares of common stock  outstanding  and entitled to vote at the annual meeting,
held by approximately 140 holders of record.  Each record holder of common stock
on the record date is  entitled to one vote for each share of common  stock held
as of the record date with respect to all  proposals  except with respect to the
election of directors.

     The  candidates  receiving the seven highest vote totals will be elected to
the board of directors.  Every shareholder  voting for the election of the board
of  directors  may (i)  cumulate  such  shareholder's  votes  and  give  any one
candidate  a number of votes  equal to the  number of  directors  to be  elected
multiplied  by the number of shares that such  shareholders  holds on the record
date for the annual meeting,  or (ii) distribute such shareholder's votes on the
same principle among as many candidates as the shareholder may select,  provided
that  votes  cannot  be  cast  for  more  than  seven  candidates.  However,  no
shareholder  will be  entitled  to  cumulate  votes for a  candidate  unless the
candidate's  name has been  placed in  nomination  prior to the  voting  and the
shareholder,  or any other  shareholder,  has given notice at the annual meeting
prior to the voting of the intention to cumulate votes.

     A list of  shareholders  will be available for review at the annual meeting
and at the Company's  executive  offices  during  regular  business  hours for a
period of ten days before the annual meeting.

Admission to the Annual Meeting

     Only  shareholders,  their designated proxies and guests of the Company may
attend the annual meeting.  If you plan to attend the annual meeting and wish to
vote in person,  you will be given a ballot at the annual meeting.  Please note,
however,  that if your shares are held in "street name," which means your shares
are held of record by a broker,  bank or other nominee,  and you wish to vote at
the annual  meeting,  you must bring to the annual  meeting a "legal proxy" from
the  record  holder of your  shares  authorizing  you to attend  and vote at the
annual meeting.

Quorum and Vote Required

     A quorum of  shareholders  is necessary  to hold a valid annual  meeting of
shareholders.  In order to have a quorum for the  transaction of business at the
annual meeting,  a majority of shares of common stock issued and outstanding and
entitled to vote on the record date must be present in person or by proxy at the
annual meeting.  Shares that are voted "FOR," "AGAINST,"  "ABSTAIN" or "WITHHOLD
AUTHORITY"  a matter are  treated as being  present  at the annual  meeting  for
purposes of establishing a quorum.

     In addition, the vote required to approve each proposal is as follows:

     Proposal 1

     The candidates for the board of directors  receiving the seven highest vote
totals will be elected to serve as directors of the Company.

     Proposal 2

     Approval of the reincorporation merger will require the affirmative vote of
the holders of a majority of the outstanding  shares of common stock entitled to
vote on the record date.


                                       2


     Proposals 3A-G

     Under applicable  state law,  shareholder  approval of the  reincorporation
merger is sufficient to implement the proposed governance-related  provisions in
the certificate of incorporation of the Company.  Under rules promulgated by the
Securities and Exchange Commission,  however, we are required to present each of
the  proposed   governance-related   provisions  as  a  separate   proposal  for
shareholder approval. Accordingly, if we complete the reincorporation merger, we
have  determined  that we will not  implement  the  proposed  governance-related
provisions unless they are independently approved by the affirmative vote of the
holders of a majority of the shares of the  Company's  common stock  represented
and voting on each proposed governance-related provision at the annual meeting.

     Proposal 4

     Approval  of the Plan and the  reservation  of shares  of common  stock for
issuance  thereunder  will  require  the  affirmative  vote of the  holders of a
majority  of the shares of common  stock  represented  in person or by proxy and
voting at the annual meeting.

     Proposal 5

     Approval by the shareholders of the selection of the independent registered
public accounting firm is not required,  but the audit committee  believes it is
desirable as a matter of good corporate  governance to submit this matter to the
shareholders.  If holders of a majority  of the  common  stock  represented  and
voting at the annual meeting do not ratify the  appointment of BDO Seidman,  LLP
as the Company's  independent  registered  public accounting firm for the fiscal
year ending  December 31, 2005,  the audit  committee  will consider  whether it
should select another independent registered public accounting firm.

Voting

General

     Shareholders  of  record as of the  record  date may vote  their  shares by
attending the annual meeting and voting their shares in person or by completing,
signing  and dating  their  respective  proxy  cards for the annual  meeting and
mailing  them in the  postage  pre-paid  envelope  enclosed  for  that  purpose.
Shareholders  holding  shares of common stock in "street name," which means that
their shares are held of record by a broker, bank, or other nominee, may vote by
mail by  completing,  signing  and dating the voting  instruction  forms for the
annual meeting  provided by their respective  brokers,  banks, or other nominees
and returning their respective voting instruction forms to the record holders of
their shares of common stock. Even if you plan to attend the annual meeting, the
Company  recommends that you vote by proxy prior to the annual meeting.  You can
always change your vote as described below.

Voting by Proxy

     All properly executed proxies that are received prior to the annual meeting
and  not  revoked  will  be  voted  at  the  annual  meeting  according  to  the
instructions  indicated on the  proxies.  If your proxy does not specify how you
wish the Company to vote your shares, your shares will be voted:

     o    "FOR" the proposal to elect seven candidates nominated by the board of
          directors to serve until the next annual  meeting of  shareholders  at
          which their respective successors are elected and qualified,  or until
          the earlier of their death, resignation or removal;

     o    "FOR" the proposal to approve the reincorporation of the Company under
          the laws of the State of  Delaware  through a merger  with Big  League
          Merger Corporation, a wholly-owned subsidiary of the Company;

     o    "FOR" the  proposals to approve the  governance-related  provisions in
          the  Company's  certificate  of  incorporation  to be  effective  upon
          completion of the reincorporation merger;

     o    "FOR"  the  proposal  to  approve  the  adoption  of the  Plan and the
          reservation   of  1,200,000   shares  of  common  stock  for  issuance
          thereunder; and

     o    "FOR" the proposal to ratify the  appointment  of BDO Seidman,  LLP as
          the Company's  independent  registered  public accounting firm for the
          fiscal year ending December 31, 2005.

     You may  receive  more than one proxy card  depending  on how you hold your
shares of common stock. Generally, you need to sign and return all of your proxy
cards to vote all of your  shares.  For  example,  if you  hold  shares  through
someone else, such as a broker, you may get proxy material from that person.

Changing Your Vote

         If you are the record holder of your shares of common stock, you can
change your vote at any time before your proxy is voted at the annual meeting
by:

     o    delivering  to the  Company's  corporate  secretary a signed notice of
          revocation;


                                       3


     o    granting the proxy  holders a new,  later-dated  proxy,  which must be
          signed and delivered to the Company's  corporate  secretary in advance
          of the vote at the annual meeting; or

     o    attending the annual meeting and voting in person.

     Your attendance  alone,  however,  will not revoke your previously  granted
proxy.  If you hold  your  shares in street  name and you have  provided  voting
instructions to your broker,  bank or other nominee for the annual meeting,  you
must follow the instructions  provided by your broker,  bank or other nominee in
order to change your vote or revoke your proxy for the annual meeting.

Abstentions and Broker Non-Votes

     An abstention occurs when a shareholder attends a meeting, either in person
or by proxy, but abstains from voting. While there is no definitive statutory or
case law authority in California as to the proper treatment of abstentions,  the
Company believes that abstentions  should be counted for purposes of determining
both (i) the presence or absence of a quorum for the transaction of business and
(ii) the total  number of shares of common  stock  represented  and voting  with
respect to a proposal.  In the absence of controlling authority to the contrary,
the Company intends to treat abstentions in this manner.

     "Broker  non-votes"  are shares held by a broker or other  nominee that are
represented  at the  annual  meeting,  but with  respect  to which the broker or
nominee is not instructed by the  beneficial  owner of the shares to vote on the
particular  proposal and the broker does not have discretionary  voting power on
the proposal.  Broker  non-votes will be counted for purposes of determining the
presence  or  absence  of a quorum  but  will not be  counted  for  purposes  of
determining  the  number of shares  represented  and  voting  with  respect to a
proposal.

     For  proposal 1, neither  abstentions  nor broker  non-votes  will have any
effect on the election of the seven directors.

     For proposal 2,  abstentions and broker non-votes will have the same effect
as voting against approval of the reincorporation merger.

     For proposals 3A-3G, neither abstentions nor broker non-votes will have any
effect on the approvals of the governance-related proposals.

     For proposal 4, abstentions will have the same effect as voting against the
approval of the Plan and the  reservation of shares of common stock for issuance
thereunder; broker non-votes will have no effect.

     For  proposal 5,  abstentions  will have the same effect as voting  against
ratification of the appointment of BDO Seidman, LLP as the Company's independent
registered  public accounting firm for the fiscal year ending December 31, 2005;
broker non-votes will have no effect.

Proxy Solicitation

     The  Company  is  soliciting  proxies  for  the  annual  meeting  from  its
shareholders.  The Company will bear the entire cost of soliciting  proxies from
the  shareholders.  In  addition  to the  solicitation  of proxies by mail,  the
Company will request that  brokers,  banks and other  nominees  send proxies and
proxy materials to the beneficial owners of common stock held by them and secure
their voting instructions, if necessary. The Company will reimburse those record
holders for their reasonable  expenses.  The Company also may use several of its
regular  employees,  who will not be specially  compensated,  to solicit proxies
from  shareholders,  either  personally  or by  telephone,  Internet,  telegram,
facsimile or special delivery letter.

Assistance

     If you need  assistance  in  completing  your proxy card or have  questions
regarding  the  annual  meeting,  please  contact  Investor  Relations  at (408)
435-9600 or write to Nanometrics  Incorporated,  1550 Buckeye  Drive,  Milpitas,
California 95035, Attn: Investor Relations.


                                       4


Shareholder Proposals

     The attached proxy card grants the proxy holders discretionary authority to
vote on any matter raised at the 2005 Annual Meeting.  Shareholders are entitled
to  present  proposals  for action at the  Company's  annual  meetings.  For any
proposal to be considered  for inclusion in the  Company's  proxy  statement and
form of proxy for  submission  to the  shareholders  at an annual  meeting,  the
proposal must comply with the  requirements of Rule 14a-8 under the Exchange Act
and be submitted in writing by notice delivered or mailed by first-class  United
States mail, postage prepaid, to Nanometrics  Incorporated,  1550 Buckeye Drive,
Milpitas,  California  95035,  Attention:  Office of the  Secretary.  Typically,
proposals must be received by the Company no later than 120 calendar days before
the date the proxy statement was released to shareholders in connection with the
previous  year's annual  meeting.  If the Company changes the date of its annual
meeting to a date more than 30 days from the date of the previous  year's annual
meeting,  than the deadline for receipt of shareholder proposals will be changed
to a reasonable time before the Company begins to print and mail its proxy.  The
submission of a shareholder proposal does not guarantee that it will be included
in the Company's  proxy  statement.  Additionally,  shareholder  proposals to be
considered at an annual  meeting  outside the processes of Rule 14a-8 (which are
not intended to be included in the proxy materials for such annual meeting) must
be  delivered to or mailed and received at the  Company's  executive  offices at
least 45 days  before  the  date  that  the  proxy  statement  was  released  to
shareholders in connection with the previous year's annual meeting.

Material Proceedings

     To the best of management's knowledge, there are no material proceedings to
which any  director  or officer is a party and (i) is adverse to the  Company or
any of its  subsidiaries or (ii) has a material  interest adverse to the Company
or any of its subsidiaries.



                                       5


                                   PROPOSAL 1
                       ELECTION OF NANOMETRICS' DIRECTORS

Nominees

     At the 2005 annual meeting of shareholders,  unless  otherwise  instructed,
the proxy holders will vote the proxies  received by them for the seven nominees
named below,  each of whom is presently a director of the Company.  In the event
that any nominee is unable or declines to serve as a director at the time of the
annual  meeting,  the  proxies  will be  voted  for any  nominee  who  shall  be
designated  by the present  board of directors  to fill the  vacancy.  The proxy
holders  intend to vote all  proxies  received  by them in such a manner  and in
accordance with cumulative  voting as will ensure the election of as many of the
nominees listed below as possible and, in such event,  the specific  nominees to
be voted for will be determined by the proxy  holders.  The Company is not aware
of any nominee who will be unable or will decline to serve as a director

     The names of the seven nominees and certain  information about them are set
forth below:


         Name of Nominee                  Age              Director Since
         ---------------                  ---              --------------
         Vincent J. Coates                80                    1975
         John D. Heaton                   45                    1995
         Edmond R. Ward                   65                    1999
         William G. Oldham                66                    2000
         Stephen J Smith                  58                    2004
         J. Thomas Bentley                55                    2004
         Norman V. Coates                 55                    2004



     Vincent J.  Coates has been  Chairman  of the Board  since the  Company was
founded in 1975. He has been the Company's  Secretary  since  February  1989. He
also served as Chief Executive Officer through April 1998 and President from the
Company's  founding  through  May 1996,  except for the  period of January  1986
through February 1987 when he served exclusively as Chief Executive Officer. Mr.
Coates has also  served as Chairman of the Board of  Nanometrics  Japan Ltd.,  a
subsidiary of the Company,  since its inception in November  1984.  Prior to his
employment at the Company,  Mr. Coates  co-founded  Coates and Welter Instrument
Corporation,  a  designer  of  electron  microscopes,  the  assets of which were
subsequently  acquired by the Company.  Mr.  Coates also spent over twenty years
working in engineering,  sales and international operations for the Perkin-Elmer
Corporation,  a manufacturer of analytical instruments.  In 1995, he received an
award which recognized his contribution to the industry from  Semiconductor  and
Equipment and Materials International, an industry trade organization.

     John D.  Heaton has served as a director  of the  Company  since July 1995.
Since April 1998, he has been Chief Executive  Officer of the Company.  From May
1996 to April 1998,  he served as the Company's  President  and Chief  Operating
Officer.  Mr. Heaton has also served as President of  Nanometrics  Japan Ltd., a
subsidiary of the Company,  since January  1998.  Beginning in 1978,  Mr. Heaton
served in various technical positions at National Semiconductor, a semiconductor
manufacturer, and prior to joining the Company in 1990.

     Edmond R. Ward has served as a  director  of the  Company  since July 1999.
Beginning in January  2002,  Mr. Ward has served as Chief  Technical  Officer of
Unity  Semiconductor,  a semiconductor design and manufacturing  company.  Since
April 1999, Mr. Ward has been a General Partner of Virtual  Founders,  a venture
capital firm.  From April 1992 to June 1997,  Mr. Ward was the Vice President of
Technology  at  Silicon  Valley  Group,  Inc.,  a supplier  of wafer  processing
equipment.

     William G. Oldham has served as a director of the Company  since June 2000.
Since  1964,  Mr.  Oldham  has  been  a  faculty  member  at the  University  of
California,  Berkeley,  where he researches  EUV and Maskless  Lithography  and,
since 1996, has been the Director of the DARPA/SRC Research Network for Advanced
Lithography.  He has served as a  consultant  in various  intellectual  property
matters and serves on the board of directors of Cymer, Inc., a supplier of light
sources  for  deep  ultraviolet  (DUV)  photolithography  systems  used  in  the
manufacturing of semiconductors.



                                       6



     Stephen J Smith has served as a director of the  Company  since April 2004.
Dr.  Smith has been a professor  in the  Department  of  Molecular  and Cellular
Physiology at the Stanford  University  School of Medicine since 1989,  where he
researches brain  development and function with special interests in the dynamic
and structural aspects of synapse and circuit formation and synaptic plasticity.
Dr. Smith is the author of numerous  research articles in the fields of cellular
and molecular neuroscience.

     J. Thomas Bentley has served as a director of the Company since April 2004.
Mr.  Bentley  is  a  co-founder  of  Alliant  Partners,  a  leading  merger  and
acquisition firm for emerging and mid-market technology companies.  For the past
10 years, Mr. Bentley has worked with some of Alliant's largest clients on their
strategic acquisitions and divestitures.  His expertise is in financial, tax and
accounting  structuring  of merger  transactions.  Mr. Bentley holds a Master of
Science  degree in  Management  from  M.I.T.  and  currently  serves as a senior
advisor to Alliant Partners.

     Norman V. Coates  served as a director of the Company from May 1988 through
June 2001.  He was  re-appointed  to the board of directors on June 30, 2004. He
has operated Gem of the River Produce,  a farming and produce packing  operation
in  Orleans,  California,  as a sole  proprietor  since  1978.  He has also been
manager  of the Boise  Creek Farm  operation  since 1985 and a manager of Coates
Vineyards since 1997.

     The candidates for the board of directors  receiving the seven highest vote
totals  will be elected to serve as  directors  of the  Company.  The  directors
elected at the annual  meeting will serve until the next annual meeting or until
such director's successor has been elected or qualified.

THE BOARD OF DIRECTORS UNANIMOUSLY RECOMMENDS THAT THE SHAREHOLDERS VOTE "FOR"
THE SEVEN NOMINEES SET FORTH HEREIN.


                                       7


Security Ownership of Management and Certain Beneficial Owners

     The following table sets forth beneficial  ownership of common stock of the
Company as of July 12, 2005,  the record date, by each  director or nominee,  by
each of the Named  Officers  (as defined in the section of this proxy  statement
entitled  "Compensation  of  Executive  Officers"  beginning on page 13), by all
directors and Named Officers as a group, and by all persons known to the Company
to be the  beneficial  owners of more  than 5% of the  Company's  common  stock.
Quentin  Wright and Michael Weber are not listed on the table below because they
did not join the Company in their  capacities as executive  officers until after
January 1, 2005 and are not Named  Officers.  Unless  otherwise  indicated,  all
persons  named below can be reached at  Nanometrics  Incorporated,  1550 Buckeye
Drive, Milpitas, California 95035.




                                                                                      Number of Shares
                                                                                      of Common Stock
                                                                                        Beneficially
         Name of Beneficial Owner                                                         Owned(1)        Percent of Total
         ------------------------                                                         --------        ----------------
                                                                                                        
         Vincent J. Coates(2)                                                            3,376,274              26.4%
         Artemis Investment Management LLC(3)                                              881,800               6.9%
              437 Madison Avenue
              New York, New York 10022
         Dimensional Fund Advisors Inc.(4)                                                 913,148               7.1%
              1299 Ocean Avenue
              11th Floor
              Santa Monica, CA 90401
         John D. Heaton(5)                                                                 365,000               2.8%
         Edmond R. Ward(6)                                                                  32,000                  *
         William G. Oldham(7)                                                               30,000                  *
         Paul B. Nolan(8)                                                                   28,334                  *
         Roger Ingalls, Jr. (9)                                                             22,667                  *
         Stephen J Smith (10)                                                                3,333                  *
         J. Thomas Bentley (11)                                                              3,333                  *
         Norman V. Coates (12)                                                               3,333                  *
         All Named Officers and directors as a group (nine(9)persons) (13)               5,659,222              44.2%



*    Represents less than 1% of outstanding shares of common stock.

(1)  Beneficial  ownership is  determined  in  accordance  with the rules of the
     Securities and Exchange Commission. The number of shares beneficially owned
     by a person includes shares of common stock subject to options held by that
     person that are currently exercisable or exercisable within 60 days of July
     12,  2005.  Such  shares  issuable  pursuant  to such  options  are  deemed
     outstanding  for computing the  percentage  ownership of the person holding
     such options but are not deemed  outstanding  for the purposes of computing
     the percentage ownership of each other person.

(2)  Includes  3,376,154 shares of common stock held of record by the Vincent J.
     Coates Separate  Property Trust,  U/D/T dated August 7, 1981, for which Mr.
     Coates acts as trustee.

(3)  According to a Schedule 13G filed on February 10, 2004,  Artemis Investment
     Management LLC may be deemed to be the  beneficial  owner of 881,800 shares
     of common stock.

(4)  According to a Schedule 13G/A filed on February 9, 2005,  Dimensional  Fund
     Advisors Inc. may be deemed to be the beneficial owner of 913,148 shares of
     common stock.

(5)  Includes   365,000  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(6)  Includes   30,000  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(7)  Includes   30,000  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(8)  Includes   23,334  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.


                                       8


(9)  Includes   22,667  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(10) Includes 3,333 shares of common stock issuable upon exercise of outstanding
     options exercisable within 60 days of July 12, 2005.

(11) Includes 3,333 shares of common stock issuable upon exercise of outstanding
     options exercisable within 60 days of July 12, 2005.

(12) Includes 3,333 shares of common stock issuable upon exercise of outstanding
     options exercisable within 60 days of July 12, 2005.

(13) Includes   481,000  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

Board Meetings and Committees

     The board of  directors  met (or acted by written  consent) a total of nine
(9) times during fiscal year ended January 1, 2005. During the fiscal year ended
January 1, 2005,  all incumbent  directors  attended at least 75% of meetings of
the board of  directors  and  meetings of  committees,  if any,  upon which such
directors served.  The standing  committees of the board of directors include an
audit    committee,    a    compensation/stock    option    committee    and   a
nominating/governance committee.

     The board of directors has  determined  that all of its directors  meet the
independence  requirements of the Nasdaq National Market,  with the exception of
Vincent J. Coates, Norman V. Coates and John D. Heaton.

     It is the  policy of the  Company to require  its  directors  to attend its
annual meetings absent a valid reason,  such as a schedule conflict.  All of the
directors  who  served on the board of  directors  for the  entire  fiscal  year
attended the 2004 annual meeting of shareholders.

Audit Committee

     The audit  committee  of the board of  directors  reviews and  monitors the
Company's  financial  reporting as well as its  internal  and  external  audits,
including  among  other  things,   the  Company's  internal  audit  and  control
functions, the results and scope of the annual audit and other services provided
by the Company's independent  auditors,  and the Company's compliance with legal
matters that may have a significant  impact on the Company's  financial reports.
In  addition,  the  audit  committee  has the  responsibility  to  consider  and
recommend the employment of, and to review fee arrangements  with, the Company's
independent auditors. The audit committee also monitors transactions between the
Company and its officers, directors and employees for any potential conflicts of
interest.  The audit committee met (or acted by written  consent) five (5) times
during the fiscal year ended January 1, 2005.

     The members of the audit committee  during the fiscal year ended January 1,
2005 were William Oldham, Nathaniel Brenner (through March 2004), Edmond R. Ward
and J.  Thomas  Bentley  (beginning  in April  2004).  Mr.  Brenner,  the  audit
committee's  financial expert in the fiscal year ended January 3, 2004, resigned
his position as director as well as his  committee  assignments  effective as of
March 2004. At the recommendation of the  nominating/governance  committee,  the
board of directors  appointed J. Thomas Bentley to the audit committee as of May
26, 2004.  Mr.  Bentley was  appointed by the board of directors to serve as the
audit committee's financial expert and chairman.

     Each member of the Company's audit  committee is an "independent  director"
as that term is defined under the  applicable  Nasdaq  National  Market  listing
standards. The audit committee has adopted a written charter, which is available
on the Company's website at www.nanometrics.com.

Compensation/Stock Option Committee

     The  compensation/stock  option committee reviews and makes recommendations
to the board of directors  regarding the Company's  compensation  policy and all
forms of compensation to be provided to certain of the executive officers of the
Company, including the chief executive officer.


                                       9


     The  compensation/stock  option  committee is responsible for approving the
grant of stock  options to the  Company's  employees  under the  Company's  2000
Employee Stock Option Plan and 2002 Nonstatutory Stock Option Plan.

     The  members  of the  compensation/stock  option  committee  serving in the
fiscal year ended January 1, 2005 were Edmond Ward, J. Thomas Bentley, Stephen J
Smith  and  Nathaniel  Brenner.  Mr.  Ward  was  appointed  as  chairman  of the
compensation/stock  option  committee  by the board of  directors.  As indicated
above,  Mr.  Brenner  resigned his position as director as well as his committee
assignments effective as of March 2004. The compensation/stock  option committee
met (or acted by  written  consent)  seven (7) times  during  fiscal  2004.  The
compensation/stock  option  committee  has adopted a written  charter,  which is
available on the Company's website at www.nanometrics.com.

Nominating/Corporate Governance Committee

     The Company maintains a standing nominating/corporate  governance committee
that assists the board of directors in identifying and qualifying  candidates to
join the board of directors and addressing governance issues. All members of the
nominating  committee  are  independent.  The  nominating  committee  utilizes a
variety of methods for identifying and evaluating  nominees.  Its general policy
is to assess the  appropriate  size of the board of  directors  and  whether any
vacancies  are  expected  due to  retirement  or  otherwise.  In the event those
vacancies are anticipated,  or otherwise  arise,  the nominating  committee will
consider  recommending  various  potential  candidates  to fill such  vacancies.
Candidates  may come to the attention of the  nominating  committee  through its
current  members,  shareholders  or other  persons.  The board of directors  may
consider properly submitted shareholder nominations for candidacy.  Nominees may
be submitted by shareholders  in accordance  with the shareholder  communication
policy described below.

     The  nominating/corporate  governance  committee  has no specific,  minimum
qualifications for director candidates.  In general, however, persons considered
for board of directors positions must have demonstrated leadership capabilities,
be of  sound  mind and high  moral  character,  have no  personal  or  financial
interest  that would  conflict or appear to conflict  with the  interests of the
Company  and be  willing  and able to  commit  the  necessary  time for board of
directors and committee service.

     The  nominating/corporate  governance committee believes that board members
should  represent  a  balance  of  diverse  backgrounds  and  skills,  including
marketing,  finance,  manufacturing,  engineering,  science,  and  international
experience.  The  nominating/corporate  governance committee consists of William
Oldham  and  Stephen  Smith.  Mr.  Oldham  was  appointed  as  chairman  of  the
nominating/corporate  governance  committee  by  the  board  of  directors.  The
nominating/corporate  governance  committee  met once in the  fiscal  year ended
January 1, 2005 and has adopted a written  charter,  which is  available  on the
Company's website at www.nanometrics.com.

Shareholder Communication Policy

     The board of directors has established a formal process for shareholders to
send  communications to the board of directors or to individual  directors.  The
names of all directors are available to shareholders in this proxy statement. If
the Company receives any shareholder  communication  intended for the full board
of  directors  or  any  individual  director,   the  Company  will  forward  the
communication to the full board of directors or the individual director,  unless
the  communication  is  clearly  of a  marketing  nature or is  unduly  hostile,
threatening,  illegal or similarly inappropriate,  in which case the Company has
the authority to discard the  communications  or take  appropriate  legal action
regarding the communication.

Compensation/Stock Option Committee Interlocks and Insider Participation

     No member of the compensation/stock option committee of the Company's board
of  directors  serves  as a member  of the board of  directors  or  compensation
committee  of any entity that has one or more  executive  officers  serving as a
member  of  the  Company's  board  of  directors  or  compensation/stock  option
committee.

Compensation of Directors

     Directors  who are not also  employees  of the  Company  receive  an annual
retainer  fee of  $5,000,  plus  $1,000  for each  board and  committee  meeting
attended. Directors are also eligible to participate in the Company's Directors'
Stock Option Plan.  Each audit committee  member  receives an additional  $3,000
annual retainer and $500 for attending


                                       10


quarterly earnings release conference calls.  Additionally,  the audit committee
chairman receives an incremental $2,000 retainer for serving in such capacity.

Compensation of Executive Officers

     The following table sets forth the compensation  paid by the Company during
the past three fiscal years to (i) the chief executive officer, (ii) each of the
four most  highly  compensated  executive  officers  (or such  lesser  number of
executive  officers as the Company may have) of the Company not serving as chief
executive  officer and (iii) up to an additional two individuals that would have
been  included  under item (ii) but for the fact that the  individuals  were not
serving  as  executive  officers  as  of  January  1,  2005,  all  of  whom  are
collectively  referred to as the "Named  Officers".  Quentin  Wright and Michael
Weber are not listed on the table below because they did not join the Company in
their capacities as executive officers until after January 1, 2005.



                           Summary Compensation Table
                                                                                                              Long Term
                                                                                                            Compensation
                                                                                                               Awards
                                                                                                           ---------------
                                                                            Annual Compensation               Securities
                                                               ------------------------------------------     Underlying
Name                                                            Fiscal Year      Salary         Bonus         Options (#)
----------                                                     -------------  -------------  ------------  ----------------
                                                                                                    
John D. Heaton                                                     2004        $   341,800    $   79,314        100,000
   President and Chief Executive Officer                           2003            342,800            --        572,500
                                                                   2002            343,800            --        275,000

Vincent J. Coates                                                  2004        $   204,800            --             --
   Chairman of the Board and Secretary                             2003            204,800            --             --
                                                                   2002            204,800            --             --

Roger Ingalls, Jr.                                                 2004        $   195,265    $   29,658          5,000
   Senior Vice President of Standalone Sales                       2003            198,965            --         31,500
                                                                   2002            201,834            --         25,000

Paul B. Nolan                                                      2004        $   183,055    $   29,864             --
   Vice President and Chief Financial Officer                      2003            179,050            --             --
                                                                   2002            162,234            --         50,000

Stock Options Granted in the Fiscal Year Ended January 1, 2005



     The following  table sets forth  information  with respect to stock options
granted  during  the  fiscal  year  ended  January  1, 2005 to each of the Named
Officers.  Quentin  Wright and  Michael  Weber are not listed on the table below
because they did not join the Company in their capacities as executive  officers
until after January 1, 2005.  All options were granted under the Company's  2000
Stock  Option  Plan.  The  potential  realizable  value  amounts in the last two
columns  of the  following  chart  represent  hypothetical  gains  that could be
achieved for the respective  options if exercised at the end of the option term.
The assumed 5% and 10% annual rates of stock price appreciation from the date of
grant to the end of the option term are provided in accordance with rules of the
Securities and Exchange  Commission and do not represent the Company's  estimate
or projection of the future common stock price.  Actual gains,  if any, on stock
option  exercises are dependent on the future  performance  of the common stock,
overall market conditions and the option holder's  continued  employment through
the vesting period.


                                       11


                                       Option Grants in Last Fiscal Year


                                                    Individual Grants
                               ----------------------------------------------------------------
                               Number of             % of Total                                    Potential Realized Value at
                               Securities            Options                                         Assumed Annual Rates of
                               Underlying            Granted to                                    Stock Price Appreciation for
                               Options               Employees                                             Option Term
                               Granted (#)           in Fiscal      Exercise Price   Expiration    -----------------------------
Name                               (1)                Year (2)          ($/Sh)          Date           5%($)           10%($)
-------                        ----------            ----------     --------------   ----------    -------------   -------------
                                                                                                   
John D. Heaton                 100,000                    22%         $   12.02        5/26/11       $ 332,000       $ 734,000
Vincent J. Coates                    0                     0                 --                             --              --
Roger Ingalls, Jr.               5,000                   1.1%             10.37        8/23/11          14,350          31,650
Paul B. Nolan                        0                     0                 --                             --              --


------------------------------

(1)  All options  granted to the Named  Officers in fiscal 2004 were  granted at
     exercise  prices  equal to the fair market  value of the  Company's  common
     stock  on  the  dates  of  grant.  Historically,   options  granted  become
     exercisable at the rate of 33% on the first  anniversary date of the option
     grant  and  33% of the  total  number  of  option  shares  each  full  year
     thereafter,  such that full  vesting  occurs  three years after the date of
     grant. Options (whether vested or unvested) expire after 7 years or 90 days
     after  termination  of  employment.

(2)  Based on 453,550  options  granted  during the fiscal year ended January 1,
     2005.

Aggregated  Option  Exercises  in Last  Fiscal Year and Fiscal  Year-End  Option
Values

     The  following  table  sets  forth the  number of  shares  covered  by both
exercisable and  unexercisable  stock options held by each of the Named Officers
at January 1, 2005. Quentin Wright and Michael Weber are not listed on the table
below  because  they did not join the Company in their  capacities  as executive
officers  until  after  January  1,  2005.  As  indicated  below,  two (2) Named
Officers,  John D. Heaton and Paul B. Nolan,  exercised stock options during the
fiscal year ended January 1, 2005.



                                                                 Number of Securities
                                                                      Underlying                 Value of Unexercised In-the-
                                                                 Unexercised Options at                Money Options at
                               Shares              Value           Fiscal Year-End (#)              Fiscal Year-End ($)(2)
                             Acquired on         Realized($)   -----------------------------     ----------------------------
Name                          Exercise(#)           (1)        Exercisable     Unexercisable     Exercisable    Unexercisable
--------------               -----------        ----------     -----------     -------------     -----------    -------------
                                                                                               
John D. Heaton                 100,000          $ 674,000        219,583          402,917        $ 2,243,722     $ 3,477,728
Vincent J. Coates                   --                 --             --               --                 --              --
Roger Ingalls, Jr.                  --                 --         15,750           20,750            164,115         192,865
Paul B. Nolan                   26,666            213,594         16,666           16,668              9,132         135,107


------------------------------
(1)  The  value  realized  upon  exercise  is (i) the fair  market  value of the
     Company's  common stock on the date of exercise,  less the option  exercise
     price per share,  multiplied  by (ii) the number of shares  underlying  the
     options exercised.
(2)  The  value  of  unexercised  options  is (i) the fair  market  value of the
     Company's  common stock on December  31, 2004 ($16.12 per share),  less the
     option  exercise  price of  in-the-money  options,  multiplied  by (ii) the
     number of shares underlying such options.

Employment  Contracts  and  Termination  of  Employment  and   Change-in-Control
Arrangements

     Pursuant  to the terms of an  agreement  between the Company and Vincent J.
Coates, the Chairman of the Board of the Company,  dated May 1, 1985, as amended
and restated in August 1996 and April 1998, the Company is obligated to continue
to pay Mr.  Coates his salary and  benefits  for five years from the date of his
resignation  in the event Mr.  Coates is  required  to resign as Chairman of the
Board under certain circumstances, including a change of control.


                                       12


     In April 1998,  the Company  entered into an agreement  with John D. Heaton
pursuant  to which  the  Company  agreed to pay Mr.  Heaton  his  annual  salary
(excluding  bonuses)  for a period of one year from the date that he is required
or  requested  for any reason not  involving  good cause,  including a change of
control,  to  involuntarily   relinquish  his  positions  with  the  Company  as
President,  Chief  Executive  Officer and  director.  If Mr.  Heaton  leaves the
Company voluntarily, or if he is asked to leave under certain circumstances,  no
such severance payment is required.

     In March 1995,  the Company  entered into an agreement  with Roger Ingalls,
Jr.  pursuant to which the Company  agreed to pay Mr.  Ingalls his annual salary
(excluding  bonuses) for a period of one hundred twenty (120) days from the date
he is terminated without cause.

Equity Compensation Plan Information

     All  of the  Company's  equity  compensation  plans  except  the  2002  Non
Statutory  Stock Option Plan were  approved by the Company's  shareholders.  The
following  table  sets  forth,   for  all  of  the  Company's   existing  equity
compensation  plans,  the number of outstanding  option grants and the number of
shares  remaining  available for issuance as of the fiscal year ended January 1,
2005.


                                                                                                             Number of
                                                                                                             Securities
                                                                         Number of                           Remaining
                                                                      Securities to be      Weighted       Available for
                                                                        Issued Upon         Average       Future Issuance
                                                                        Exercise of      Exercise Price     Under Equity
                                                                        Outstanding      of Outstanding     Compensation
                                                                          Options           Options          Plans (1)
                                                                      ---------------  ----------------   ---------------
                                                                                                      
Equity Compensation Plans Approved by Security Holders                   1,555,629       $    11.94            483,444
Equity Compensation Plans Not Approved by Security Holders               1,076,646       $     8.13             35,359

------------------------------
(1) Excludes securities to be issued upon exercise of outstanding options.

Certain Relationships

     Vincent  J.  Coates is the father of Norman V.  Coates.  There are no other
family  relationships  between any of the foregoing nominees or between any such
nominees and any of the executive officers of the Company.

Section 16(a) Beneficial Ownership Reporting Compliance

     Section 16(a) of the Exchange Act requires the Company's executive officers
and directors,  and persons who own more than ten percent of a registered  class
of the Company's equity securities,  to file reports of ownership and changes in
ownership with the Securities  and Exchange  Commission and the Nasdaq  National
Market. Executive officers,  directors and greater than ten percent shareholders
are required by Securities  and Exchange  Commission  regulations to furnish the
Company with copies of all Section  16(a) forms that they file.  Based solely on
its review of the copies of such forms received by it or written representations
from certain reporting persons, the Company believes that, with the exception of
Roger Ingalls,  Jr., during the fiscal year ended January 1, 2005, its executive
officers,  directors and greater than ten percent shareholders complied with all
applicable  filing  requirements.  Mr. Ingalls failed to timely report an option
grant on Form 4.


                                       13


Report of the Audit Committee of the Board of Directors

     The  following  is the  report  of the  audit  committee  of the  board  of
directors  describing its review of materials and determinations with respect to
its auditors and financial statements for the fiscal year ended January 1, 2005.
The  information  contained in this report shall not be deemed to be "soliciting
material" or to be "filed" with the  Securities  and  Exchange  Commission,  nor
shall such information be incorporated by reference into any future filing under
the  Securities  Act or  Exchange  Act,  except to the extent  that the  Company
specifically incorporates it by reference into such filing.

     In accordance  with its written  charter adopted by the board of directors,
the  audit   committee   assists  the  board  of  directors  in  fulfilling  its
responsibility  for  oversight of the quality and  integrity of the  accounting,
auditing and  financial  reporting  practices of the Company.  During the fiscal
year  ended  January  1,  2005,  the audit  committee  met (or acted by  written
consent) five (5) times, and the audit committee chairman,  as representative of
the  committee,   discussed  the  interim  financial  information  contained  in
quarterly   earnings   announcements   with  the  chief  financial  officer  and
independent auditors prior to public release.

     The audit  committee  received  from the Company's  independent  auditors a
formal written statement,  consistent with Independence Standards Board Standard
No. 1,  "Independence  Discussions with Audit  Committees,"  which describes all
relationships  between the  auditors  and the  Company  that,  in the  auditors'
professional  opinion,  might  reasonably  be thought  to bear on the  auditors'
independence.   The  audit   committee   discussed   with  the  auditors   these
relationships and satisfied itself as to the auditors' independence.

     The audit  committee  also  discussed  and  reviewed  with the  independent
auditors all communications  required by the Public Company Accounting Oversight
Board (the  "PCAOB")  standards,  including  those  described  in  Statement  on
Auditing  Standards No. 61, as amended,  "Communication  with Audit  Committees"
and, with and without management present,  discussed and reviewed the results of
the independent auditors' Audit of the Company's financial statements.

     Additionally,  the audit  committee  reviewed  and  discussed  the  audited
financial  statements of the Company as of and for the fiscal year ended January
1,  2005  with  management  and the  independent  auditors.  Management  has the
responsibility for the preparation of the Company's financial statements and the
independent auditors have the responsibility for the Audit of those statements.

     Based on the  foregoing  review and  discussions  with  management  and the
independent auditors,  the audit committee recommended to the board of directors
that the  Company's  audited  financial  statements as of and for the year ended
January 1, 2005 be  included  in its  Annual  Report on Form 10-K for the fiscal
year  ended  January  1,  2005 for  filing  with  the  Securities  and  Exchange
Commission.  The audit committee also  recommended the  appointment,  subject to
shareholder  approval,  of the  independent  auditors and the board of directors
concurred in such recommendation.

Members of the Audit Committee

J. Thomas Bentley, Chairman
Edmond R. Ward
William G. Oldham


                                       14


Report of the Compensation/Stock Option Committee of the Board of Directors

     The following is the report of the  compensation/stock  option committee of
the  board  of  directors  describing   compensation   policies  and  rationales
applicable to certain of its executive officers with respect to the compensation
paid to such  executive  officers for the fiscal year ended January 1, 2005. The
information  contained  in such  report  shall not be  deemed to be  "soliciting
material" or to be "filed" with the  Securities  and  Exchange  Commission,  nor
shall such information be incorporated by reference into any future filing under
the  Securities  Act or  Exchange  Act,  except to the extent  that the  Company
specifically incorporates it by reference into such filing.

     General. The compensation/stock  option committee is responsible for making
recommendations  to the board of  directors  with  respect to cash  compensation
levels for certain of the Company's executive officers. During fiscal year ended
January 1, 2005, the  compensation/stock  option  committee also was responsible
for determining levels of equity-based compensation for the Company's employees.

     Compensation  Philosophy.  The  compensation/stock  option  committee makes
recommendations  as to the  salaries  of certain of the  executive  officers  by
considering  (i) the  salaries of  executive  officers in similar  positions  at
comparably-sized  peer companies,  (ii) the Company's financial performance over
the  past  year  based  upon  revenues  and  operating  results  and  (iii)  the
achievement of individual  performance goals related to each executive officer's
duties and areas of  responsibility.  The  compensation/stock  option  committee
makes recommendations as to the levels of cash bonuses awarded to certain of the
Company's executive officers and views such bonuses as being an integral part of
its  performance  based  compensation  program.  Such  bonuses  are based on the
Company's profits and are determined as a percentage of the officer's salaries.

     Equity-Based  Compensation.  The compensation/stock  option committee views
stock  options  as  an  important  part  of  its  long-term,   performance-based
compensation  program.  The  compensation/stock  option  committee  grants stock
options to all  employees  of the Company  under its 2000 Stock  Option Plan and
2002  Nonstatutory  Stock Option Plan based upon the  committee's  estimation of
each employee's  contribution to the long-term  growth and  profitability of the
Company. The 2000 Stock Option Plan is intended to provide additional incentives
to the executive  officers to maximize  shareholder  value.  Options are granted
under the 2000 Stock Option Plan and the 2002 Nonstatutory  Stock Option Plan at
the then-current  market price and are generally  subject to three-year  vesting
periods to encourage key employees to remain with the Company.

     Compensation of the Chief Executive Officer. The compensation/stock  option
committee  has  reviewed  all  components  of  the  chief  executive   officer's
compensation,   including  salary,   bonus,   equity,  stock  options,  and  the
obligations under the Company's change of control  severance  agreement with Mr.
Heaton.

     Based on this review,  the  compensation/stock  option  committee found Mr.
Heaton's total compensation (and, in the case of the change of control severance
agreement,  potential  payout)  in  the  aggregate  to  be  reasonable  and  not
excessive.  Furthermore,  although Mr. Heaton made valuable contributions to the
Company  during  fiscal  year  ended  January  3,  2004,  in light  of  economic
conditions,  the compensation/stock option committee determined that an increase
to the base salary of the chief executive  officer would not be appropriate.  It
should be noted that when the compensation/stock  option committee considers any
component of the chief  executive  officer's total  compensation,  the aggregate
amounts  and mix of all the  components,  including  accumulated  (realized  and
unrealized) option gains are taken into consideration in the  compensation/stock
option committee's decisions.

     Section 162(m). The Company intends that awards granted under the Company's
2000 Stock Option Plan and 2002 Nonstatutory  Stock Option Plan be deductible by
the Company  under  Section  162(m) of the  Internal  Revenue  Code of 1986,  as
amended.

Members of the Compensation/Stock Option Committee

Edmond Ward, Chairman
J. Thomas Bentley
Stephen J Smith


                                       15


Stock Performance Graph

     The following graph compares the cumulative total return to shareholders of
the Company's  common stock from December 31, 1999 through  December 31, 2004 to
the  cumulative  total  return over such period of (i) the Nasdaq  Stock  Market
(U.S.) Index and (ii) the RDG  Technology  Composite  Index.  The results  shown
assume that $100 was invested on December 31, 1999 in the Company's common stock
and in each of the other two indices with any dividends reinvested.  Information
about RDG Technology Composite Index may be obtained at the Research Data Group,
Inc. website address  www.researchdatagroup.com/ComponentsTech.htm or by calling
Research Data Group at (415) 643-6000.

     The information  contained in the performance  graph shall not be deemed to
be  "soliciting  material"  or to be "filed"  with the  Securities  and Exchange
Commission,  nor shall such  information be  incorporated  by reference into any
future filing under the  Securities  Act or Exchange  Act,  except to the extent
that the Company specifically incorporates it by reference into such filing.

     COMPARISON   OF  5-YEAR   CUMULATIVE   TOTAL   RETURN   AMONG   NANOMETRICS
INCORPORATED,  THE  NASDAQ  STOCK  MARKET  (U.S.)  INDEX AND THE RDG  TECHNOLOGY
COMPOSITE INDEX

                       [GRAPHIC OMITTED][GRAPHIC OMITTED]
                               (Performance Graph)


                                       16


"Householding" of Proxy Materials

     The  Securities  and  Exchange  Commission  has  adopted  rules that permit
companies and  intermediaries  such as brokers to satisfy delivery  requirements
for proxy statements with respect to two or more  shareholders  sharing the same
address by delivering a single proxy statement  addressed to those shareholders.
This  process,  which is  commonly  referred to as  "householding,"  potentially
provides extra convenience for shareholders and cost savings for companies.  The
Company and some brokers  household proxy  materials,  delivering a single proxy
statement  to  multiple   shareholders   sharing  an  address  unless   contrary
instructions  have been received from the affected  shareholders.  Once you have
received  notice from your broker or the Company  that the broker or the Company
will be householding materials to your address, householding will continue until
you are  notified  otherwise or until you revoke your  consent.  Upon written or
oral request to the Investor  Relations  department  of the Company,  by mail at
1550  Buckeye  Drive,  Milpitas,  California,  95035  or by  telephone  at (408)
435-9600,  the Company will promptly  deliver a copy of its proxy statement to a
shareholder if that  shareholder  shares an address with another  shareholder to
which a single copy of the proxy  statement was  delivered.  A  shareholder  may
notify the Company as  described  above if the  shareholder  wishes to receive a
separate  copy of the proxy  statement in the future or,  alternatively,  if the
shareholder wishes to receive a single copy of the materials instead of multiple
copies.


                                       17


                                   PROPOSAL 2
                  REINCORPORATION FROM CALIFORNIA INTO DELAWARE
                          (THE REINCORPORATION MERGER)

General

     The board of  directors,  by a unanimous  vote at a special  meeting of the
board of directors,  adopted a resolution approving a change in the state of its
incorporation from California to Delaware.  If approved by the requisite vote of
the Company's  shareholders,  this  reincorporation  shall be effected through a
merger of the  Company  with its wholly  owned  subsidiary,  Big  League  Merger
Corporation, a Delaware corporation.

Proposal

     The  Company  is  proposing  to  merge  with and  into  Big  League  Merger
Corporation.  This merger is referred to herein as the  reincorporation  merger.
Big League  Merger  Corporation  will succeed to all of the rights,  properties,
assets and liabilities of the Company.  Upon  completion of the  reincorporation
merger,  the Company will cease to exist and Big League Merger  Corporation will
continue to operate the  business  of the  Company  under the name  "Nanometrics
Incorporated"  as  a  Delaware   corporation.   For   convenience,   Nanometrics
Incorporated,  after the reincorporation merger, is sometimes referred to as the
Delaware  company.  Each outstanding share of the Company's common stock, no par
value per share, will be automatically  converted into one share of common stock
of the Delaware company,  $0.001 par value per share, upon the effective date of
the  reincorporation  merger.  It will not be necessary for  shareholders of the
Company to exchange their existing stock  certificates for stock certificates of
the  Delaware   company.   Upon  completion  of  the   reincorporation   merger,
certificates which immediately prior to the  reincorporation  merger represented
shares  of  common  stock of the  Company  will be deemed  for all  purposes  to
represent  the same number of shares of the  Delaware  company's  common  stock.
Nevertheless,  shareholders  may exchange their  certificates if they so choose.
The Company's  common stock is listed for trading on the Nasdaq  National Market
and, after the reincorporation  merger, the Delaware company's common stock will
continue to be traded on the Nasdaq National Market without interruption,  under
the same symbol, NANO, as the shares of the Company's common stock are currently
traded.

     The  reincorporation  merger has been  approved by the  Company's  board of
directors,  by a  unanimous  vote  at a  special  meeting.  If  approved  by the
requisite  vote  of the  Company's  shareholders,  it is  anticipated  that  the
reincorporation  merger will become  effective as soon as practicable  following
the annual  meeting of  shareholders.  The Company's  shareholders  will have no
appraisal rights with respect to the reincorporation merger.

     Immediately  following the completion of the  reincorporation  merger,  the
composition of the board of directors of Big League Merger Corporation will be
the same as the composition of the board of directors of the Company immediately
prior to the reincorporation merger.

     After the reincorporation  merger, the rights of the Company's stockholders
and the  Company's  corporate  affairs will be governed by the Delaware  General
Corporation Law, and the certificate of incorporation and bylaws of the Delaware
company,  or the  Delaware  charter  documents,  rather  than by the  California
General Corporation Law, and the current articles of incorporation and bylaws of
the Company, or the California charter documents.  There are differences between
the California  charter documents and the Delaware charter documents that may be
important to you. See the section of this proxy statement  entitled  "Comparison
of Rights of Holders and Corporate  Governance  Matters" for a comparison of the
material rights of equity holders and matters of corporate governance before and
after the reincorporation merger.

     The summary and discussion of the proposed reincorporation merger set forth
in this proxy  statement  is  qualified  in its  entirety  by  reference  to the
California  General  Corporation Law, the Delaware General  Corporation Law, the
California charter documents and the Delaware charter  documents.  Copies of the
California  charter  documents  are  available  for  inspection at the Company's
executive  offices.  Additionally,  the Company will send such  documents to you
upon request.  Copies of the Delaware company charter  documents are attached to
this  proxy  statement  as  Appendix  A and B. We urge you to read each of these
documents carefully for a complete understanding of your rights.

Principal Reasons for the Reincorporation Merger

     As the Company plans for the future,  the board of directors and management
believe that it is essential to be able to draw upon well-established principles
of corporate  governance in making legal and business decisions.  The prominence
and  predictability of Delaware  corporate law provide a reliable  foundation on
which the Company's


                                       18


corporate  governance  decisions can be based, and the Company believes that its
shareholders will benefit from the  responsiveness of Delaware  corporate law to
their needs and to those of the corporation they own.

Prominence, Predictability and Flexibility of Delaware Law

     For many years, Delaware has followed a policy of encouraging incorporation
in that state and, in furtherance of that policy, has been a leader in adopting,
construing and implementing comprehensive, flexible corporate laws responsive to
the legal and business  needs of  corporations  organized  under its laws.  Many
corporations have chosen Delaware  initially as a state of incorporation or have
subsequently changed their corporate domicile to Delaware. Because of Delaware's
prominence as the state of incorporation for many major  corporations,  both the
legislature  and  courts  in  Delaware  have   demonstrated  an  ability  and  a
willingness to act quickly and effectively to meet changing  business needs. The
Delaware courts have developed  considerable expertise in dealing with corporate
issues,  and a substantial  body of case law has developed  construing  Delaware
law,  resulting  in  greater  predictability  with  respect to  corporate  legal
affairs.

Increased Ability to Attract and Retain Qualified Directors

     Both  California  and  Delaware  law  permit a  corporation  to  include  a
provision  in its charter  which  reduces or limits the  monetary  liability  of
directors  for  breaches  of  fiduciary  duty  in  certain  circumstances.   The
increasing  frequency of claims and litigation  directed  against  directors and
officers has expanded the risks facing directors and officers of corporations in
exercising  their  respective  duties.  The amount of time and money required to
respond to such claims and to defend such  litigation  can be  substantial.  The
Company desires to reduce these risks to its directors and officers and to limit
situations in which monetary  damages can be recovered  against its directors so
that it may continue to attract and retain  qualified  directors  who  otherwise
might be unwilling to serve because of the risks involved.  The Company believes
that, in general,  Delaware law provides  greater  protection to directors  than
California law and that Delaware law regarding a corporation's  ability to limit
director  liability is more developed and provides more guidance than California
law.

Well Established Principles of Corporate Governance

     There is substantial  judicial  precedent in the Delaware  courts as to the
legal  principles  applicable to measures that may be taken by a corporation and
as to the conduct of the board of directors,  such as the business judgment rule
and other standards.  This tends to assure a significant measure of certainty to
legal  aspects  of the  conduct  of  business  and a sound  basis for  planning.
Therefore,  the Company  believes  that its  shareholders  will benefit from the
well-established principles of corporate governance that Delaware law affords.

No Change in Board  Members,  Business,  Management,  Employee  Benefit Plans or
Location of Principal Facilities

     The  reincorporation  merger will effect a change in the legal  domicile of
the Company and certain  other  changes of a legal nature which are described in
this  proxy   statement.   Except  as   contemplated   in  connection  with  the
reincorporation merger, the reincorporation merger will NOT result in any change
in the Company's business,  management, assets or liabilities or the location of
its principal  facilities.  Under United States  generally  accepted  accounting
principles,  the proposed reincorporation will not result in any gain or loss to
the Company. The consolidated  financial statements and results of operations of
the Delaware company immediately  following the  reincorporation  merger will be
identical  to that  of the  Company  immediately  prior  to the  reincorporation
merger.  The directors of the Company  immediately prior to the  reincorporation
merger will become the directors of the Delaware company  immediately  following
the  reincorporation  merger.  All employee  benefit,  stock option and employee
stock  purchase  plans of the  Company  will be  assumed  and  continued  by the
Delaware  company,  and each option or right issued  pursuant to such plans will
automatically  be converted  into an option or right to purchase the same number
of shares  common  stock of the Delaware  company,  at the same price per share,
upon the same terms,  and subject to the same  conditions.  Shareholders  should
note that  approval  of this  proposal 2 will also  constitute  approval  of the
assumption  of these  plans by the  Delaware  company.  Other  employee  benefit
arrangements of the Company will also be continued by the Delaware  company upon
the terms and subject to the  conditions  currently  in effect.  As noted above,
after the  reincorporation  merger,  the shares of common  stock of the Delaware
company will continue to be traded, without interruption,  in the same principal
market (the Nasdaq  National  Market) and under the same  symbol,  NANO,  as the
shares of common stock of the Company are currently traded. The Company believes
that the proposed  reincorporation will not affect any of its material contracts
with any third parties and that the Company's rights and obligations  under such
material  contractual  arrangements will continue and be assumed by the Delaware
company.  See the section of this proxy statement entitled "Comparison of Rights
of Holders and  Corporate  Governance  Matters" for a comparison of the material
rights of equity  holders and matters of corporate  governance  before and after
the reincorporation merger.


                                       19


Material United States Federal Income Tax  Consequences  of the  Reincorporation
Merger

     This section of the proxy  statement  summarizes the material United States
federal income tax considerations of the reincorporation merger to the Company's
shareholders.  The summary is based on the  Internal  Revenue  Code of 1986,  as
amended,  applicable  United  States  Treasury  regulations  under the  Internal
Revenue Code,  administrative rulings and judicial authority, all as of the date
of this proxy statement. All of the foregoing authorities are subject to change,
with or without  retroactive  effect, and any change could affect the continuing
validity  of this  summary.  A  ruling  from the  Internal  Revenue  Service  in
connection with the reincorporation merger will not be requested,  and we cannot
assure  you  that  the  Internal   Revenue   Service  will   conclude  that  the
reorganization  merger qualifies as a reorganization under Section 368(a) of the
Internal Revenue Code.

     The summary  assumes that the Company's  shareholders  hold their shares as
capital assets.  The summary does not address the tax  consequences  that may be
applicable to particular shareholders in light of their individual circumstances
or to  shareholders  who are  subject to special tax rules,  such as  non-United
States  persons,  dealers in  securities,  shareholders  who acquired  shares of
common stock  through the exercise of options or  otherwise as  compensation  or
through a qualified  retirement  plan,  and  shareholders  who hold their common
stock as part of a straddle, hedge, or conversion transaction. In addition, this
summary does not address the tax consequences of the  reincorporation  merger to
holders  of  options  or  warrants  to  acquire  capital  stock  of or  the  tax
consequences of transactions effectuated prior or subsequent to, or concurrently
with,  the  reincorporation  merger,  whether or not any such  transactions  are
undertaken in connection with the reincorporation merger. This summary also does
not address any consequences  arising under the tax laws of any state, local, or
foreign jurisdiction.

         The reincorporation merger will qualify as a reorganization within the
meaning of Section 368(a) of the Internal Revenue Code, which will result in the
following federal income tax consequences to the Company's shareholders:

     o    shareholders  will not  recognize any gain or loss upon the receipt of
          common stock in the reincorporation merger;

     o    the aggregate tax basis of the common stock  received by  shareholders
          in the  reincorporation  merger will be the same as the  aggregate tax
          basis of the common stock surrendered in exchange therefor;

     o    the holding period of the common stock received by each shareholder in
          the  reincorporation  merger will  include the period for which common
          stock surrendered in exchange therefor was considered to be held; and

     o    the Company will not recognize  gain or loss solely as a result of the
          reincorporation merger.

     SHAREHOLDERS  SHOULD  CONSULT  THEIR OWN TAX  ADVISORS  WITH RESPECT TO THE
SPECIFIC TAX CONSEQUENCES OF THE PROPOSED REINCORPORATION TO THEM, INCLUDING THE
APPLICATION AND EFFECT OF UNITED STATES FEDERAL, STATE, LOCAL AND FOREIGN INCOME
AND OTHER TAX LAWS.

Vote Required

     The affirmative vote of the holders of a majority of the outstanding shares
of common  stock  entitled to vote on the record date is required to approve its
reincorporation from a California corporation to a Delaware corporation.  Unless
otherwise instructed, the proxies will vote "FOR" this proposal 2.

     THE BOARD OF DIRECTORS RECOMMENDS THAT THE SHAREHOLDERS VOTE "FOR" PROPOSAL
2.


                                       20




                                 PROPOSALS 3A-G
                     GOVERNANCE PROVISIONS OF THE COMPANY'S
                     CERTIFICATE OF INCORPORATION AND BYLAWS

     If  approved  by the  requisite  vote of the  Company's  shareholders,  the
Company will change the state of its incorporation  from California to Delaware.
Upon completion of the  reincorporation  merger, the Company will be governed by
the Delaware General Corporation Law and the certificate of incorporation of Big
League Merger Corporation,  currently a wholly-owned  subsidiary of the Company.
The proposed certificate of incorporation that will govern the Company following
the completion of the  reincorporation  merger differs in some material respects
from the Company's  existing articles of  incorporation.  At the annual meeting,
you  will be  asked  to  consider  and  vote  on each of the  governance-related
provisions in the Company's  certificate of  incorporation to be in effect after
the reincorporation merger described below.

     The following is a summary of selected governance-related provisions of the
form of  certificate of  incorporation  of the Company to be in effect after the
reincorporation  merger. While the Company believes that this description covers
the material  governance-related  provisions of the certificate of incorporation
of the Company to be in effect  after the  reincorporation  merger  which differ
materially from the Company's  existing  articles of  incorporation,  it may not
contain all of the information  that is important to you and is qualified in its
entirety by reference to the form of certificate of incorporation  and bylaws of
the  Company  which are  attached to this proxy  statement  as Appendix A and B,
respectively.  We urge you to read each of these documents  carefully.  See also
the section of this proxy  statement  entitled  "Comparison of Rights of Holders
and Corporate  Governance  Matters" for a comparison of rights of equity holders
and matters of corporate governance before and after the reincorporation merger.

Proposal  3A:  A  proposal  to  approve  a  provision   limiting  the  Company's
stockholders' right to call special meetings of stockholders.

     Under the Company's  current bylaws,  a special meeting of shareholders may
be  called  at any  time  by one or  more  shareholders  holding  shares  in the
aggregate  entitled to cast at least 10% of the votes at that meeting.  However,
the  Company's   certificate  of   incorporation  to  be  in  effect  after  the
reincorporation  merger provides that special  meetings of  stockholders  may be
called by the  chairman of the board of  directors or by a majority of the board
of directors, but such special meetings may not be called by any other person or
persons.

     See Article VIII of the form of certificate of incorporation of the Company
to be in effect after the reincorporation merger.

Proposal  3B:  A  proposal  to  approve  a  provision   limiting  the  Company's
stockholders' ability to act by written consent.

     Under the Company's  current  bylaws,  any action which may be taken at any
annual or special  meeting of  shareholders  may be taken  without a meeting and
without  prior  notice,  if a consent in  writing,  setting  forth the action so
taken,  is signed by the holders of outstanding  shares having not less than the
minimum number of votes that would be necessary to authorize or take that action
at a meeting at which all shares  entitled to vote on that  action were  present
and  voted.  In the case of  election  of  directors,  such a  consent  shall be
effective only if signed by the holders of all  outstanding  shares  entitled to
vote for the election of directors.

     Delaware  law  permits  stockholders  to act  by  written  consent,  unless
otherwise provided in the certificate of incorporation.  However,  the Company's
certificate of  incorporation to be in effect after the  reincorporation  merger
does not permit  stockholder  action by written  consent  and  provides  that no
action may be taken by the


                                       21


stockholders  except at an annual or special meeting of  stockholders  called in
accordance with the certificate of incorporation and bylaws.

     See Article VIII of the form of certificate of incorporation of the Company
to be in effect after the reincorporation merger.

Proposal 3C: A proposal to approve a provision  requiring a super-majority  vote
of the Company's  stockholders to amend certain provisions of its certificate of
incorporation.

     Under the Company's current articles of incorporation,  certain  amendments
to the  articles of  incorporation  requires  the  affirmative  vote of board of
directors  and the  holders of at least a  majority  of the  outstanding  shares
entitled  to vote.  The  certificate  of  incorporation  of the Company to be in
effect after the  reincorporation  merger requires the  affirmative  vote of the
holders of at least 66.67% of the outstanding  shares entitled to vote to amend,
repeal or adopt a provision  inconsistent with the provisions of the certificate
of incorporation  relating to (i) shares  authorized;  (ii) amendment of bylaws;
(iii) authority to call special stockholder meetings;  and (iv) amendment of the
certificate of incorporation.

     See Article X of the form of certificate of incorporation of the Company to
be in effect after the reincorporation merger.

Proposal 3D: A proposal to approve a provision  requiring a super-majority  vote
of the  Company's  stockholders  to amend  certain  provisions  of the Company's
bylaws.

     Under  California law and the Company's  current bylaws,  the bylaws may be
adopted,  amended or repealed  either by the board of directors or a majority of
the  outstanding  shares  entitled to vote.  Under the Company's  certificate of
incorporation to be in effect after the  reincorporation  merger,  bylaws may be
adopted,  amended,  altered  or  repealed  by  the  board  of  directors  or the
affirmative  vote of the  holders  of at least  66.67% of the  shares of capital
stock of the corporation issued, outstanding and entitled to vote.

     See Article VI of the form of certificate of  incorporation  of the Company
to be in effect after the reincorporation merger.

Proposal  3E:  A  proposal  to  approve  a  provision   limiting  the  Company's
stockholders' right to remove directors from office without cause.

     Under  California law, any director or the entire board of directors may be
removed,  with  or  without  cause,  with  the  approval  of a  majority  of the
outstanding  shares  entitled to vote.  However,  the Company's  certificate  of
incorporation  to be in effect after the  reincorporation  merger  provides that
directors may be removed from office by the stockholders  only for cause.  Under
Delaware law, such  stockholder  action must occur by a majority of  outstanding
stock entitled to vote.

     See Article V of the form of certificate of incorporation of the Company to
be in effect after the reincorporation merger.

Proposal 3F: A proposal to approve the  classification of the board of directors
into separate classes with staggered terms.

     The Company's  current articles of incorporation and bylaws do not classify
the board of directors into separate classes with staggered terms.  However, the
Company's bylaws to be in effect after the  reincorporation  merger provides for
the  classification  of the board of  directors  into  three  separate  classes,
consisting as nearly equal in number as may be  practicable  of 1/3 of the total
number of directors  constituting the entire board of directors,  with staggered
three-year  terms.  Any  vacancies  which occur during a year may be filled by a
majority of the directors then in office.  Persons  elected to fill vacancies in
this  manner  may serve  until  the next  election  of the class for which  such
director shall have been chosen

     See Article III,  Section 3.4 of the form of bylaws of the Company to be in
effect after the reincorporation merger.


                                       22


Proposal 3G: A proposal to approve a provision limiting cumulative voting rights
in connection with the election of directors.

     The Company's current bylaws provide for cumulative voting for the election
of  directors  at meetings of  shareholders.  Every  shareholder  voting for the
election of the Company's board of directors may (i) cumulate such shareholder's
votes and give one  candidate a number of votes equal to the number of directors
to be elected multiplied by the number of shares that such shareholders holds or
(ii)  distribute  such  shareholder's  votes on the same principle among as many
candidates as the shareholder may select, provided that votes cannot be cast for
more  than  the  number  of  candidates  standing  for  election.   However,  no
shareholder  shall be  entitled to  cumulate  votes for a  candidate  unless the
candidate's  name has been  placed in  nomination  prior to the  voting  and the
shareholder, or any other shareholder,  has given notice at the meeting prior to
the voting of the intention to cumulate votes.

     The  Company's  certificate  of  incorporation  to be in  effect  after the
reincorporation merger will not provide for cumulative voting in connection with
the election of  directors.  Under  Delaware  law,  directors are elected by the
affirmative vote of a plurality of the shares present in person or by proxy at a
stockholder meeting entitled to vote on the election of directors.

Purpose

     The  Company's   board  of  directors  has  approved  the   certificate  of
incorporation  that includes the provisions  described above.  These provisions,
including,  for example, the elimination of shareholders' rights to call special
meetings,  may have the effect of delaying  or  deterring  unsolicited  takeover
transactions. The board of directors determined that it was appropriate to adopt
these  provisions in the Company's  certificate of incorporation to be in effect
after the reincorporation merger,  notwithstanding the fact that such provisions
are absent from the  Company's  current  articles of  incorporation  in order to
enhance  stockholder  value by helping  the Company  thwart  hostile or coercive
overtures that are not supported by the board of directors.

Vote Required

     Under applicable  state law,  stockholder  approval of the  reincorporation
merger is sufficient to implement the proposed governance-related  provisions in
the Company's  certificate  of  incorporation.  Under rules  promulgated  by the
Securities and Exchange Commission,  however, we are required to present each of
the  proposed   governance-related   provisions  as  a  separate   proposal  for
stockholder approval. Accordingly, we have determined that we will not implement
any of the proposed  governance-related  provisions unless it is approved by the
affirmative  vote of the  holders of a majority  of the shares of the  Company's
common  stock  represented  and  voting  on  each  proposed   governance-related
provision at the annual meeting.


                   THE BOARD OF DIRECTORS RECOMMENDS THAT THE
                     SHAREHOLDERS VOTE "FOR" PROPOSALS 3A-G.



                                       23



        COMPARISON OF RIGHTS OF HOLDERS AND CORPORATE GOVERNANCE MATTERS

     The Company is  incorporated  under the laws of the State of California and
accordingly, the rights of the shareholders of Company are currently governed by
the  California   General   Corporation  Law  and  the  Company's   articles  of
incorporation and bylaws.  Upon completion of the  reincorporation  merger,  the
Company will be a Delaware  corporation,  and the rights of the  stockholders of
the Company will be governed by the  Delaware  General  Corporation  law and the
Company's certificate of incorporation and bylaws.

     The following is a summary of the material  differences between the current
rights of holders of the Company's common stock and the rights of holders of the
Company's  common  stock upon  completion  of the  reincorporation  merger.  The
Company will send copies of the Company's  articles of incorporation  and bylaws
to you,  without  charge,  upon your  request.  Copies of the  Delaware  company
certificate of incorporation  and bylaws are attached to this proxy statement as
Appendix A and B, respectively.


                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Authorized Capital Stock        The authorized capital stock of the         The authorized capital stock of the
                                Company consists of 50,000,000 shares       Delaware company consists of
                                of common stock, no par value per           47,000,000 shares of common stock,
                                share.                                      par value $0.001 per share, and
                                                                            3,000,000 shares of preferred stock, par value
                                                                            $0.001 per share. The board of directors of the
                                                                            Delaware company is authorized to issue preferred
                                                                            stock in series, to establish from time to time the
                                                                            number of shares to be included in each series, and
                                                                            to fix the designation, powers, preferences and
                                                                            relative rights of each such series and the
                                                                            qualifications, limitations or restrictions
                                                                            thereof.


Number of Directors             The Company's bylaws provide that the       No fixed number of directors is
                                board of directors shall consist of not     required by either the bylaws or
                                less than five nor more than seven          certificate of incorporation of the
                                members. The exact number shall be          Delaware company. Rather, the
                                seven, however, until an amendment to       authorized number of directors is to
                                the bylaws otherwise fixing the number      be determined from time to time by
                                is duly adopted by the board of             resolution of the board of directors.
                                directors or shareholders. The number of    The board of directors of the Delaware
                                directors may be changed by an amendment    company currently consists of two
                                to the articles of incorporation or by      directors. Upon completion of the
                                an amendment to the bylaws, duly adopted    reincorporation merger, the Delaware
                                by the vote or written consent of           company board of directors will be
                                holders of a majority of the outstanding    expanded to consist of seven
                                shares entitled to vote; provided,          directors.
                                however, that an amendment reducing the
                                fixed number or the minimum number of
                                directors to a number less than five
                                cannot be adopted if the votes cast
                                against its adoption at a meeting, or
                                the shares not consenting in the case of
                                an action by written consent, are equal
                                to more than 16 (2)/3% of the
                                outstanding shares entitled to vote
                                thereon. No amendment may change the
                                stated maximum number of authorized
                                directors to a number greater than two
                                times the stated minimum number of
                                directors minus one.



                                       24




                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Cumulative Voting               The Company's bylaws provide for            The certificate of incorporation and
                                cumulative voting for the election of       bylaws, as proposed, do not provide
                                directors at meetings of shareholders.      for cumulative voting. If the
                                Accordingly, the Company's shareholders     Company's shareholders approve
                                have cumulative voting rights               proposal 3G, the Delaware company
                                in connection with the election             stockholders will not have cumulative
                                of directors.                               voting rights in connection with the
                                                                            election of directors. If the
                                                                            Company's shareholders do not approve
                                                                            proposal 3G, the Delaware company
                                                                            bylaws will provide for cumulative
                                                                            voting.

Classification of Board of      The Company's articles of incorporation     The Delaware company's bylaws classify
Directors                       and bylaws do not classify the              the board of directors into three
                                Company's  board of directors into          separate classes as nearly equal in
                                separate classes with staggered terms.      size as practicable, with staggered
                                                                            three-year terms. This classification of the
                                                                            Delaware company's board of directors can make it
                                                                            difficult for a potential acquirer to obtain
                                                                            control of the Delaware company's board of
                                                                            directors.

Removal of Directors            Under California law, the board of          The Delaware company's certificate of
                                directors may declare vacant the office     incorporation, as proposed, provides
                                of a director who has been declared of      that directors may be removed from
                                unsound mind by an order of court or        office by the stockholders only for
                                convicted of a felony. Further, any         cause. If the Company's shareholders
                                director or the entire board of             approve proposal 3E, then a majority
                                directors may be removed, with or           vote of the Delaware company's
                                without cause, with the approval of a       stockholders would be required to
                                majority of the outstanding shares          remove a director for cause.
                                entitled to vote thereon; however, no
                                director may be removed (unless the
                                entire board is removed) if the number
                                of shares voted to elect the director 
                                under cumulative voting.  Shareholders 
                                holding at least 10% of the  outstanding
                                shares in any class may sue in superior 
                                county court to remove  from  office 
                                any officer or director for fraud,  
                                dishonest acts or gross abuse of 
                                authority or discretion.

Filling Vacancies on the        Under California law, any vacancy on the    Under Delaware law, unless otherwise
Board of Directors              board of directors other than one           provided in the certificate of
                                created by removal of a director may be     incorporation or the bylaws, (i)
                                filled by the board of directors, unless    vacancies on a board of directors; and
                                otherwise provided in the articles of       (ii) newly created directorships
                                incorporation or bylaws. If the number      resulting from an increase in the
                                of directors is less than a quorum, a       number of directors, may be filled by
                                vacancy may be filled by the unanimous      a majority of the directors then in
                                written consent of the directors then in    office. In the case of the classified
                                office, by the affirmative vote of a        board of directors of the Delaware
                                majority of the directors at a meeting      company, directors elected to fill
                                held pursuant to notice or waivers of       vacancies or newly created
                                notice, or by a sole remaining director.    directorships will hold office until
                                A vacancy created by removal of a           the next election of the class for
                                director can only be filled by the          which the directors have been chosen.
                                shareholders unless board approval is       The certificate of incorporation and
                                authorized by a corporation's articles      bylaws of the Delaware company provide
                                of incorporation or by a bylaw approved     that any vacancies on its board of
                                by the corporation's shareholders.          directors may be filled by the
                                Neither the articles of incorporation       affirmative vote of a majority of the
                                nor the bylaws of the Company permit the    remaining directors in office, even if
                                board of directors to fill a vacancy        less than a quorum, or by a sole
                                created by the removal of a director.       remaining director.



                                       25



                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Special Meetings of             The Company's bylaws, in accordance with    The Delaware company's certificate of
Shareholders                    California law, provide that a special      incorporation, as proposed, provides 
                                meeeting of shareholders may                that special meetings of the stockholders
                                be convened at any time by                  for any purpose or purpose may be called 
                                the board directors, or by                  at any time by the chairman of the board of
                                the chairman of the board of                directors or by a majority of the authorized 
                                directors, or by the                        number of directors, but such special meetings
                                president, or by one or more                may not be called by any other person or
                                shareholders holding shares                 persons. If the Company's shareholders
                                in the aggregate entitled to                approve proposal 3A, then the Delaware
                                cast at least 10% of the                    company stockholders will not have the
                                votes at that meeting.                      ability to call special meetings.
                                

Advance Notice Provisions for   The Company's bylaws, in                    The Delaware company's certificate of
Meetings of Shareholders        accordance with California                  incorporation, in accordance with Delaware
                                law, provide that written                   law, provides that written notice of a special 
                                notice of a special meeting                 meeting of the stockholders specifying the place, 
                                of the shareholders                         if any, date and hour of the meeting, the means of
                                specifying the place, date                  remote communication, if any, and the purpose of the
                                and hour of the meeting and                 meeting must be given to each stockholder
                                the purpose of the meeting                  entitled to vote not less than 10 nor more than 60
                                must be given to each                       days before the date of the meeting.
                                shareholder not less than 10    
                                nor more than 60 days before    
                                the date of the meeting.        
                                                                

Action by Written Consent of    The Company's bylaws provide that any       The Delaware company's certificate of
the Shareholders                action which may be taken at any annual     incorporation, as proposed, does not
                                or special meeting of shareholders may      allow action to be taken by its
                                be taken without a meeting and without      stockholders by written consent. If
                                prior notice, if a consent in writing,      the Company's shareholders approve
                                setting forth the action so taken, is       proposal 3B, then no action may be
                                signed by the holders of outstanding        taken by the Delaware company
                                shares having not less than the minimum     stockholders except at an annual or
                                number of votes that would be necessary     special meeting of stockholders called
                                to authorize or take that action at a       in accordance with the Delaware
                                meeting at which all shares entitled to     company's certificate of incorporation
                                vote on that action were present and        and bylaws.
                                voted. In the case of election of
                                directors, such a consent shall be
                                effective only if signed by the holders
                                of all outstanding shares entitled to
                                vote for the election of directors. This
                                provision allows the Company's
                                shareholders to take action without a
                                shareholder meeting and thereby dispense
                                with the limits on who may call, and the
                                notice requirements of, shareholders
                                meetings.



                                       26



                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Proxies                         The Company's bylaws, in accordance with    The Delaware company's bylaws enable
                                California law, provide that any            each stockholder entitled to vote at a
                                shareholder entitled to vote for            meeting of stockholders to authorize
                                directors, or any other matter, shall       another person or persons to act for such
                                have the right to do so by designating      stockholder by proxy authorized by an
                                another person to act for such              instrument in writing or by a transmission
                                shareholder by proxy. No proxy, however,    permitted by law filed in accordance with
                                shall be voted or acted upon after          the procedure established for the meeting.
                                11 months from its date, unless the         No proxy, however, may be voted or acted
                                proxy provides for a longer period.         upon after three years from its date
                                                                            unless the proxy specifies a longer period.

Charter Amendment               Under California law, unless otherwise      Under Delaware law, unless the
                                specified in the articles of                certificate of incorporation requires a
                                incorporation, an amendment to the          greater vote, an amendment to the
                                articles of incorporation requires the      certificate of incorporation requires
                                approval of the corporation's board of      (i) the approval and recommendation of
                                directors and the affirmative vote of a     the board of directors; (ii) the
                                majority of the outstanding shares          affirmative vote of a majority of the
                                entitled to vote thereon, either before     outstanding stock entitled to vote on
                                or after the board of directors             the amendment; and (iii) the
                                approval, although certain minor            affirmative vote of a majority of the
                                amendments may be adopted by the board      outstanding stock of each class
                                of directors alone, such as amendments      entitled to vote on the amendment as a
                                causing stock splits (including an          class. The certificate of incorporation
                                increase in the authorized number of        of the Delaware company, as proposed,
                                shares in proportion thereto) and           further requires the affirmative vote
                                amendments changing names and addresses     of the holders of at least 66.67% of
                                given in the articles. The Company's        the shares of capital stock of the
                                articles of incorporation do not require    corporation issued and outstanding and
                                a greater level of approval. Under          entitled to vote to amend, repeal or
                                California law, the holders of the          adopt a provision inconsistent with
                                outstanding shares of a class of stock      provisions of the Delaware company's
                                are entitled to vote as a class if a        certificate of incorporation concerning
                                proposed amendment to the articles of       (i) shares authorized; (ii) amendment
                                incorporation would: (i) increase or        of bylaws; (iii) authority to call
                                decrease the aggregate number of            special stockholder meetings; and
                                authorized shares of such class; (ii)       (iv) amendment of the certificate of
                                effect an exchange, reclassification or     incorporation. If the Company's shareholders
                                cancellation of all or part of the          approve proposal 3C, then the affirmative vote
                                shares of such class, other than a          of the holders of at least 66.67% of
                                stock split; (iii) effect                   the Delaware company's shares will be
                                required to approve any charter             amendments described above.
                                an exchange, or create a right of           
                                exchange, of all or part of the shares
                                of another class into the shares of such
                                class; (iv) change the rights,
                                preferences, privileges or restrictions
                                of the shares of such class; (v) create
                                a new class of shares having rights,
                                preferences or privileges prior to the
                                shares of such class, or increase the
                                rights, preferences or privileges or the
                                number of authorized shares having
                                rights, preference or privileges prior
                                to the shares of such class; (vi) in the
                                case of preferred shares, divide the
                                shares of any class into series having
                                different rights, preferences,
                                privileges or restrictions or authorize
                                the board of directors to do so; or
                                (vii) cancel or otherwise affect
                                dividends on the shares of such class
                                which have accrued but have not been
                                paid.



                                       27




                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Amendment of Bylaws             Under California law, and according to      The Delaware company certificate of
                                the Company's bylaws, the bylaws of the     incorporation, as proposed, authorizes
                                Company may be adopted, amended or          the board of directors to adopt, amend
                                repealed either by the board of             or repeal the bylaws. Notwithstanding
                                directors or a majority of the              the foregoing, the holders of at least
                                outstanding shares entitled to vote.        66.67% of the shares of capital stock
                                                                            of the Delaware company issued and
                                                                            outstanding and entitled to vote may,
                                                                            by affirmative vote, adopt, amend, alter or
                                                                            repeal the bylaws of the Delaware company. 
                                                                            If the Company's shareholders approve 
                                                                            proposal 3D, then it will be more difficult
                                                                            for the Delaware company's stockholders to
                                                                            amend the Delaware company's bylaws than
                                                                            it is for the Company's shareholders
                                                                            to amend the Company's bylaws.

Dividends and Repurchases of    Under California law, no distributions      Under Delaware law, the board of
Shares                          to a corporation's shareholders may be      directors of a corporation may,
                                made unless: (i) the amount of the          subject to any restrictions contained
                                retained earnings of the corporation        in its certificate of incorporation,
                                immediately prior to the distribution       declare and pay dividends upon the
                                equals or exceeds the amount of the         shares of its capital stock either (i)
                                proposed distribution; (ii) immediately     out of its surplus; or (ii) if there
                                after the distribution, the sum of the      is not surplus, out of net profits for
                                assets of the corporation (excluding        the fiscal year in which the dividend
                                certain items) is at least equal to         is declared or the preceding fiscal
                                1 (1)/4 times its liabilities; and the      year, provided that if the capital of
                                current assets of the corporation is at     the corporation is less than the aggregate
                                least equal to its current liabilities,     amount of capital represented by the
                                or if the average of the earnings of the    issued and outstanding stock of all
                                corporation before taxes on income and      classes having a preference upon the
                                before interest expense for the two         distributions of the assets of the
                                preceding fiscal years was less than the    corporation, then the board of
                                average of the interest expense of the      directors may not declare and pay
                                corporation for those fiscal years, at      dividends out of net profits. Delaware
                                least equal to 1 (1)/4 times its current    law generally provides that a
                                liabilities. California law generally       corporation may redeem or purchase its
                                provides that a corporation may acquire     shares only if such redemption or
                                its own shares, with the payment for        repurchase would not impair the
                                such shares being subject to the same       capital of the corporation.
                                restrictions as dividend payments.



                                       28




                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Dissenters' Rights              Under California law, if the approval of    Under Delaware law, stockholders of a
                                the outstanding shares of the               corporation that is a constituent
                                corporation is required for a merger or     corporation in a merger generally have
                                reorganization, each shareholder            the right to demand and receive
                                entitled to vote on the transaction, and    payment of the fair value of their
                                who did not vote in favor of the merger     stock in lieu of receiving the merger
                                or reorganization, may require the          consideration. However, appraisal
                                corporation to purchase for cash at fair    rights are not available to holders of
                                market value the shares owned by such       shares: (i) listed on a national
                                shareholder. No appraisal rights are        securities exchange; (ii) designated
                                available for shares listed on any          as a national market system security
                                national securities exchange certified      on an interdealer quotation system
                                by the Commissioner of Corporations or      operated by the National Association
                                listed on the Nasdaq National Market,       of Securities Dealers, Inc.; or (iii)
                                unless there exists with respect to such    held of record by more than 2,000
                                shares any restriction on transfer          stockholders; unless holders of stock
                                imposed by the corporation or by any law    are required to accept in the merger
                                or regulation or if demands for payment     anything other than any combination
                                are filed with respect to 5% or more        of: (a) shares of stock or depositary 
                                of the outstanding shares of that class.    receipts of the surviving corporation 
                                                                            in the merger; (b) shares of stock or 
                                                                            depositary receipts of another corporation 
                                                                            that, at the effective date of the merger, 
                                                                            will be either: (1) listed on a national 
                                                                            securities exchange; (2) designated as a
                                                                            national market system security on an 
                                                                            interdealer quotation system operated by 
                                                                            the National Association of Securities 
                                                                            Dealers, Inc.; or (3) held of record by 
                                                                            more than 2,000 stockholders; (c) cash in 
                                                                            lieu of fractional shares of the stock or 
                                                                            depositary receipts received; or (d) any 
                                                                            combination thereof.

                                                                            In addition, appraisal rights are not available
                                                                            to the holders of shares of the surviving
                                                                            corporation in the merger, if the merger does not
                                                                            require the approval of the stockholders of that
                                                                            corporation.

                                                                            Section 2115 of the California General
                                                                            Corporation Law may impose California law
                                                                            regarding appraisal rights to the exclusion of
                                                                            Delaware law.



                                       29



                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Liability and Indemnity         The Company's articles of incorporation     Under Delaware law, a corporation may
                                eliminate the personal liability of the     indemnify any director, officer,
                                Company's directors to the fullest extent   employee or agent made or threatened to
                                permitted by California law. The Company's  be made a party to any threatened,
                                bylaws provide that Company shall           pending or completed proceeding if
                                indemnify its directors and officers to     the person acted in good faith and in a
                                the fullest extent permitted by             manner such person reasonably believed          
                                California law, and grants the power        to be in the best interests of the              
                                to indemnify its employees and agents.      corporation, and, with respect to any           
                                The Company's bylaws provide that           criminal action or proceeding, had no           
                                the Company shall pay any expenses          reasonable cause to believe that his or         
                                incurred in defending any indemnified       her conduct was unlawful. The Delaware          
                                action, in advance of final disposition     company's certificate of incorporation          
                                of such action or proceeding, upon          and bylaws contains provisions that             
                                receipt of an undertaking by or on          require the Delaware company to indemnify 
                                behalf of the  indemnified party to         directors, officers, employees and              
                                repay such amount if it shall ultimately    agents to the full extent permitted by          
                                be determined that the indemnified party    Delaware law. The  corporation  would be        
                                is not entitled to indemnification.         required to  indemnify  a  person  in           
                                                                            connection  with  a proceeding  initiated  by   
                                                                            such  person,  however, only  if the            
                                                                            proceeding  was authorized  by the board of     
                                                                            directors. The Delaware company's bylaws        
                                                                            also provide that the  corporation  shall       
                                                                            advance expenses incurred by its directors      
                                                                            or officers in defending  a civil or            
                                                                            criminal  action,  suit or proceeding           
                                                                            because  that person is a director or           
                                                                            officer, and may advance the expenses           
                                                                            incurred by any employee or agent of the        
                                                                            corporation.  Such payment, however, will be    
                                                                            made only upon receipt of an undertaking by     
                                                                            or on behalf of the indemnified party to repay  
                                                                            such amount if it shall ultimately be determined
                                                                            that the indemnified party is not entitled      
                                                                            to indemnification.                             

Indemnity Insurance             The Company's bylaws authorize the          The Delaware company's bylaws
                                purchase of indemnity insurance for the     authorize the purchase of indemnity
                                benefit of any person required or           insurance for the benefit of any
                                permitted to be indemnified pursuant to     person required or permitted to be
                                the Company's bylaws. The Company has       indemnified pursuant to the Delaware 
                                not, however, purchased any such            company's bylaws.
                                indemnity insurance to date.                



                                       30




                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Preemptive Rights               Under California law, a shareholder is      Under Delaware law, a stockholder is
                                not entitled to preemptive rights to        not entitled to preemptive rights to
                                subscribe for additional issuances of       subscribe for additional issuances of
                                stock, or any security convertible into     stock, or any security convertible
                                stock, unless the rights are                into stock, unless the rights are
                                specifically granted in the articles of     specifically granted in the
                                incorporation. The Company's articles of    certificate of incorporation. The
                                incorporation do not provide for any        Delaware company's certificate of
                                such preemptive rights.                     incorporation does not provide for any
                                                                            such preemptive rights.

Certain Business Combination    Under California law, except where the      Section 203 of the Delaware General
Restrictions                    fairness of the transaction has been        Corporation Law prohibits "business
                                approved by the California Commissioner     combinations," including mergers,
                                of Corporations and except in a             consolidations, sales and leases of
                                "short-form" merger (the merger of a        assets, issuances of securities and
                                parent corporation with a subsidiary in     similar transactions, by a corporation
                                which the parent owns at least 90% of the   or a subsidiary with an "interested stockholder"
                                outstanding shares of each class of the     who beneficially owns 15% or more of a
                                subsidiary's stock), if the surviving       corporation's voting stock, for three
                                corporation or its parent corporation       years after the person or entity
                                owns, directly or indirectly, shares of     becomes an interested stockholder,
                                the target corporation representing more    unless (i) prior to the time that the
                                than 50% of the voting power of the         stockholder became an interested
                                target corporation prior to the merger,     stockholder, the board of directors
                                the nonredeemable common stock of a         approved either the business
                                target corporation may be converted only    combination or the transaction that
                                into nonredeemable common stock of the      resulted the stockholder becoming an
                                surviving corporation or its parent         interested stockholder; (ii) after
                                corporation, unless all of the              completion of the transaction in which
                                shareholders of the class consent. The      the stockholder became an interested
                                effect of this provision is to prohibit     stockholder, the interested
                                a cash-out merger of minority               stockholder holds at least 85% of the
                                shareholders, except where the majority     voting stock of the corporation not
                                shareholders already own 90% or more of     including: (a) shares held by
                                the voting power of the target              directors who are also officers and
                                corporation and could, therefore, effect    (b) shares granted under certain
                                a short-form merger to accomplish such a    employee benefit plans; or (iii) after
                                cash-out of minority shareholders.          the stockholder becomes an interested
                                                                            stockholder, the business combination
                                California law also provides that,          is approved by the board of directors
                                except in certain circumstances, when a     and the holders of at least 66 (2)/3%
                                tender offer or a proposal for              of the outstanding voting stock,
                                reorganization or for a sale of assets      excluding shares held by the
                                is made by an interested party              interested stockholder.
                                (generally a controlling or managing
                                party of the target corporation), an        A Delaware corporation may elect in
                                affirmative opinion in writing as to the    its certificate of incorporation not
                                fairness of the consideration to be paid    to be governed by Section 203. The
                                to the shareholders must be delivered       Delaware company's certificate of
                                to shareholders. This fairness opinion      incorporation, however, does not contain 
                                requirement does not apply to a             such an opt-out provision.
                                corporation that does not have shares  
                                held of record by at least 100 persons 
                                or to a transaction that has been      
                                qualified under California state   
                                securities laws. Furthermore, if a     
                                tender of shares or vote is sought     
                                pursuant to an interested party's      
                                proposal and a later proposal is made  
                                by another party at least 10 days prio 
                                to the date of acceptance of the       
                                interested party's proposal, the   
                                shareholders must be informed of the   
                                later offer and be afforded a          
                                reasonable opportunity to withdraw any 
                                vote, consent or proxy, or to withdraw 
                                any tendered shares.                   



                                       31




                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Vote on Extraordinary           Under California law, the principal         Under Delaware law, unless otherwise
Corporate Transactions          terms of a merger or reorganization must    provided in the certificate of
                                be approved by a vote of the board of       incorporation, a sale or other
                                directors of each constituent               disposition of all or substantially
                                corporation in a merger or sale of          all of the corporation's assets, a
                                assets reorganization. California law       merger or a consolidation of the
                                also generally requires the affirmative     corporation with another corporation
                                vote of a majority of the outstanding       requires the affirmative vote of a
                                shares of each class entitled to vote       majority of the board of directors
                                thereon (two classes of common stock        (except in certain limited
                                differing only as to voting rights are      circumstances) and, with certain
                                considered to be a single class for         exceptions, the affirmative vote of a
                                these purposes), except that, unless        majority of the outstanding shares
                                required by its articles of                 entitled to vote on the matter. The
                                incorporation, no authorizing               Delaware company's certificate of
                                shareholder vote is required of a           incorporation does not contain voting
                                corporation surviving a merger if the       requirements for extraordinary
                                shareholders of such corporation shall      corporate transactions in addition to
                                own, immediately after the merger, more     or different from the approvals
                                than 5/6 of the voting power of the         mandated by law.
                                surviving corporation. Regardless of the
                                voting power exercised by the               Furthermore, under Delaware law,
                                shareholders in the resulting               unless otherwise provided in the
                                corporation, however, California law        corporation's certificate of
                                requires the affirmative vote of a          incorporation, approval of the
                                majority of the outstanding shares          stockholders of a surviving
                                entitled to vote thereon if (i) the         corporation in a merger is not
                                surviving corporation's articles of         required if: (i) the plan of merger
                                incorporation will be amended and           does not amend in any respect the
                                would otherwise require shareholder         certificate of incorporation of the surviving
                                approval; or (ii) shareholders of such      corporation; (ii) the shares outstanding
                                corporation will receive shares of the      immediately before the effectiveness of the
                                surviving corporation having different      merger are not changed by the merger; and
                                rights, preferences, privileges or          (iii) either no shares of common stock
                                restrictions (shares in a foreign           of the surviving corporation and no
                                corporation are, by definition,             shares, securities or obligations
                                considered to have different rights)        convertible into this stock are to be
                                than the shares surrendered. The            issued or delivered under the plan of
                                Company's articles of incorporation do      merger, or the authorized unissued
                                not modify these statutory requirements.    shares or the treasury shares of
                                                                            common stock of the surviving
                                                                            corporation to be issued or delivered
                                                                            under the plan of merger, plus those
                                                                            initially issuable upon conversion of any other
                                                                            shares, securities or obligations to be issued or
                                                                            delivered under the plan do not exceed 20% of the
                                                                            shares of common stock of the surviving
                                                                            corporation outstanding immediately prior to the
                                                                            merger. The Delaware company's certificate of
                                                                            incorporation does not provide otherwise.



                                       32



                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Fiduciary Duties of Directors   Under California law, the duty of           Under Delaware law, the duty of
                                loyalty requires directors to perform       loyalty may be summarized as the duty
                                their duties in good faith in a manner      to act in good faith, not out of
                                that the director reasonably believes to    self-interest and in a manner that the
                                be in the best interests of the             director reasonably believes to be in
                                corporation and its shareholders. The       the best interests of the corporation.
                                duty of care requires that the directors    The duty of care requires that the
                                act with such care, including reasonable    directors act in an informed and
                                inquiry, as an ordinarily prudent person    deliberative manner and to inform
                                in a like position would use under          themselves, prior to making a business
                                similar circumstances.                      decision, of all material information
                                                                            reasonably available to them.

Interested Party Transactions   Under California law, no contract or        Under Delaware law, no contract or
                                transaction that is between a               transaction that is between a
                                corporation and one or more of its          corporation and one or more of its
                                directors, or between a corporation and     directors or officers, between a
                                another firm in which one or more of the    corporation and another corporation in
                                corporation's directors has a material      which one or more of the corporation's
                                financial interest is void or voidable      directors or officers are directors or
                                solely because such director or other       officers, or between a corporation and
                                corporation or firm is a party or           another corporation in which one or
                                because the director is present at or       more of the corporation's directors or
                                participates in the meeting of the board    officers has a financial interest is
                                of directors or committee that              void or voidable solely because of
                                authorizes the contract or transaction,     such relationship or interest, or
                                if one or more of the following is true:    solely because the director or officer
                                (i) the material facts of the               is present at or participates in the
                                transaction and the director's interest     meeting of the board of directors or
                                are fully disclosed to or known by the      committee that authorizes the contract
                                board of directors or a committee of the    or transaction, or solely because the
                                board of directors, and the board of        director's or officer's vote was
                                directors or the committee authorizes or    counted for this purpose, if one or
                                ratifies the transaction in good faith      more of the following is true: (i) the
                                by a vote sufficient without counting       material facts of the contract or
                                the vote of any interested director, and    transaction and the director's or
                                such contract or transaction is just and    officer's relationship or interest are
                                reasonable as to the corporation at the     disclosed to or known by the board of
                                time the board of directors approves or     directors or a committee of the board
                                ratifies it; (ii) the material facts of     of directors, and the board of
                                the transaction and the director's          directors or the committee in good
                                interest are fully disclosed to or known    faith authorizes the contract or
                                by the uninterested shareholders            transaction by an affirmative vote of
                                entitled to vote on the matter and they     the majority of the disinterested
                                specifically approve in good faith the      directors (even though these directors
                                contract or transaction; or (iii) the       are less than a quorum); (ii) the
                                contract or transaction is just and         material facts of the contract or
                                reasonable to the corporation at the        transaction and the director's or
                                time it was approved or ratified.           officer's relationship or interest are
                                                                            disclosed to or known by the 
                                                                            shareholders entitled to vote on the
                                                                            matter and they specifically approve
                                                                            in good faith the contract or
                                                                            transaction; or (iii) the contract or
                                                                            transaction is fair to the corporation
                                                                            as of the time it was authorized,
                                                                            approved or ratified.



                                       33




                                             Nanometrics                              Nanometrics
                                        (California Corporation)                 (Delaware Corporation)
                                --------------------------------------      ---------------------------------------
                                                                      
Shareholder Suits               Under California law, a shareholder         Under Delaware law, a stockholder may
                                bringing a derivative action on behalf      initiate a derivative action to
                                of the corporation need not have been a     enforce a right of a corporation if
                                shareholder at the time of the              the corporation wrongfully fails to
                                transaction in question, provided that      enforce the right itself. An
                                certain tests are met concerning the        individual may also commence a class
                                fairness of allowing the action to go       action suit on behalf of himself and
                                forward. The shareholder must make his      other similarly situated stockholders
                                or her demands on the board of directors    to enforce an obligation owed to the
                                before filing suit.                         stockholders directly where the requirements
                                                                            for maintaining a class action under              
                                California law also provides that the       Delaware law have been met. The                   
                                corporation or the defendant in a           complaint must: (i) state that the                
                                derivative suit may make a motion to the    plaintiff was a stockholder at the                
                                court for an order requiring the            time of the transaction of which the              
                                plaintiff shareholder to furnish a          plaintiff complains or that the plaintiff's       
                                security bond.                              shares thereafter devolved on the plaintiff by    
                                                                            operation of law; and (ii) with respect to a      
                                                                            derivative action: (a) allege with particularity  
                                                                            the efforts made by the plaintiff to obtain the   
                                                                            action the plaintiff desires from the directors;  
                                                                            or (b) allege with particularity that such effort 
                                                                            would have been futile.                           
                                                                            

                                                                            Additionally, the plaintiff must remain a
                                                                            stockholder through the duration of the suit. The
                                                                            action will not be dismissed or compromised
                                                                            without the approval of the Delaware Court of
                                                                            Chancery.

Inspection of Books and         Under California law, shareholders          Under Delaware law, any stockholder is
Records                         holding an aggregate of 5% or more of       entitled to inspect and copy books and
                                the corporation's voting shares, or         records, including the corporation's 
                                shareholders holding an aggregate of 1%     stock ledger and a list of its 
                                or more of such shares who have             stockholders, as long as the 
                                contested the election of directors and     inspection is for a proper purpose and 
                                who have filed a Schedule 14A with the      during the usual hours of business.
                                Securities and Exchange Commission, 
                                an absolute right to inspect and copy       Section 1601 of the California General
                                the corporation's shareholder list.         Corporation Law applies to any
                                                                            corporation with its principal
                                In addition, Section 1601 of the            executive offices in the State of
                                California General Corporation Law          California, even if that corporation
                                provides that any shareholder may           is incorporated in another
                                inspect the accounting books and records    jurisdiction. The principal executive
                                and minutes of a corporation, provided      offices of the Delaware company will
                                that the inspection is for a purpose        be in California even though the
                                reasonably related to the person's          Delaware will be incorporated in
                                interests as a shareholder.                 Delaware. Accordingly, the Delaware
                                                                            company stockholders will have the right to
                                                                            inspect the books and records of the Delaware
                                                                            company pursuant to Section 1601 of the
                                                                            California General Law.



                                       34


                                   PROPOSAL 4
                                 APPROVAL OF THE
                           2005 EQUITY INCENTIVE PLAN

     We are asking  stockholders  to approve the Company's  adoption of the 2005
Equity  Incentive  Plan  (the  "2005  Plan") so that we can use the 2005 Plan to
achieve the Company's  goals and also receive a federal income tax deduction for
certain  compensation  paid under the 2005 Plan.  The board of directors and the
Company's  compensation  committee  have  approved  the 2005  Plan,  subject  to
stockholder  approval at the annual meeting.  Our named  executive  officers and
directors have an interest in this proposal by virtue of their being eligible to
receive  equity  awards  under the 2005 Plan.  The full text of the 2005 Plan is
attached hereto as Appendix C.

     A total of 1,200,000  shares of common stock have  initially  been reserved
for  issuance  under the 2005 Plan,  plus an annual  increase to be added on the
first day of the  Company's  fiscal year for three years  (beginning in 2006 and
ending after the 2008  increase),  equal to the least of (i) 3% of the Company's
outstanding common stock on that date or (ii) an amount determined  by the board
of directors.

     We strongly  believe that the approval of the 2005 Plan is essential to our
continued  success.  The board of directors and  management  believe that equity
awards motivate high levels of performance, align the interests of employees and
stockholders  by giving  employees  the  perspective  of an owner with an equity
stake in the Company,  and provide an effective  means of  recognizing  employee
contributions  to the  success  of the  Company.  The  board  of  directors  and
management  believe  that  equity  awards are of great value in  recruiting  and
retaining  personnel  who help the Company meet its goals,  as well as rewarding
and encouraging current employees. The board of directors and management believe
that the ability to grant equity awards will be important to the future  success
of the Company.

     The  Company's  2000 Stock  Option Plan had only 518,803  shares  remaining
available for issuance as of January 1, 2005. As a result,  if the  stockholders
do not approve this proposal, the Company will be limited in its ability to make
discretionary option or other equity award grants under an equity incentive plan
to assist in recruiting and retaining personnel.

     Summary of the Plan

     The following paragraphs provide a summary of the principal features of the
2005 Plan and its operation. The Plan is set forth in its entirety as Appendix C
to this proxy statement.  The following  summary is qualified in its entirety by
reference to the 2005 Plan.

     Background and Purpose of the 2005 Plan

     The 2005  Plan  permits  the  grant of stock  options,  stock  appreciation
rights,  restricted stock,  restricted stock units and performance  shares (each
individually,  an "Award").  The 2005 Plan is intended to attract and retain the
best available personnel for positions of substantial responsibility,  including
(1) employees of the Company and any parent or subsidiary,  (2)  consultants who
provide services to the Company and any parent or subsidiary,  and (3) directors
of the Company.  The 2005 Plan also is designed to provide additional  incentive
to these services  providers,  to promote the success of the Company's  business
and to permit the payment of  compensation  that qualifies as  performance-based
compensation  under  Section  162(m) of the Internal  Revenue  Code of 1986,  as
amended ("Section 162(m)").

     Administration of the 2005 Plan

     A committee (the "Committee") of the board of directors will administer the
2005  Plan.  The  Committee  generally  will  be the  compensation/stock  option
committee,  which  will  consist  of  two  or  more  directors  who  qualify  as
"non-employee  directors"  under Rule 16b-3 of the  Securities  Exchange  Act of
1934,  and as "outside  directors"  under Section 162(m) (so that the Company is
entitled to a federal tax deduction for certain compensation paid under the 2005
Plan).  Notwithstanding the foregoing,  the Board may itself administer the 2005
Plan or appoint one or more  committees to administer the 2005 Plan with respect
to different groups of service providers.  The Board, the compensation committee
or other  committee  administering  the 2005 Plan is  referred  to herein as the
"Administrator."

     Subject  to the  terms of the 2005  Plan,  the  Administrator  has the sole
discretion to select the employees,  consultants, and directors who will receive
Awards,  determine the terms and conditions of Awards (for example, the


                                       35



exercise price and vesting  schedule),  and interpret the provisions of the 2005
Plan and outstanding Awards. The Administrator may not, however,  reprice Awards
or exchange Awards for other Awards, cash or a combination thereof,  without the
approval of the stockholders.

     If  an  Award  is  settled  is  cancelled,  expires,  or  is  forfeited  or
repurchased by the Company for any reason without having been fully exercised or
vested,  the unvested,  cancelled,  forfeited or repurchased number of shares of
Company common stock ("Shares") generally will be returned to the available pool
of Shares  reserved  for  issuance  under the 2005 Plan.  Any Shares  subject to
options or stock  appreciation  rights  generally  will be counted  against  the
available  pool as one Share  for every  Share  subject  to the  option or stock
appreciation  rights.  Any  Shares  of  restricted  stock or Shares  subject  to
performance  shares or restricted  stock units with a per share or unit purchase
price lower than 100% of Fair Market Value on the date of grant  generally  will
be counted  against the available pool as two Shares for every one Share subject
thereto.  Shares  actually  issued  under the 2005 Plan or  withheld  to pay the
exercise  price of an Award  or to  satisfy  tax  withholding  obligations  with
respect  to an Award  will  not be  returned  to the  2005  Plan and will not be
available for future issuance under the plan.  Also, if the Company  experiences
any dividend or other distribution  (whether in the form of cash, Shares,  other
securities,  or other property),  recapitalization,  stock split,  reverse stock
split, reorganization,  merger, consolidation,  split-up, spin-off, combination,
repurchase,  or exchange of Shares or other securities of the Company,  or other
change in the  corporate  structure  of the  Company  affecting  the  Shares,  a
proportional  adjustment  will be made to the  number  of Shares  available  for
issuance  under  the 2005  Plan,  the  number  and price of  Shares  subject  to
outstanding  Awards and the  per-person  limits on  Awards,  as  appropriate  to
reflect the stock dividend or other change,  should the Administrator  determine
that  such an  adjustment  is  appropriate  in  order  to  prevent  dilution  or
enlargement of the benefits or potential  benefits intended to be made available
under the 2005 Plan.

     Eligibility to Receive Awards

     The  Administrator  selects the employees,  consultants,  and directors who
will be granted Awards under the 2005 Plan. The actual number of individuals who
will receive  Awards cannot be determined in advance  because the  Administrator
has the discretion to select the participants.

     Stock Options

     A stock option is the right to acquire Shares at a fixed exercise price for
a fixed  period  of time.  Under  the 2005  Plan,  the  Administrator  may grant
nonstatutory  stock  options  and/or  incentive  stock  options  (which  entitle
employees,  but  not  the  Company,  to  more  favorable  tax  treatment).   The
Administrator  will determine the number of Shares  covered by each option,  but
during any fiscal year of the Company, no participant may be granted options and
stock appreciation rights together covering more than 500,000 Shares.

     The  exercise  price of the  Shares  subject  to each  option is set by the
Administrator but cannot be less than 100% of the fair market value (on the date
of grant) of the Shares covered by the option.  In addition,  the exercise price
of an  incentive  stock option must be at least 110% of fair market value if (on
the grant date) the participant owns stock possessing more than 10% of the total
combined  voting  power of all  classes  of stock of the  Company  or any of its
subsidiaries.  The aggregate fair market value of the Shares  (determined on the
grant date) covered by incentive stock options which first become exercisable by
any participant during any calendar year also may not exceed $100,000.

     Options  issued under the 2005 Plan become  exercisable at the times and on
the terms established by the  Administrator.  The Administrator also establishes
the time at which  options  expire,  but the  expiration  of an incentive  stock
option  may not be later  than ten years  after the grant  date (such term to be
limited  to 5 years  in the  case of an  incentive  stock  option  granted  to a
participant who owns stock possessing more than 10% of the total combined voting
power of all classes of stock of the Company or any of parent or  subsidiary  of
the Company).

     The  exercise  price  of each  option  must be paid in full at the  time of
exercise.  The  exercise  price  may be paid in any  form as  determined  by the
Administrator,  including,  but not limited to, cash, check, surrender of Shares
that have a fair market  value on the date of surrender  equal to the  aggregate
exercise  price  of the  shares  as to  which  the  option  is  being  exercise,
consideration received pursuant to a cashless exercise program, promissory note,
through a reduction in the amount of Company  liability to the  participant,  or
other legal methods of consideration.


                                       36


     If a participant's  service  relationship with us terminates for any reason
(excluding  death or  disability),  then the participant may exercise the option
within a period of time as determined by the  Administrator and specified in the
Award  agreement  to the  extent  that  the  Award  is  vested  on the  date  of
termination  (but in no  event  later  than the  expiration  of the term of such
Award). In the absence of a specified time set forth in the Award agreement, the
option will remain exercisable for three months following the termination of the
participant's  service  relationship.  If a participant's  service  relationship
terminates due to the participant's disability or death, the participant (or his
or her estate or beneficiary) may exercise the option within a period of time as
determined  by the  Administrator  and  specified in the Award  agreement to the
extent  the  Award  was  vested  on the  date  of  termination  of  the  service
relationship  (but in no event  later  than the  expiration  of the term of such
Award).  In the absence of a specified time in the Award  agreement,  the option
will remain  exercisable for the twelve months  following the termination of the
participant's service due to disability or death.

     Stock Appreciation Rights

     Stock  appreciation  rights are Awards that grant the participant the right
to receive an amount equal to (1) the number of Shares exercised,  times (2) the
amount by which the  Company's  stock price  exceeds  the  exercise  price.  The
Administrator  set the exercise price. An individual will be able to profit from
a stock  appreciation right only if the fair market value of the stock increases
above the exercise price. The Company's  obligation arising upon the exercise of
a stock  appreciation right may be paid in Shares or in cash, or any combination
thereof, as the Administrator may determine.

     Awards of stock  appreciation  rights may be granted in connection with all
or any  part  of an  option  or may be  granted  independently  of  options.  No
participant  may be  granted  stock  appreciation  rights and  options  together
covering more than 500,000 shares in any fiscal year of the Company.

     The  Administrator  determines the terms of stock  appreciation  rights.  A
stock appreciation right will be exercisable,  in whole or in part, at such time
as the  Administrator  will specify in the Award  agreement,  but will expire no
later than ten (10) years after the date of grant.

     If a participant's  service  relationship with us terminates for any reason
(excluding  death or  disability),  then the  participant may exercise the stock
appreciation  right within a period of time as determined  by the  Administrator
and  specified in the Award  agreement to the extent that the Award is vested on
the date of  termination  (but in no event later than the expiration of the term
of such  Award).  In the  absence  of a  specified  time set  forth in the Award
agreement, the stock appreciation right will remain exercisable for three months
following  the  termination  of the  participant's  service  relationship.  If a
participant's   service   relationship   terminates  due  to  the  participant's
disability or death,  the participant (or his or her estate or beneficiary)  may
exercise the stock  appreciation  right within a period of time as determined by
the  Administrator  and specified in the Award agreement to the extent the Award
was vested on the date of  termination  of the service  relationship  (but in no
event later than the expiration of the term of such Award).  In the absence of a
specified time in the Award agreement,  the stock appreciation right will remain
exercisable for the twelve months following the termination of the participant's
service due to disability or death.

     Restricted Stock

     Awards of  restricted  stock are Shares  that vest in  accordance  with the
terms and conditions established by the Administrator. The Administrator may set
vesting  criteria  based upon the  achievement  of  Company-wide,  departmental,
business unit or individual  goals,  which may include  continued  employment or
service, applicable federal or state securities or any other basis determined by
the  Committee.   If  the  Administrator  desires  that  the  Award  qualify  as
performance-based  compensation  under Section 162(m),  any restrictions will be
based on a specified list of performance  goals (see  "Performance  Goals" below
for more information).  The Administrator will determine the number of Shares of
restricted stock granted to any employee, consultant or director, but during any
fiscal year of the  Company,  no  participant  may be granted  more than 250,000
Shares in the aggregate of restricted  stock,  performance  shares or restricted
stock units.


                                       37


     Unless the Administrator  determines otherwise,  Shares of restricted stock
will be held by the Company as escrow agent until any restrictions on the Shares
have lapsed.  The Administrator may accelerate the time at which any restriction
may lapse or be removed.

     On the date set forth in the Award agreement, all unvested restricted stock
will be forfeited to the Company.

     Restricted Stock Units

     Awards of restricted  stock units are Shares that vest in  accordance  with
terms  and  conditions  established  by  the  Administrator.  The  Administrator
determines  the  number of  restricted  stock  units  granted  to any  employee,
consultant  or  director,  but  during  any  fiscal  year  of  the  Company,  no
participant may be granted  more than 250,000 Shares in the aggregate subject to
restricted stock units, performance shares or restricted stock.

     In determining  whether an Award of restricted  stock units should be made,
and/or the vesting  schedule for any such Award,  the  Administrator  may impose
whatever  conditions to vesting it determines to be  appropriate.  The number of
restricted  stock units paid out to the participant will depending on the extent
to which  the  vesting  criteria  are met.  The  Administrator  may set  vesting
criteria based upon the achievement of Company-wide, departmental, business unit
or  individual  goals,  which  may  include  continued  employment  or  service,
applicable  federal or state  securities  or any other basis  determined  by the
Committee.  Notwithstanding the foregoing, if the Administrator desires that the
Award  qualify as  performance-based  compensation  under  Section  162(m),  any
restrictions  will be  based  on a  specified  list of  performance  goals  (see
"Performance Goals" below for more information).

     Upon satisfying the applicable  vesting criteria,  the participant shall be
entitled to the payout  specified in the Award  agreement.  Notwithstanding  the
foregoing,  at  any  time  after  the  grant  of  restricted  stock  units,  the
Administrator  may  reduce or waive  any  vesting  criteria  that must be met to
receive a payout.  The  Administrator,  in its sole  discretion,  may pay earned
restricted  stock  units in  cash,  Shares,  or a  combination  thereof.  Shares
represented by restricted  stock units that are fully paid in cash will again be
available  for  grant  under  the  Plan.  On the  date set  forth  in the  Award
agreement, all unearned restricted stock units will be forfeited to the Company.

     Performance Shares

     Performance  shares  are  Awards  that  will  result  in  a  payment  to  a
participant only if performance  objectives established by the Administrator are
achieved  or the  Awards  otherwise  vest.  The  Administrator  may set  vesting
criteria based upon the achievement of Company-wide, departmental, business unit
or  individual  goals,  which  may  include  continued  employment  or  service,
applicable  federal or state  securities  or any other basis  determined  by the
Committee.  Notwithstanding the foregoing, if the Administrator desires that the
Award  qualify as  performance-based  compensation  under  Section  162(m),  any
restrictions  will be  based  on a  specified  list of  performance  goals  (see
"Performance Goals" below for more information).

     Performance  shares have an initial value equal to the fair market value of
a share on the date of grant.  Performance  shares may be granted to  employees,
consultants or directors at any time as shall be determined by the Administrator
in its sole discretion. Subject to the terms of the 2005 Plan, the Administrator
will have complete  discretion  to determine  the number of shares  subject to a
performance  share  award  and the  conditions  that  must be  satisfied,  which
typically  will be based  principally  or solely on  achievement  of performance
milestones but may include a service based component,  upon which is conditioned
on the grant or vesting of performance shares. Subject to the terms of the Plan,
the Administrator  will determined the number of performance shares granted to a
service provider,  during any fiscal year of the Company,  no participant may be
granted more than 250,000 Shares in the aggregate subject to performance shares,
restricted stock units, or restricted stock.

     On the date set forth in the Award  agreement,  all  unearned  or  unvested
performance shares will be forfeited to the Company


                                       38


     Performance Goals

     Under Section 162(m) of the Code, the annual compensation paid to our Chief
Executive  Officer  and to  each  of our  other  four  most  highly  compensated
executive  officers may not be  deductible  to the extent it exceeds $1 million.
However,  we are able to preserve the deductibility of compensation in excess of
$1 million if the conditions of Section 162(m) are met. These conditions include
stockholder  approval of the 2005 Plan,  setting  limits on the number of awards
that any individual may receive and for awards other than options,  establishing
performance  criteria that must be met before the award actually will vest or be
paid.

     We have  designed the Plan so that it permits us to pay  compensation  that
qualifies as performance-based under Section 162(m). Thus, the Administrator (in
its  discretion) may make  performance  goals  applicable to a participant  with
respect  to an  award.  At the  Administrator's  discretion,  one or more of the
following  performance  goals may apply (all of which are  defined in the Plan):
annual  revenue,  cash  position,  earnings  per share,  net income,  individual
performance  objectives,  marketing and sales expenses as a percentage of sales,
net income as a percentage of sales, net income,  operating cash flow, operating
income,  return  on  assets,  return  on  equity,  return  on  sales,  and total
stockholder  return.  The  Performance  Goals may  differ  from  Participant  to
Participant and from Award to Award.

     Any criteria used may be measured, as applicable (1) in absolute terms, (2)
in relative terms (including, but not limited to, passage of time and/or against
another  company or  companies),  (3) on a  per-share  basis,  (4)  against  the
performance of the Company as a whole or a business unit of the Company,  and/or
(5) on a pre-tax or  after-tax  basis.  The  Administrator  also will adjust any
evaluation  of  performance   under  a  performance  goal  to  exclude  (i)  any
extraordinary  non-recurring  items,  or  (ii)  the  effect  of any  changes  in
accounting  principles  affecting  the Company's or a business  units'  reported
results.

     Merger or Change in Control

     In the event of a merger "change in control" of the Company,  the successor
corporation   will  either  assume  or  provide  a  substitute  award  for  each
outstanding Award. In the event the successor  corporation  refuses to assume or
provide  a  substitute  award,  the  Award  will  immediately  vest  and  become
exercisable  as to all of the Shares  subject to such Award,  or, if applicable,
the Award will be deemed  fully  earned and will be paid out prior to the merger
or change in control.  In addition,  if an option,  stock  appreciation right or
right to purchase  restricted  stock has become fully vested and  exercisable in
lieu of assumption or substitution, the Committee will provide at least 15 days'
notice that the option, stock appreciation right or right to purchase restricted
stock  will  immediately  vest and  become  exercisable  as to all of the Shares
subject to such Award and all outstanding options, stock appreciation rights and
rights to purchase  restricted  stock will terminate upon the expiration of such
notice period.

     Awards to be Granted to Certain Individuals and Groups

     The number of Awards (if any) that an employee, consultant, or director may
receive  under  the 2005  Plan is in the  discretion  of the  Administrator  and
therefore cannot be determined in advance.  Our executive officers and directors
have an interest in this  proposal  because they are eligible to receive  Awards
under the 2005 Plan. To date,  stock  options have been granted  under  existing
Company equity plans.  The following  table sets forth for each of the Company's
executive  officers  and  directors  (a) the total  number of Shares  subject to
options  granted  during  the last  fiscal  year and (b) the  average  per Share
exercise price of such options.  Quentin Wright and Michael Weber are not listed
on the table below because they did not join the Company in their  capacities as
executive officers until after January 1, 2005.

                                            Number of          Average Per Share
         Name of Individual or Group     Options Granted        Exercise Price
         --------------------------      ---------------        ---------------
         Vincent J. Coates                          --               $
         John D. Heaton                        100,000               $12.02
         Edmond R. Ward                             --               $
         William G. Oldham                          --               $
         Paul B. Nolan                              --               $
         Roger Ingalls, Jr.                      5,000               $10.37
         Stephen J Smith, Jr.                   10,000               $16.71
         J. Thomas Bentley                      10,000               $16.71
         Norman V. Coates                       10,000               $11.39
         All executive officers,               105,000               $11.94
         as a group (4 persons)
         All directors who are not              30,000               $14.94
         executive officers, as a
         group (5 persons)
         All employees who are not             308,550               $12.64
         executive officers, as a group


                                       39


     Limited Transferability of Awards

     Awards granted under the 2005 Plan generally may not be sold,  transferred,
pledged, assigned, or otherwise alienated or hypothecated, other than by will or
by the applicable laws of descent and  distribution  and may be exercised during
the lifetime of the participant,  only by the participant.  Notwithstanding  the
foregoing,  the Administrator may permit an individual to transfer an Award. Any
transfer  shall  be  made  in  accordance  with  procedures  established  by the
Administrator.

Federal Tax Aspects

     The following  paragraphs  are a summary of the general  federal income tax
consequences to U.S.  taxpayers and the Company of Awards granted under the 2005
Plan. Tax consequences for any particular individual may be different.

     Nonstatutory stock options

     No taxable income is recognized when a nonqualified stock option is granted
to a participant.  Upon exercise, the participant will recognize ordinary income
in an amount  equal to the excess of the fair market  value of the Shares on the
exercise date over the exercise  price.  Any additional  gain or loss recognized
upon later disposition of the Shares is capital gain or loss.

     Incentive Stock Options

     No taxable income is recognized  when an incentive  stock option is granted
or exercised (except for purposes of the alternative  minimum tax, in which case
taxation is the same as for  nonstatutory  stock  options).  If the  participant
exercises  the option and then later sells or  otherwise  disposes of the Shares
more than two  years  after  the  grant  date and more  than one year  after the
exercise date, the difference between the sale price and the exercise price will
be taxed as capital gain or loss.  If the  participant  exercises the option and
then later sells or otherwise  disposes of the Shares before the end of the two-
or one-year  holding  periods  described  above,  he or she generally  will have
ordinary  income at the time of the sale equal to the fair  market  value of the
Shares on the  exercise  date (or the sale price,  if less)  minus the  exercise
price of the option. Any additional gain or loss will be capital gain or loss.

     Stock Appreciation Rights

     No taxable income is reportable when a stock  appreciation right is granted
to a  participant.  Upon  exercise,  the  participant  generally  will recognize
ordinary  income in an amount equal to the amount of cash  received and the fair
market value of any Shares received. Any additional gain or loss recognized upon
any later disposition of the Shares would be capital gain or loss.

     Restricted Stock, Restricted Stock Units and Performance Shares

     A  participant  will not have  taxable  income upon grant  unless he or she
elects to be taxed at that time.  Instead,  he or she generally  will  recognize
ordinary  income at the time of vesting  equal to the fair market  value (on the
vesting  date) of the  Shares or cash  received  minus any  amount  paid for the
Shares.

     Tax Effect for the Company

     The Company  generally  will be entitled to a tax  deduction in  connection
with an Award  under  the 2005 Plan in an amount  equal to the  ordinary  income
realized by a participant and at the time the participant recognizes such income
(for example,  the exercise of a nonqualified stock option). As discussed above,
special  rules  limit  the  deductibility  of  compensation  paid  to our  Chief
Executive  Officer  and to each of our four most  highly  compensated  executive
officers.


                                       40


However,  the 2005 Plan has been designed to permit the  Administrator  to grant
Awards that qualify as  performance-based  compensation  under  Section  162(m),
thereby  permitting  the Company to receive a federal  income tax  deduction  in
connection with such Awards.

Amendment and Termination of the Plan

     The Board generally may amend, alter, suspend or terminate the 2005 Plan at
any time and for any  reason.  However,  no  amendment,  alter,  suspension,  or
termination  may impair the rights of any  participant  in the 2005 Plan without
his or her consent.  Amendments  will be contingent on  stockholder  approval if
required by applicable law.  Unless  terminated  earlier by the Board,  the 2005
Plan will  continue  in effect  until ten (10) years  following  the date of the
Board of Director's adoption of the 2005 Plan.

Summary

     We believe  strongly that the approval of the 2005 Plan is essential to our
continued success.  Awards such as those provided under the 2005 Plan constitute
an important incentive and help us to attract and retain people whose skills and
performance  are critical to our success.  Our  employees  and directors are our
most  important  asset.  The  Company's  2000 Stock Option Plan has only 518,803
shares remaining available for issuance. As a result, if the stockholders do not
approve the 2005 Plan,  the Company  will be severely  limited in its ability to
make any  discretionary  option or other  equity  award  grants  under an equity
incentive  plan to assist in recruiting  and retaining  personnel.  The board of
directors  believes  that the 2005 Plan is vital to our  ability to attract  and
retain  outstanding  and highly skilled  individuals to work for the Company and
serve on our board of directors.

     THE BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS THAT THE SHAREHOLDERS  VOTE
"FOR" PROPOSAL 4.



                                       41


                                   PROPOSAL 5
                         RATIFICATION OF APPOINTMENT OF
                  INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

     The audit  committee of the board of directors  has  appointed BDO Seidman,
LLP,  independent  registered  public accounting firm, to audit the consolidated
financial  statements  of the Company for the fiscal  year ending  December  31,
2005.

     Deloitte & Touche LLP previously audited the Company's financial statements
from fiscal  1991  through  the fiscal  year ended  January 3, 2004.  Deloitte &
Touche LLP  resigned  effective  as of August 23,  2004.  BDO  Seidman,  LLP was
selected by the audit committee to serve as the Company's independent registered
public accounting firm effective as of September 3, 2004.

     The reports of Deloitte & Touche LLP on the Company's financial  statements
for the fiscal years ended  December 28, 2002 and January 3, 2004 do not contain
an adverse opinion or a disclaimer of opinion, and are not qualified or modified
as to  uncertainty,  audit  scope or  accounting  principles,  except  that such
reports  include  an  explanatory  paragraph  relating  to a change in method of
accounting for goodwill and other intangible assets.

     During the fiscal years ended  December  28, 2002 and January 3, 2004,  and
through  August 23, 2004,  there were no  disagreements  between the Company and
Deloitte & Touche  LLP on any  matter of  accounting  principles  or  practices,
financial   statements   disclosure,   or  auditing  scope  or  procedure  which
disagreements,  if not  resolved to the  satisfaction  of Deloitte & Touche LLP,
would have caused Deloitte & Touche LLP to make reference  thereto in the firm's
reports on the Company's financial statements for such periods. In addition,  no
reportable  events, as defined in Item 304 (a)(1)(v) of Regulation S-K, occurred
during the Company's two most recent fiscal years.

     Representatives  of BDO  Seidman,  LLP are  expected  to be  present at the
Company's annual meeting with the opportunity to make a statement if they desire
to do so, and are also  expected  to be  available  to  respond  to  appropriate
questions.

     Audit Fees

     The following table  summarizes the aggregate fees that the Company expects
to pay BDO  Seidman,  LLP for  fiscal  2004 and fees  billed to the  Company  by
Deloitte & Touche LLP for fiscal 2003 and 2002.


Type of fees                Fiscal 2004(5)     Fiscal 2003   Fiscal 2002
----------                  --------------     -----------   -----------
Audit Fees(1)                $     221,335     $   263,680   $   264,239
Audit-Related Fees(2)                4,400              --            --
Tax Fees(3)                             --         127,690       222,255
All Other Fees(4)                       --           7,500            --
                            --------------     -----------   -----------
Total Fees                   $     225,735     $   398,870   $   486,494
                            ==============     ===========   ===========
------------------------------

(1)  Fees for audit services consist of:

     o    Audit of the Company's annual financial statements

     o    Reviews of the Company's quarterly financial statements

     o    Statutory and regulatory  audits,  consents and other services related
          to Securities and Exchange Commission filings

(2)  Fees  for  audit-related  services  billed  in  fiscal  2004  consisted  of
     consultations on Securities and Exchange Commission comment letters

(3)  Fees for tax services  billed in fiscal 2003  consisted  of tax  compliance
     assistance,  transfer pricing  documentation and assistance with tax return
     filings in certain foreign jurisdictions

(4)  All other fees consisted of training on the  requirements of Section 404 of
     the Sarbanes-Oxley Act of 2002

(5)  In fiscal 2004, Deloitte & Touche LLP billed the Company $74,036,  $57,330,
     $13,913  and  $0  for  audit,  audit-related,   tax  and  all  other  fees,
     respectively.


                                       42


     In  considering  the nature of the  services  provided  by the  independent
registered public accountants, the audit committee determined that such services
are  compatible  with the provision of  independent  audit  services.  The audit
committee  discussed  these  services  with the  independent  registered  public
accountants  and the Company's  management to determine  that they are permitted
under the rules and regulations concerning auditors' independence promulgated by
the Securities and Exchange  Commission to implement the  Sarbanes-Oxley  Act of
2002, as well as the American Institute of Certified Public Accountants.

Audit Committee Pre-Approval Policy

     Pursuant  to  the  audit  committee  charter,   the  audit  committee  must
pre-approve all audit and non-audit services,  and the related fees, provided to
the Company by its  independent  auditors,  or  subsequently  approve  non-audit
services in those  circumstances  where a subsequent  approval is necessary  and
permissible  under the Exchange Act or the rules of the  Securities and Exchange
Commission.  Accordingly, the audit committee pre-approved all services and fees
provided  by  Deloitte & Touche LLP and BDO  Seidman,  LLP during the year ended
January  1, 2005 and has  concluded  that the  provision  of these  services  is
compatible with the accountants' independence.

Matters Not Required to be Submitted to Security Holders

     Approval by the shareholders of the selection of the independent registered
public accounting firm is not required,  but the audit committee  believes it is
desirable as a matter of good corporate  governance to submit this matter to the
shareholders.  If holders of a majority  of the  common  stock  represented  and
voting at the annual meeting do not ratify the  appointment of BDO Seidman,  LLP
as the Company's  independent  registered  public accounting firm for the fiscal
year ending  December 31, 2005,  the audit  committee  will consider  whether it
should select another independent registered public accounting firm.

Vote Required

     As a matter of good  corporate  governance,  the  Company  is  seeking  the
affirmative  vote of the  holders  of a majority  of the shares of common  stock
represented and voting at the annual meeting to approve this proposal.

     THE BOARD OF DIRECTORS UNANIMOUSLY  RECOMMENDS THAT SHAREHOLDERS VOTE "FOR"
THE  RATIFICATION  OF THE  APPOINTMENT  OF  BDO  SEIDMAN,  LLP AS THE  COMPANY'S
INDEPENDENT  REGISTERED  PUBLIC  ACCOUNTING  FIRM  FOR THE  FISCAL  YEAR  ENDING
DECEMBER 31, 2005.



                                       43


OTHER MATTERS

     The  Company  knows of no  other  matters  to be  submitted  to the  annual
meeting. If any other matters properly come before the annual meeting, it is the
intention  of the persons  named in the  enclosed  proxy card to vote the shares
they represent as the board of directors may recommend.



                                                         THE BOARD OF DIRECTORS

Dated:  August __, 2005






                                       44



                            NANOMETRICS INCORPORATED

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                       2005 ANNUAL MEETING OF SHAREHOLDERS
                                 August 26, 2005

The  undersigned  shareholder(s)  of  Nanometrics  Incorporated,   a  California
corporation,  hereby  acknowledges  receipt of the  Notice of Annual  Meeting of
Shareholders  and Proxy  Statement,  each  dated  August  __,  2005,  and hereby
appoints  Vincent J.  Coates and Paul B.  Nolan,  and each of them,  Proxies and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in the
name of the undersigned, to represent the undersigned at the 2005 Annual Meeting
of  Shareholders of Nanometrics  Incorporated  to be held on Friday,  August 26,
2005 at 1:00 p.m.,  local time, at the principal  offices of the Company located
at 1550  Buckeye  Drive,  Milpitas,  California,  95035 and at any  adjournments
thereof,  and to vote all  shares  of common  stock  which  the  undersigned  is
entitled to vote on the matters set forth below:

ITEM 1.   Election of Directors:

         (  )    FOR all nominees listed below (except as indicated)

         (  )    WITHHOLD AUTHORITY to vote for all nominees listed below

IF YOU WISH TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL  NOMINEE,  STRIKE A
LINE THROUGH THAT NOMINEE'S NAME IN THE LIST BELOW:

         Vincent J. Coates     J. Thomas Bentley       John D. Heaton

Stephen J Smith     Edmond R. Ward       William G. Oldham      Norman V. Coates

ITEM 2.  Proposal to approve the  reincorporation  of the Company under the laws
         of the  State of  Delaware  through  a merger  with Big  League  Merger
         Corporation, a wholly-owned subsidiary of the Company.

                  (  ) FOR            (  ) AGAINST             (  ) ABSTAIN

ITEM 3.  PLEASE COMPLETE EITHER THIS ITEM OR THE INDIVIDUAL PROPOSALS BELOW, BUT
         NOT BOTH.  You may vote on all proposals to approve the  governance and
         other provisions in the certificate of incorporation  and bylaws of the
         Company to be  contingent  and  effective  upon the  completion  of the
         reincorporation  merger by marking the box below. If you mark both this
         item and any individual proposal below only your vote on this item will
         be counted.
 

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN
 
A. Proposal to approve a provision limiting the Company's stockholders' right to
call special meetings of stockholders.
 

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN
 
B. Proposal to approve a provision limiting the Company's  stockholders' ability
to act by written consent.
 

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN
 
C.  Proposal  to approve a  provision  requiring  a  super-majority  vote of the
Company's  stockholders  to  amend  certain  provisions  of its  certificate  of
incorporation.

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN
 
D.  Proposal  to approve a  provision  requiring  a  super-majority  vote of the
Company's stockholders to amend certain provisions of the Company's bylaws.
 
                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN
 
E. Proposal to approve a provision limiting the Company's stockholders' right to
remove directors from the board without cause.

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN
 
F.  Proposal  to  approve  the  classification  of the board of  directors  into
separate classes with staggered terms.

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN

G.  Proposal  to  approve  a  provision  limiting  cumulative  voting  rights in
connection with the election of directors.

                  (  )  FOR           (  )  AGAINST            (  )  ABSTAIN

ITEM 4.  Proposal to approve the adoption of the Company's  2005 Employee  Stock
         Option Plan and the reservation  of  1,200,000  shares of  common stock
         for issuance thereunder.

                  (  ) FOR            (  ) AGAINST             (  ) ABSTAIN

ITEM 5.  Proposal to ratify the appointment of BDO Seidman, LLP as the Company's
         independent registered public accounting firm for the fiscal year
         ending December 31, 2005:

                  (  ) FOR            (  ) AGAINST             (  ) ABSTAIN

(Continued and to be signed, on reverse side)


                                       45


(Continued from other side)

     In their  discretion,  the Proxies are  authorized  to vote upon such other
business as may properly come before the meeting.

     THIS  BALLOT  WILL BE VOTED AS DIRECTED  OR, IF NO  CONTRARY  DIRECTION  IS
INDICATED, WILL BE VOTED "FOR" THE ELECTION OF DIRECTORS NAMED HEREIN, "FOR" THE
PROPOSALS  LISTED,  AND AS SAID PROXIES DEEM  ADVISABLE ON SUCH OTHER MATTERS AS
MAY COME BEFORE THE MEETING.

                   _____________________________________________________________
                   Typed or Printed Name(s)

                   _____________________________________________________________
                   Signature

                   _____________________________________________________________
                   Signature

                   _____________________________________________________________
                   Title, if applicable

                   _______________________________
                   Type and Number of Shares owned

                   Dated:___________________, 2005


THIS PROXY SHOULD BE MARKED, DATED, SIGNED BY THE SHAREHOLDER(S)  EXACTLY AS HIS
OR HER NAME  APPEARS  HEREON AND  RETURNED  PROMPTLY IN THE  ENCLOSED  ENVELOPE.
PERSONS SIGNING IN A FIDUCIARY  CAPACITY SHOULD SO INDICATE.  IF SHARES ARE HELD
BY JOINT TENANTS OR AS COMMUNITY PROPERTY, BOTH SHOULD SIGN.


                                       46



                                   APPENDIX A

                                    RESTATED

                          CERTIFICATE OF INCORPORATION

                            NANOMETRICS INCORPORATED

     Nanometrics  Incorporated,  a corporation  organized and existing under the
laws of the State of Delaware, hereby certifies as follows:

     A. The  corporation  was  originally  incorporated  under the name of Minor
League Merger Corporation,  and the original Certificate of Incorporation of the
corporation  was filed with the  Secretary  of State of the State of Delaware on
January 18, 2005.

      B. Pursuant to Section 251 of the General Corporation Law of the State of
Delaware (the "DGCL"), this Restated Certificate of Incorporation amends and
restates the provisions of the original Certificate of Incorporation of the
corporation.

     C. This Restated Certificate of Incorporation has been duly approved by the
Board of  Directors of the  corporation  in  accordance  with Section 251 of the
DGCL.

     D. The  Certificate of  Incorporation  of the corporation is hereby amended
and restated in its entirety to read as follows:

                                    ARTICLE I

     The name of the corporation is Nanometrics Incorporated.

                                   ARTICLE II

     The address of the corporation's registered office in the State of Delaware
is Corporation Trust Center, 1209 Orange Street,  Wilmington, New Castle County,
Delaware  19801.  The  name  of its  registered  agent  at such  address  is The
Corporation Trust Company.

                                   ARTICLE III

     The purpose of the  corporation  is to engage in any lawful act or activity
for which corporations may be organized under the DGCL.

                                   ARTICLE IV

     The corporation shall have authority to issue shares as follows:

     47,000,000  shares of Common Stock, par value $0.001 per share.  Each share
of Common Stock shall entitle the holder  thereof to one (1) vote on each matter
submitted to a vote at a meeting of stockholders.

                                      A-1



     3,000,000 shares of Preferred Stock, par value $0.001 per share,  which may
be issued from time to time in one or more series  pursuant to a  resolution  or
resolutions  providing  for such issue duly adopted by the Board of Directors of
the corporation  (authority to do so being hereby  expressly vested in the Board
of Directors of the  corporation).  The Board of Directors of the corporation is
further  authorized,  subject  to  limitations  prescribed  by  law,  to  fix by
resolution or resolutions the designations,  powers, preferences and rights, and
the qualifications,  limitations or restrictions thereof, of any wholly unissued
series of Preferred  Stock,  including  without  limitation  authority to fix by
resolution or resolutions the dividend rights, dividend rate, conversion rights,
voting  rights,   rights  and  terms  of  redemption   (including  sinking  fund
provisions), redemption price or prices, and liquidation preferences of any such
series,  and  the  number  of  shares  constituting  any  such  series  and  the
designation thereof, or any of the foregoing.

     The Board of Directors of the corporation is further authorized to increase
(but not above the total number of  authorized  shares of the class) or decrease
(but not below the number of shares of any such  series  then  outstanding)  the
number of shares of any series,  the number of which was fixed by it, subsequent
to the  issuance  of shares of such  series  then  outstanding,  subject  to the
powers,  preferences  and  rights,  and  the  qualifications,   limitations  and
restrictions  thereof  stated  in  this  Certificate  of  Incorporation  or  the
resolution of the Board of Directors of the  corporation  originally  fixing the
number of shares of such  series.  If the  number of shares of any  series is so
decreased,  then the shares  constituting  such decrease shall resume the status
which they had prior to the  adoption of the  resolution  originally  fixing the
number of shares of such series.

                                    ARTICLE V

     The number of directors that  constitutes  the entire Board of Directors of
the corporation shall be determined in the manner set forth in the Bylaws of the
corporation.  At each  annual  meeting of  stockholders,  each  director  of the
corporation  shall be  elected  to hold  office,  and  shall  serve,  until  the
expiration  of the term for  which he or she is  elected  and  until  his or her
successor is duly elected and qualified or until his or her death,  resignation,
or removal; except that if any such election shall not be so held, such election
shall take place at a  stockholders'  meeting called and held in accordance with
the DGCL.

     Any  director  may  be  removed  from  office  by the  stockholders  of the
corporation only for cause. Vacancies occurring on the Board of Directors of the
corporation  for any reason and newly created  directorships  resulting  from an
increase in the  authorized  number of directors may be filled only by vote of a
majority of the remaining  members of the Board of Directors of the corporation,
although  less than a quorum,  at any meeting of the Board of  Directors  of the
corporation. A person so elected by the Board of Directors of the corporation to
fill a vacancy or newly  created  directorship  shall hold office until the next
election of the class for which such  director  shall have been chosen and until
his or her successor shall have been duly elected and qualified.

                                   ARTICLE VI

     In  furtherance  and not in limitation of the powers  conferred by statute,
the Board of Directors of the  corporation  is  expressly  authorized  to adopt,
amend or repeal the Bylaws of the  corporation.  Notwithstanding  the foregoing,
the holders of at least 66.67% of the shares of capital stock of the corporation
issued and  outstanding  and  entitled  to vote may by  affirmative  vote adopt,
amend, alter or repeal the Bylaws of the corporation.

                                   ARTICLE VII

     The election of directors  need not be by written  ballot unless the Bylaws
of the corporation shall so provide.


                                      A-2



                                  ARTICLE VIII

     Special  meetings of the stockholders of the corporation for any purpose or
purposes may be called at any time by the  chairperson of the Board of Directors
of the corporation or a majority of the authorized number of directors, but such
special  meetings  may not be called by any other  person or persons.  No action
shall be taken by the  stockholders  of the  corporation  except at an annual or
special meeting of the  stockholders  called in accordance with this Certificate
of Incorporation or the Bylaws of the corporation,  and no action shall be taken
by the stockholders by written consent.

                                   ARTICLE IX

     The corporation  shall  indemnify and hold harmless,  to the fullest extent
permitted by the DGCL as it presently  exists or may  hereafter be amended,  any
director or officer of the corporation who was or is made or is threatened to be
made a party or is otherwise involved in any action, suit or proceeding, whether
civil,  criminal,  administrative or investigative (a "Proceeding") by reason of
the  fact  that  he or  she,  or a  person  for  whom  he or she  is  the  legal
representative,  is or  was a  director,  officer,  employee  or  agent  of  the
corporation  or is or  was  serving  at the  request  of  the  corporation  as a
director, officer, employee or agent of another corporation or of a partnership,
joint venture,  trust,  enterprise or non-profit entity,  including service with
respect to employee  benefit plans,  against all liability and loss suffered and
expenses  reasonably  incurred  by such  person  in  connection  with  any  such
Proceeding.  The  corporation  shall  be  required  to  indemnify  a  person  in
connection with a Proceeding initiated by such person only if the Proceeding was
authorized by the Board of Directors of the corporation.

     The corporation shall have the power to indemnify and hold harmless, to the
extent  permitted by applicable  law as it presently  exists or may hereafter be
amended,  any  employee  or  agent of the  corporation  who was or is made or is
threatened  to be made a party or is  otherwise  involved in any  Proceeding  by
reason of the fact that he or she,  or a person  for whom he or she is the legal
representative,  is or was an employee or agent of the  corporation or is or was
serving at the request of the  corporation as a director,  officer,  employee or
agent  of  another  corporation  or  of a  partnership,  joint  venture,  trust,
enterprise  or  non-profit  entity,  including  service with respect to employee
benefit plans,  against all liability and loss suffered and expenses  reasonably
incurred by such person in connection with any such Proceeding.

     Neither any  amendment  nor repeal of this  Article IX, nor the adoption of
any  provision  of this  Certificate  of  Incorporation  inconsistent  with this
Article IX,  shall  eliminate or reduce the effect of this Article IX in respect
of any matter  occurring,  or any cause of  action,  suit or claim  accruing  or
arising or that,  but for this Article IX, would accrue or arise,  prior to such
amendment, repeal or adoption of an inconsistent provision.

                                    ARTICLE X

     Except as provided in Article IX above, the corporation  reserves the right
to amend, alter, change or repeal any provision contained in this Certificate of
Incorporation,  in the manner now or hereafter  prescribed  by statute,  and all
rights  conferred  upon   stockholders   herein  are  granted  subject  to  this
reservation.  Notwithstanding  the foregoing,  any other  provision of law, this
Certificate   of   Incorporation   or  the  Bylaws  of  the   corporation,   and
notwithstanding  the fact that a lesser  percentage may be specified by law, the
affirmative  vote of the  holders  of at least  66.67% of the  shares of capital
stock of the  corporation  issued and  outstanding and entitled to vote shall be
required  to amend or  repeal,  or to adopt  any  provision  inconsistent  with,
Article  IV,  Article  VI,  Article  VIII or  Article X of this  Certificate  of
Incorporation.


                                      A-3




     IN WITNESS  WHEREOF,  Nanometrics  Incorporated  has caused  this  Restated
Certificate of  Incorporation  to be signed by the President and Chief Executive
Officer of the corporation on this day of 2005.

                                      
                                      By:
                                         ------------------------------------
                                         John D. Heaton
                                         President and Chief Executive
                                         Officer
                                      



                                      A-4




                                   APPENDIX B

                         AMENDED AND RESTATED BYLAWS OF

                            NANOMETRICS INCORPORATED

                     (initially adopted on January 18, 2005)

                  (as amended and restated on [________, 2005])






                                TABLE OF CONTENTS

                                                                                     Page
                                                                                   ---------
                                                                               
ARTICLE I - CORPORATE OFFICES                                                         B- 1
      1.1     REGISTERED OFFICE                                                       B- 1
      1.2     OTHER OFFICES                                                           B- 1

ARTICLE II - MEETINGS OF STOCKHOLDERS                                                 B- 1
      2.1     PLACE OF MEETINGS                                                       B- 1
      2.2     ANNUAL MEETING                                                          B- 1
      2.3     SPECIAL MEETING                                                         B- 1
      2.4     ADVANCE NOTICE PROCEDURES; NOTICE OF STOCKHOLDERS' MEETINGS             B- 1
      2.5     MANNER OF GIVING NOTICE; AFFIDAVIT OF NOTICE                            B- 3
      2.6     QUORUM                                                                  B- 3
      2.7     ADJOURNED MEETING; NOTICE                                               B- 3
      2.8     CONDUCT OF BUSINESS                                                     B- 3
      2.9     VOTING                                                                  B- 3
      2.10    RECORD DATE FOR STOCKHOLDER NOTICE; VOTING; GIVING CONSENTS             B- 4
      2.11    PROXIES                                                                 B- 4
      2.12    LIST OF STOCKHOLDERS ENTITLED TO VOTE                                   B- 4
      2.13    INSPECTORS OF ELECTION                                                  B- 4

ARTICLE III - DIRECTORS                                                               B- 5
      3.1     POWERS                                                                  B- 5
      3.2     NUMBER OF DIRECTORS                                                     B- 5
      3.3     ELECTION, QUALIFICATION AND TERM OF OFFICE OF DIRECTORS                 B- 5
      3.4     CLASS OF DIRECTORS                                                      B- 5
      3.5     RESIGNATION AND VACANCIES                                               B- 6
      3.6     PLACE OF MEETINGS; MEETINGS BY TELEPHONE                                B- 6
      3.7     REGULAR MEETINGS                                                        B- 7
      3.8     SPECIAL MEETINGS; NOTICE                                                B- 7
      3.9     QUORUM                                                                  B- 7
      3.10    BOARD ACTION BY WRITTEN CONSENT WITHOUT A MEETING                       B- 7
      3.11    FEES AND COMPENSATION OF DIRECTORS                                      B- 7
      3.12    REMOVAL OF DIRECTORS                                                    B- 8

ARTICLE IV - COMMITTEES                                                               B- 8
      4.1     COMMITTEES OF DIRECTORS                                                 B- 8
      4.2     COMMITTEE MINUTES                                                       B- 8
      4.3     MEETINGS AND ACTION OF COMMITTEES                                       B- 8

ARTICLE V - OFFICERS                                                                  B- 9
      5.1     OFFICERS                                                                B- 9
      5.2     APPOINTMENT OF OFFICERS                                                 B- 9
      5.3     SUBORDINATE OFFICERS                                                    B- 9
      5.4     REMOVAL AND RESIGNATION OF OFFICERS                                     B- 9
      5.5     VACANCIES IN OFFICES                                                    B- 9
      5.6     REPRESENTATION OF SHARES OF OTHER CORPORATIONS                          B- 9
      5.7     AUTHORITY AND DUTIES OF OFFICERS                                        B- 9



                                      B-i





                                TABLE OF CONTENTS
                                   (continued)

                                                                                    Page
                                                                                  ---------
                                                                               
ARTICLE VI - RECORDS AND REPORTS                                                     B- 10
      6.1     MAINTENANCE AND INSPECTION OF RECORDS                                  B- 10
      6.2     INSPECTION BY DIRECTORS                                                B- 10

ARTICLE VII - GENERAL MATTERS                                                        B- 10
      7.1     EXECUTION OF CORPORATE CONTRACTS AND INSTRUMENTS                       B- 10
      7.2     STOCK CERTIFICATES; PARTLY PAID SHARES                                 B- 10
      7.3     SPECIAL DESIGNATION ON CERTIFICATES                                    B- 11
      7.4     LOST CERTIFICATES                                                      B- 11
      7.5     CONSTRUCTION; DEFINITIONS                                              B- 11
      7.6     DIVIDENDS                                                              B- 11
      7.7     FISCAL YEAR                                                            B- 11
      7.8     SEAL                                                                   B- 12
      7.9     TRANSFER OF STOCK                                                      B- 12
      7.10    STOCK TRANSFER AGREEMENTS                                              B- 12
      7.11    REGISTERED STOCKHOLDERS                                                B- 12
      7.12    WAIVER OF NOTICE                                                       B- 12

ARTICLE VIII - NOTICE BY ELECTRONIC TRANSMISSION                                     B- 12
      8.1     NOTICE BY ELECTRONIC TRANSMISSION                                      B- 12
      8.2     DEFINITION OF ELECTRONIC TRANSMISSION                                  B- 13
      8.3     INAPPLICABILITY                                                        B- 13

ARTICLE IX - INDEMNIFICATION                                                         B- 13
      9.1     INDEMNIFICATION OF DIRECTORS AND OFFICERS                              B- 13
      9.2     INDEMNIFICATION OF OTHERS                                              B- 13
      9.3     PREPAYMENT OF EXPENSES                                                 B- 14
      9.4     DETERMINATION; CLAIM                                                   B- 14
      9.5     NON-EXCLUSIVITY OF RIGHTS                                              B- 14
      9.6     INSURANCE                                                              B- 14
      9.7     OTHER INDEMNIFICATION                                                  B- 14
      9.8     AMENDMENT OR REPEAL                                                    B- 14

ARTICLE X - AMENDMENTS                                                               B- 14



                                      B-ii



                           AMENDED AND RESTATED BYLAWS
                                       OF
                            NANOMETRICS INCORPORATED

                          ARTICLE I - CORPORATE OFFICES

      1.1      REGISTERED OFFICE.

      The registered  office of Nanometrics  Incorporated  shall be fixed in the
corporation's certificate of incorporation, as the same may be amended from time
to time.

      1.2      OTHER OFFICES.

      The  corporation's  board  of  directors  (the  "Board")  may at any  time
establish  other  offices  at any  place or  places  where  the  corporation  is
qualified to do business.

                      ARTICLE II - MEETINGS OF STOCKHOLDERS

      2.1      PLACE OF MEETINGS.

      Meetings of stockholders shall be held at any place, within or outside the
State  of  Delaware,  designated  by the  Board.  In  the  absence  of any  such
designation  or  determination,  stockholders'  meetings  shall  be  held at the
corporation's principal executive office.

      2.2      ANNUAL MEETING.

      The annual  meeting  of  stockholders  shall be held each year.  The Board
shall designate the date and time of the annual meeting.  In the absence of such
designation  the  annual  meeting  of  stockholders  shall be held on the second
Tuesday of May of each year at 10:00 a.m. However,  if such day falls on a legal
holiday,  then the meeting  shall be held at the same time and place on the next
succeeding  business day. At the annual meeting,  directors shall be elected and
any other proper business may be transacted.

      2.3      SPECIAL MEETING.

      A special  meeting of the  stockholders  may be called as  provided in the
certificate of incorporation.

      No business  may be  transacted  at such  special  meeting  other than the
business  specified in such notice to  stockholders.  Nothing  contained in this
paragraph  of this  Section  2.3 shall be  construed  as  limiting,  fixing,  or
affecting the time when a meeting of stockholders  called by action of the Board
may be held.

      2.4      ADVANCE NOTICE PROCEDURES; NOTICE OF STOCKHOLDERS' MEETINGS.

           (i) At an annual  meeting  of the  stockholders,  only such  business
      shall be conducted as shall have been properly brought before the meeting.
      To be properly  brought  before an annual  meeting,  business must be: (A)
      specified in the notice of meeting (or any supplement thereto) given by or
      at the direction of the Board,  (B) otherwise  properly brought before the
      meeting by or at the  direction of the Board,  or (C)  otherwise  properly
      brought before the meeting by a  stockholder.  For business to be properly
      brought before an annual meeting by a stockholder,  the  stockholder  must
      have given  timely  notice  thereof in  writing  to the  secretary  of the
      corporation.  To be timely, a stockholder's notice must be delivered to or
      mailed and received at the principal  executive offices of the corporation
      not less than one hundred  twenty (120)  calendar days before the one year
      anniversary  of the date on which the  corporation  first mailed its proxy
      statement to  stockholders  in connection  with the previous year's annual
      meeting  of  stockholders;  provided,  however,  that in the event that no
      annual  meeting  was held in the  previous  year or the date of the annual
      meeting has been


                                      B-1




      changed by more than  thirty  (30) days from the date of the prior  year's
      meeting,  notice by the  stockholder  to be timely must be so received not
      later than the close of business on the later of one hundred  twenty (120)
      calendar days in advance of such annual meeting and ten (10) calendar days
      following the date on which public announcement of the date of the meeting
      is first made. A stockholder's  notice to the secretary shall set forth as
      to each  matter  the  stockholder  proposes  to bring  before  the  annual
      meeting:  (a) a brief  description  of the business  desired to be brought
      before the annual meeting and the reasons for conducting  such business at
      the  annual  meeting,  (b) the name and  address,  as they  appear  on the
      corporation's books, of the stockholder  proposing such business,  (c) the
      class and number of shares of the corporation that are beneficially  owned
      by the stockholder,  (d) any material  interest of the stockholder in such
      business, and (e) any other information that is required to be provided by
      the stockholder  pursuant to Regulation 14A under the Securities  Exchange
      Act of 1934,  as amended (the "1934 Act"),  in his capacity as a proponent
      to a stockholder  proposal.  Notwithstanding  the  foregoing,  in order to
      include  information  with respect to a stockholder  proposal in the proxy
      statement and form of proxy for a stockholder's meeting, stockholders must
      provide notice as required by the regulations  promulgated  under the 1934
      Act. Notwithstanding anything in these bylaws to the contrary, no business
      shall be conducted at any annual  meeting  except in  accordance  with the
      procedures  set forth in this  paragraph  (i).  The chairman of the annual
      meeting shall, if the facts warrant,  determine and declare at the meeting
      that  business  was  not  properly  brought  before  the  meeting  and  in
      accordance with the provisions of this paragraph (i), and, if he should so
      determine,  he shall so declare at the meeting that any such  business not
      properly brought before the meeting shall not be transacted.

           (ii) Only persons who are nominated in accordance with the procedures
      set  forth in this  paragraph  (ii)  shall be  eligible  for  election  as
      directors. Nominations of persons for election to the Board may be made at
      a meeting of  stockholders  by or at the  direction of the Board or by any
      stockholder  of the  corporation  entitled  to  vote  in the  election  of
      directors at the meeting who complies with the notice procedures set forth
      in this paragraph (ii). Such  nominations,  other than those made by or at
      the  direction of the Board,  shall be made  pursuant to timely  notice in
      writing  to the  secretary  of the  corporation  in  accordance  with  the
      provisions of paragraph (i) of this Section 2.4. Such stockholder's notice
      shall  set  forth  (a) as to each  person,  if any,  whom the  stockholder
      proposes to nominate for election or  re-election  as a director:  (A) the
      name, age, business address and residence address of such person,  (B) the
      principal  occupation  or  employment  of such  person,  (C) the class and
      number of shares of the corporation  that are  beneficially  owned by such
      person,  (D) a description of all arrangements or  understandings  between
      the  stockholder  and each nominee and any other person or persons (naming
      such person or persons)  pursuant to which the  nominations are to be made
      by the stockholder,  and (E) any other information relating to such person
      that is required to be disclosed in solicitations of proxies for elections
      of  directors,  or  is  otherwise  required,  in  each  case  pursuant  to
      Regulation  14A  under the 1934 Act  (including  without  limitation  such
      person's written consent to being named in the proxy statement, if any, as
      a nominee  and to serving as a director  if  elected);  and (b) as to such
      stockholder  giving  notice,  the  information  required  to  be  provided
      pursuant  to  paragraph  (i) of this  Section  2.4.  At the request of the
      Board,  any person  nominated by a stockholder  for election as a director
      shall  furnish  to the  secretary  of  the  corporation  that  information
      required to be set forth in the  stockholder's  notice of nomination which
      pertains to the  nominee.  No person  shall be eligible  for election as a
      director  of the  corporation  unless  nominated  in  accordance  with the
      procedures set forth in this  paragraph  (ii). The chairman of the meeting
      shall,  if the facts warrant,  determine and declare at the meeting that a
      nomination was not made in accordance  with the  procedures  prescribed by
      these bylaws,  and if he should so  determine,  he shall so declare at the
      meeting, and the defective nomination shall be disregarded.

      These  provisions  shall not prevent  the  consideration  and  approval or
disapproval  at  an  annual  meeting  of  reports  of  officers,  directors  and
committees of the Board,  but in connection  therewith no new business  shall be
acted upon at any such  meeting  unless  stated,  filed and  received  as herein
provided.  Notwithstanding anything in these bylaws to the contrary, no business
brought  before a  meeting  by a  stockholder  shall be  conducted  at an annual
meeting except in accordance with procedures set forth in this Section 2.4.


                                      B-2




      All notices of meetings of  stockholders  shall be sent or otherwise given
in  accordance  with either  Section 2.5 or Section 8.1 of these bylaws not less
than 10 nor more than 60 days before the date of the meeting to each stockholder
entitled to vote at such meeting.  The notice shall  specify the place,  if any,
date and hour of the  meeting,  the means of remote  communication,  if any,  by
which  stockholders  and proxy holders may be deemed to be present in person and
vote at such  meeting,  and,  in the case of a special  meeting,  the purpose or
purposes for which the meeting is called.

      2.5      MANNER OF GIVING NOTICE; AFFIDAVIT OF NOTICE.

      Notice of any meeting of stockholders shall be given:

           (i) if mailed,  when  deposited in the United  States  mail,  postage
      prepaid,  directed to the  stockholder at his or her address as it appears
      on the corporation's records; or

           (ii) if  electronically  transmitted  as  provided  in Section 8.1 of
      these bylaws.

      An affidavit of the secretary or an assistant secretary of the corporation
or of the transfer agent or any other agent of the  corporation  that the notice
has been given by mail or by a form of electronic  transmission,  as applicable,
shall,  in the  absence of fraud,  be prima facie  evidence of the facts  stated
therein.

      2.6      QUORUM.

      The holders of a majority of the stock issued and outstanding and entitled
to vote,  present in person or represented by proxy,  shall  constitute a quorum
for the  transaction  of  business  at all  meetings  of the  stockholders.  If,
however,  such  quorum is not  present  or  represented  at any  meeting  of the
stockholders,  then  either  (i) the  chairperson  of the  meeting,  or (ii) the
stockholders  entitled to vote at the meeting,  present in person or represented
by proxy,  shall have power to adjourn  the meeting  from time to time,  without
notice  other than  announcement  at the  meeting,  until a quorum is present or
represented.  At  such  adjourned  meeting  at  which a  quorum  is  present  or
represented,  any business may be transacted  that might have been transacted at
the meeting as originally noticed.

      2.7      ADJOURNED MEETING; NOTICE.

      When a meeting is adjourned to another time or place,  unless these bylaws
otherwise  require,  notice  need not be given of the  adjourned  meeting if the
time,  place if any thereof,  and the means of remote  communications  if any by
which  stockholders  and proxy holders may be deemed to be present in person and
vote at such  adjourned  meeting  are  announced  at the  meeting  at which  the
adjournment is taken. At the adjourned meeting, the corporation may transact any
business  which  might have been  transacted  at the  original  meeting.  If the
adjournment  is for more than 30 days, or if after the  adjournment a new record
date is fixed for the adjourned meeting, a notice of the adjourned meeting shall
be given to each stockholder of record entitled to vote at the meeting.

      2.8      CONDUCT OF BUSINESS.

      The chairperson of any meeting of  stockholders  shall determine the order
of business and the procedure at the meeting,  including such  regulation of the
manner of voting and the conduct of business.

      2.9      VOTING.

      The stockholders  entitled to vote at any meeting of stockholders shall be
determined  in accordance  with the  provisions of Section 2.12 of these bylaws,
subject to Section 217 (relating to voting rights of  fiduciaries,  pledgors and
joint  owners of stock) and Section  218  (relating  to voting  trusts and other
voting agreements) of the Delaware General Corporation Law (the "DGCL").

      Except as may be otherwise provided in the certificate of incorporation or
these bylaws,  each stockholder  shall be entitled to one vote for each share of
capital stock held by such stockholder.


                                      B-3




      2.10     RECORD DATE FOR STOCKHOLDER NOTICE; VOTING; GIVING CONSENTS.

      In order that the corporation may determine the  stockholders  entitled to
notice of or to vote at any meeting of stockholders or any adjournment  thereof,
or  entitled  to  receive  payment  of any  dividend  or other  distribution  or
allotment  of any rights,  or entitled to exercise  any rights in respect of any
change,  conversion  or exchange of stock or for the purpose of any other lawful
action,  the Board may fix, in advance,  a record date,  which record date shall
not precede the date on which the  resolution  fixing the record date is adopted
and which  shall not be more  than 60 nor less than 10 days  before  the date of
such meeting, nor more than 60 days prior to any other such action.

      If the Board does not so fix a record date:

           (i) The record date for determining  stockholders  entitled to notice
      of or to vote at a  meeting  of  stockholders  shall  be at the  close  of
      business on the day next  preceding the day on which notice is given,  or,
      if notice is waived,  at the close of business  on the day next  preceding
      the day on which the meeting is held.

           (ii) The  record  date for  determining  stockholders  for any  other
      purpose  shall be at the close of  business  on the day on which the Board
      adopts the resolution relating thereto.

      A determination of stockholders of record entitled to notice of or to vote
at a meeting of  stockholders  shall apply to any  adjournment  of the  meeting;
provided,  however,  that the Board may fix a new record date for the  adjourned
meeting.

      2.11     PROXIES.

      Each  stockholder  entitled  to  vote at a  meeting  of  stockholders  may
authorize  another  person  or  persons  to act for  such  stockholder  by proxy
authorized  by an instrument  in writing or by a  transmission  permitted by law
filed in accordance with the procedure  established for the meeting, but no such
proxy shall be voted or acted upon after  three years from its date,  unless the
proxy provides for a longer period.  The  revocability of a proxy that states on
its face that it is  irrevocable  shall be governed by the provisions of Section
212 of the DGCL.

      2.12     LIST OF STOCKHOLDERS ENTITLED TO VOTE.

      The officer who has charge of the stock  ledger of the  corporation  shall
prepare  and make,  at least 10 days before  every  meeting of  stockholders,  a
complete list of the stockholders  entitled to vote at the meeting,  arranged in
alphabetical  order,  and showing the address of each stockholder and the number
of shares registered in the name of each stockholder.  The corporation shall not
be required to include  electronic  mail addresses or other  electronic  contact
information  on such  list.  Such list shall be open to the  examination  of any
stockholder,  for any purpose germane to the meeting for a period of at least 10
days prior to the meeting:  (i) on a reasonably  accessible  electronic network,
provided that the  information  required to gain access to such list is provided
with the notice of the meeting,  or (ii) during ordinary  business hours, at the
corporation's  principal  executive  office.  In the event that the  corporation
determines to make the list available on an electronic network,  the corporation
may take reasonable  steps to ensure that such  information is available only to
stockholders of the corporation.  If the meeting is to be held at a place,  then
the list shall be produced and kept at the time and place of the meeting  during
the whole time thereof,  and may be inspected by any stockholder who is present.
If the meeting is to be held solely by means of remote  communication,  then the
list shall also be open to the examination of any  stockholder  during the whole
time of the  meeting on a  reasonably  accessible  electronic  network,  and the
information  required to access  such list shall be provided  with the notice of
the  meeting.  Such list  shall  presumptively  determine  the  identity  of the
stockholders  entitled  to vote at the  meeting and the number of shares held by
each of them.

      2.13     INSPECTORS OF ELECTION

      A written  proxy  may be in the form of a  telegram,  cablegram,  or other
means  of  electronic  transmission  which  sets  forth  or  is  submitted  with
information  from which it can be determined  that the telegram,  cablegram,  or
other means of electronic transmission was authorized by the person.


                                      B-4



      Before any meeting of  stockholders,  the Board shall appoint an inspector
or inspectors of election to act at the meeting or its  adjournment.  The number
of inspectors  shall be either one (1) or three (3). If any person  appointed as
inspector  fails to appear or fails or refuses to act, then the  chairperson  of
the meeting  may,  and upon the request of any  stockholder  or a  stockholder's
proxy shall, appoint a person to fill that vacancy.

      Such inspectors shall:

           (i) determine the number of shares  outstanding  and the voting power
      of each, the number of shares represented at the meeting, the existence of
      a quorum, and the authenticity, validity, and effect of proxies;

           (ii) receive votes, ballots or consents;

           (iii) hear and  determine  all  challenges  and  questions in any way
      arising in connection with the right to vote;

           (iv) count and tabulate all votes or consents;

           (v) determine when the polls shall close;

           (vi) determine the result; and

           (vii) do any other acts that may be proper to conduct the election or
      vote with fairness to all stockholders.

      The inspectors of election shall perform their duties impartially, in good
faith,  to the best of their ability and as  expeditiously  as is practical.  If
there are three (3) inspectors of election,  the decision, act or certificate of
a majority is effective in all respects as the decision,  act or  certificate of
all. Any report or certificate made by the inspectors of election is prima facie
evidence of the facts stated therein.

                             ARTICLE III - DIRECTORS

      3.1      POWERS.

      Subject  to  the  provisions  of  the  DGCL  and  any  limitations  in the
certificate of  incorporation  or these bylaws relating to action required to be
approved by the  stockholders  or by the  outstanding  shares,  the business and
affairs of the  corporation  shall be managed and all corporate  powers shall be
exercised by or under the direction of the Board.

      3.2      NUMBER OF DIRECTORS.

      The authorized  number of directors  shall be determined from time to time
by resolution of the Board.  No reduction of the authorized  number of directors
shall have the effect of removing any director  before that  director's  term of
office expires.

      3.3      ELECTION, QUALIFICATION AND TERM OF OFFICE OF DIRECTORS.

      Except  as  provided  in  Section  3.5 of  these  bylaws,  each  director,
including  a director  elected to fill a vacancy,  shall hold  office  until the
expiration of the term for which elected and until such director's  successor is
elected and qualified or until such  director's  earlier  death,  resignation or
removal.   Directors  need  not  be  stockholders  unless  so  required  by  the
certificate of incorporation  or these bylaws.  The certificate of incorporation
or these bylaws may prescribe other qualifications for directors.

      3.4      CLASS OF DIRECTORS

The directors  shall be divided into three classes as nearly equal in size as is
practicable,  hereby  designated  Class I, Class II and Class  III.  The term of
office  of  the   initial   Class  I  directors   shall   expire  at  the  first
regularly-scheduled  annual meeting of the stockholders  following the effective
date of these bylaws (the "Effective  Date"),  the term of office of the initial


                                      B-5


Class II directors shall expire at the second annual meeting of the stockholders
following  the  Effective  Date and the term of office of the initial  Class III
directors shall expire at the third annual meeting of the stockholders following
the Effective Date. At each annual meeting of stockholders,  commencing with the
first regularly-scheduled annual meeting of stockholders following the Effective
Date,  each of the successors  elected to replace the directors of a Class whose
term shall have expired at such annual  meeting  shall be elected to hold office
until the third annual meeting next succeeding his or her election and until his
or her respective successor shall have been duly elected and qualified.

      If the  number of  directors  is  hereafter  changed,  any  newly  created
directorships  or decrease in  directorships  shall be so apportioned  among the
classes  as to make all  classes  as nearly  equal in number as is  practicable,
provided  that no decrease  in the number of  directors  constituting  the Board
shall shorten the term of any incumbent director.

      3.5      RESIGNATION AND VACANCIES.

      Any  director  may resign at any time upon  notice  given in writing or by
electronic  transmission  to the  corporation.  When  one or more  directors  so
resigns and the  resignation  is  effective  at a future date, a majority of the
directors then in office, including those who have so resigned, shall have power
to fill such  vacancy or  vacancies,  the vote  thereon to take effect when such
resignation or resignations shall become effective,  and each director so chosen
shall hold office as provided in this section in the filling of other vacancies.

      Unless  otherwise  provided in the certificate of  incorporation  or these
bylaws, vacancies and newly created directorships resulting from any increase in
the authorized number of directors elected by all of the stockholders having the
right to vote as a single  class may be filled by a  majority  of the  directors
then in office,  although less than a quorum, or by a sole remaining director. A
person so  elected  by the  directors  then in office to fill a vacancy or newly
created  directorship shall hold office until the next election of the class for
which such director shall have been chosen and until his or her successor  shall
have been duly elected and qualified.

      If at any time,  by reason of death or  resignation  or other  cause,  the
corporation  should  have no  directors  in  office,  then  any  officer  or any
stockholder or an executor, administrator, trustee or guardian of a stockholder,
or other fiduciary  entrusted with like  responsibility for the person or estate
of a stockholder,  may call a special meeting of stockholders in accordance with
the provisions of the certificate of incorporation or these bylaws, or may apply
to the Court of Chancery for a decree summarily ordering an election as provided
in Section 211 of the DGCL.

      If, at the time of filling any vacancy or any newly created  directorship,
the directors then in office  constitute less than a majority of the whole Board
(as  constituted  immediately  prior to any such  increase),  then the  Court of
Chancery may, upon  application of any  stockholder or  stockholders  holding at
least 10% of the total number of the shares at the time  outstanding  having the
right to vote for such directors, summarily order an election to be held to fill
any such vacancies or newly created  directorships,  or to replace the directors
chosen by the directors  then in office as aforesaid,  which  election  shall be
governed by the provisions of Section 211 of the DGCL as far as applicable.

      3.6      PLACE OF MEETINGS; MEETINGS BY TELEPHONE.

      The Board may hold  meetings,  both regular and special,  either within or
outside the State of Delaware.

      Unless  otherwise  restricted by the certificate of incorporation or these
bylaws,  members of the Board,  or any committee  designated  by the Board,  may
participate in a meeting of the Board, or any committee,  by means of conference
telephone  or other  communications  equipment  by means  of which  all  persons
participating  in the meeting can hear each other,  and such  participation in a
meeting shall constitute presence in person at the meeting.


                                      B-6



      3.7      REGULAR MEETINGS.

      Regular  meetings of the Board may be held without notice at such time and
at such place as shall from time to time be determined by the Board.

      3.8      SPECIAL MEETINGS; NOTICE.

      Special meetings of the Board for any purpose or purposes may be called at
any time by the  chairperson  of the Board,  the chief  executive  officer,  the
president, the secretary or a majority of the authorized number of directors.

      Notice of the time and place of special meetings shall be:

           (i) delivered personally by hand, by courier or by telephone;

           (ii) sent by United States first-class mail, postage prepaid;

           (iii) sent by facsimile; or

           (iv) sent by electronic mail,

directed  to  each  director  at  that  director's  address,  telephone  number,
facsimile number or electronic mail address, as the case may be, as shown on the
corporation's records.

      If the  notice is (i)  delivered  personally  by hand,  by  courier  or by
telephone,  (ii) sent by facsimile or (iii) sent by electronic mail, it shall be
delivered  or sent at least  24 hours  before  the  time of the  holding  of the
meeting.  If the notice is sent by United  States mail, it shall be deposited in
the United  States mail at least four days before the time of the holding of the
meeting.  Any oral notice may be communicated  to the director.  The notice need
not  specify  the  place of the  meeting  (if the  meeting  is to be held at the
corporation's principal executive office) nor the purpose of the meeting.

      3.9      QUORUM.

      At all  meetings  of the Board,  a majority  of the  authorized  number of
directors shall constitute a quorum for the transaction of business. The vote of
a majority of the directors  present at any meeting at which a quorum is present
shall be the act of the Board, except as may be otherwise  specifically provided
by statute, the certificate of incorporation or these bylaws. If a quorum is not
present at any  meeting of the Board,  then the  directors  present  thereat may
adjourn the meeting from time to time, without notice other than announcement at
the meeting, until a quorum is present.

      A meeting at which a quorum is initially  present may continue to transact
business  notwithstanding  the  withdrawal of directors,  if any action taken is
approved by at least a majority of the required quorum for that meeting.

      3.10     BOARD ACTION BY WRITTEN CONSENT WITHOUT A MEETING.

      Unless  otherwise  restricted by the certificate of incorporation or these
bylaws,  any action  required  or  permitted  to be taken at any  meeting of the
Board,  or of any  committee  thereof,  may be taken  without a  meeting  if all
members  of the  Board or  committee,  as the case may be,  consent  thereto  in
writing or by electronic  transmission and the writing or writings or electronic
transmission or  transmissions  are filed with the minutes of proceedings of the
Board or  committee.  Such  filing  shall be in paper  form if the  minutes  are
maintained  in paper form and shall be in  electronic  form if the  minutes  are
maintained in electronic form.

      3.11     FEES AND COMPENSATION OF DIRECTORS.

      Unless  otherwise  restricted by the certificate of incorporation or these
bylaws, the Board shall have the authority to fix the compensation of directors.


                                      B-7


      3.12     REMOVAL OF DIRECTORS.

      Any  director  may be  removed  from  office  by the  stockholders  of the
corporation only for cause.

      No reduction of the authorized  number of directors  shall have the effect
of removing any director  prior to the  expiration  of such  director's  term of
office.

                             ARTICLE IV - COMMITTEES

      4.1      COMMITTEES OF DIRECTORS.

      The Board may, by resolution passed by a majority of the authorized number
of directors, designate one or more committees, each committee to consist of one
or more of the directors of the corporation. The Board may designate one or more
directors as alternate  members of any committee,  who may replace any absent or
disqualified  member  at  any  meeting  of the  committee.  In  the  absence  or
disqualification  of a member of a  committee,  the  member or  members  thereof
present at any meeting and not  disqualified  from  voting,  whether or not such
member or members constitute a quorum, may unanimously appoint another member of
the Board to act at the meeting in the place of any such absent or  disqualified
member.  Any such  committee,  to the extent  provided in the  resolution of the
Board  or in these  bylaws,  shall  have and may  exercise  all the  powers  and
authority  of the Board in the  management  of the  business  and affairs of the
corporation,  and may authorize the seal of the corporation to be affixed to all
papers  that may  require  it;  but no such  committee  shall  have the power or
authority to (i) approve or adopt, or recommend to the stockholders,  any action
or matter  expressly  required by the DGCL to be submitted to  stockholders  for
approval, or (ii) adopt, amend or repeal any bylaw of the corporation.

      4.2      COMMITTEE MINUTES.

      Each committee  shall keep regular  minutes of its meetings and report the
same to the Board when required.

      4.3      MEETINGS AND ACTION OF COMMITTEES.

      Meetings  and actions of  committees  shall be  governed  by, and held and
taken in accordance with, the provisions of:

           (i) Section 3.6 (place of meetings and meetings by telephone);

           (ii) Section 3.7 (regular meetings);

           (iii) Section 3.8 (special meetings and notice);

           (iv) Section 3.9 (quorum);

           (v) Section 7.12 (waiver of notice); and

           (vi) Section 3.10 (board action by written consent without a meeting)

with such changes in the context of those bylaws as are  necessary to substitute
the committee and its members for the Board and its members. However:

           (i) the time of regular  meetings  of  committees  may be  determined
      either by resolution of the Board or by resolution of the committee;

           (ii) special  meetings of committees may also be called by resolution
      of the Board; and

           (iii) notice of special meetings of committees shall also be given to
      all alternate members,  who shall have the right to attend all meetings of
      the  committee.  The  Board  may adopt  rules  for the  government  of any
      committee not inconsistent with the provisions of these bylaws.


                                      B-8



                              ARTICLE V - OFFICERS

      5.1      OFFICERS.

      The officers of the corporation shall be a president and a secretary.  The
corporation  may also have, at the discretion of the Board, a chairperson of the
Board,  a vice  chairperson  of the Board, a chief  executive  officer,  a chief
financial  officer  or  treasurer,  one or  more  vice  presidents,  one or more
assistant  vice  presidents,  one or  more  assistant  treasurers,  one or  more
assistant  secretaries,  and any such  other  officers  as may be  appointed  in
accordance  with the  provisions of these  bylaws.  Any number of offices may be
held by the same person.

      5.2      APPOINTMENT OF OFFICERS.

      The Board shall  appoint  the  officers  of the  corporation,  except such
officers as may be appointed in accordance  with the  provisions of Sections 5.3
and 5.5 of these bylaws,  subject to the rights, if any, of an officer under any
contract of employment.

      5.3      SUBORDINATE OFFICERS.

      The Board may appoint,  or empower the chief executive  officer or, in the
absence of a chief  executive  officer,  the president,  to appoint,  such other
officers and agents as the business of the corporation may require. Each of such
officers and agents shall hold office for such period, have such authority,  and
perform  such duties as are  provided  in these  bylaws or as the Board may from
time to time determine.

      5.4      REMOVAL AND RESIGNATION OF OFFICERS.

      Subject  to the  rights,  if any,  of an  officer  under any  contract  of
employment,  any  officer may be removed,  either with or without  cause,  by an
affirmative  vote of the majority of the Board at any regular or special meeting
of the Board or,  except in the case of an officer  chosen by the Board,  by any
officer upon whom such power of removal may be conferred by the Board.

      Any  officer  may  resign  at any time by  giving  written  notice  to the
corporation.  Any  resignation  shall take  effect at the date of the receipt of
that notice or at any later time  specified  in that  notice.  Unless  otherwise
specified in the notice of resignation,  the acceptance of the resignation shall
not be necessary to make it effective.  Any resignation is without  prejudice to
the rights,  if any, of the corporation  under any contract to which the officer
is a party.

      5.5      VACANCIES IN OFFICES.

      Any vacancy  occurring in any office of the corporation shall be filled by
the Board or as provided in Section 5.2.

      5.6      REPRESENTATION OF SHARES OF OTHER CORPORATIONS.

      The  chairperson of the Board,  the  president,  any vice  president,  the
treasurer,  the  secretary or assistant  secretary of this  corporation,  or any
other person  authorized by the Board or the president or a vice  president,  is
authorized to vote,  represent,  and exercise on behalf of this  corporation all
rights  incident to any and all shares of any other  corporation or corporations
standing in the name of this  corporation.  The authority  granted herein may be
exercised either by such person directly or by any other person authorized to do
so by proxy or power  of  attorney  duly  executed  by such  person  having  the
authority.

      5.7      AUTHORITY AND DUTIES OF OFFICERS.

      All officers of the corporation shall respectively have such authority and
perform such duties in the management of the business of the  corporation as may
be  designated  from time to time by the Board or the  stockholders  and, to the
extent  not so  provided,  as  generally  pertain to their  respective  offices,
subject to the control of the Board.


                                      B-9



                        ARTICLE VI - RECORDS AND REPORTS

      6.1      MAINTENANCE AND INSPECTION OF RECORDS.

      The corporation shall, either at its principal executive office or at such
place or places as  designated by the Board,  keep a record of its  stockholders
listing  their  names and  addresses  and the number and class of shares held by
each stockholder,  a copy of these bylaws as amended to date,  accounting books,
and other records.

      Any stockholder of record, in person or by attorney or other agent, shall,
upon  written  demand  under oath  stating the purpose  thereof,  have the right
during the usual  hours for  business  to inspect  for any  proper  purpose  the
corporation's stock ledger, a list of its stockholders,  and its other books and
records and to make copies or extracts therefrom.  A proper purpose shall mean a
purpose reasonably related to such person's interest as a stockholder.  In every
instance  where an  attorney or other agent is the person who seeks the right to
inspection, the demand under oath shall be accompanied by a power of attorney or
such other  writing  that  authorizes  the  attorney or other agent so to act on
behalf of the  stockholder.  The  demand  under oath  shall be  directed  to the
corporation at its registered  office in Delaware or at its principal  executive
office.

      6.2      INSPECTION BY DIRECTORS.

      Any  director  shall have the right to  examine  the  corporation's  stock
ledger,  a list of its  stockholders,  and its  other  books and  records  for a
purpose  reasonably  related to his or her position as a director.  The Court of
Chancery is hereby vested with the exclusive jurisdiction to determine whether a
director is entitled to the inspection sought. The Court may summarily order the
corporation to permit the director to inspect any and all books and records, the
stock ledger, and the stock list and to make copies or extracts  therefrom.  The
Court may, in its  discretion,  prescribe any  limitations  or  conditions  with
reference to the inspection, or award such other and further relief as the Court
may deem just and proper.

                          ARTICLE VII - GENERAL MATTERS

      7.1      EXECUTION OF CORPORATE CONTRACTS AND INSTRUMENTS.

      The Board, except as otherwise provided in these bylaws, may authorize any
officer or officers,  or agent or agents,  to enter into any contract or execute
any instrument in the name of and on behalf of the  corporation;  such authority
may be general or  confined  to  specific  instances.  Unless so  authorized  or
ratified  by the Board or within the agency  power of an  officer,  no  officer,
agent or employee  shall have any power or authority to bind the  corporation by
any  contract or  engagement  or to pledge its credit or to render it liable for
any purpose or for any amount.

      7.2      STOCK CERTIFICATES; PARTLY PAID SHARES.

      The  shares  of the  corporation  shall be  represented  by  certificates,
provided that the Board may provide by resolution  or  resolutions  that some or
all of any or all classes or series of its stock shall be uncertificated shares.
Any such resolution shall not apply to shares represented by a certificate until
such certificate is surrendered to the corporation. Notwithstanding the adoption
of such a  resolution  by the  Board,  every  holder  of  stock  represented  by
certificates  and upon request  every holder of  uncertificated  shares shall be
entitled to have a certificate  signed by, or in the name of the  corporation by
the  chairperson  or   vice-chairperson  of  the  Board,  or  the  president  or
vice-president, and by the treasurer or an assistant treasurer, or the secretary
or an assistant secretary of such corporation  representing the number of shares
registered in certificate  form. Any or all of the signatures on the certificate
may be a facsimile.  In case any officer,  transfer  agent or registrar  who has
signed or whose  facsimile  signature  has been  placed upon a  certificate  has
ceased to be such officer,  transfer agent or registrar  before such certificate
is issued,  it may be issued by the  corporation  with the same  effect as if he
were such officer, transfer agent or registrar at the date of issue.


                                      B-10



      The  corporation  may issue the whole or any part of its  shares as partly
paid and  subject  to call for the  remainder  of the  consideration  to be paid
therefor.  Upon the face or back of each stock  certificate  issued to represent
any such partly paid shares,  upon the books and records of the  corporation  in
the  case  of  uncertificated  partly  paid  shares,  the  total  amount  of the
consideration  to be paid  therefor and the amount paid thereon shall be stated.
Upon the declaration of any dividend on fully paid shares, the corporation shall
declare a dividend upon partly paid shares of the same class,  but only upon the
basis of the percentage of the consideration actually paid thereon.

      7.3      SPECIAL DESIGNATION ON CERTIFICATES.

      If the  corporation is authorized to issue more than one class of stock or
more than one  series of any  class,  then the  powers,  the  designations,  the
preferences, and the relative,  participating,  optional or other special rights
of each class of stock or series thereof and the qualifications,  limitations or
restrictions  of such  preferences  and/or  rights shall be set forth in full or
summarized on the face or back of the  certificate  that the  corporation  shall
issue to  represent  such  class or series of stock;  provided,  however,  that,
except  as  otherwise  provided  in  Section  202 of the  DGCL,  in  lieu of the
foregoing  requirements  there  may be set  forth  on the  face  or  back of the
certificate  that the corporation  shall issue to represent such class or series
of stock a statement that the  corporation  will furnish  without charge to each
stockholder who so requests the powers, the designations,  the preferences,  and
the relative,  participating,  optional or other special rights of each class of
stock or series thereof and the  qualifications,  limitations or restrictions of
such preferences and/or rights.

      7.4      LOST CERTIFICATES.

      Except as provided in this  Section  7.5, no new  certificates  for shares
shall be issued to replace a previously issued  certificate unless the latter is
surrendered to the  corporation  and cancelled at the same time. The corporation
may issue a new  certificate of stock or  uncertificated  shares in the place of
any certificate  theretofore  issued by it, alleged to have been lost, stolen or
destroyed,  and the  corporation  may require  the owner of the lost,  stolen or
destroyed  certificate,  or such  owner's  legal  representative,  to  give  the
corporation a bond sufficient to indemnify it against any claim that may be made
against it on account of the  alleged  loss,  theft or  destruction  of any such
certificate or the issuance of such new certificate or uncertificated shares.

      7.5      CONSTRUCTION; DEFINITIONS.

      Unless the context requires otherwise,  the general  provisions,  rules of
construction  and definitions in the DGCL shall govern the construction of these
bylaws.  Without limiting the generality of this provision,  the singular number
includes  the plural,  the plural  number  includes the  singular,  and the term
"person" includes both a corporation and a natural person.

      7.6      DIVIDENDS.

      The Board,  subject to any restrictions  contained in either (i) the DGCL,
or (ii) the certificate of incorporation, may declare and pay dividends upon the
shares of its capital stock.  Dividends may be paid in cash, in property,  or in
shares of the corporation's capital stock.

      The  Board  may  set  apart  out of any of the  funds  of the  corporation
available  for  dividends a reserve or reserves  for any proper  purpose and may
abolish any such  reserve.  Such  purposes  shall  include but not be limited to
equalizing dividends,  repairing or maintaining any property of the corporation,
and meeting contingencies.

      7.7      FISCAL YEAR.

      The fiscal year of the  corporation  shall be fixed by  resolution  of the
Board and may be changed by the Board.


                                      B-11



      7.8      SEAL.

      The  corporation  may adopt a corporate  seal,  which shall be adopted and
which may be altered by the Board. The corporation may use the corporate seal by
causing it or a  facsimile  thereof to be  impressed  or affixed or in any other
manner reproduced.

      7.9      TRANSFER OF STOCK.

      Upon surrender to the corporation or the transfer agent of the corporation
of a certificate  for shares duly endorsed or accompanied by proper  evidence of
succession,  assignation  or authority to transfer,  it shall be the duty of the
corporation to issue a new  certificate to the person entitled  thereto,  cancel
the old certificate, and record the transaction in its books.

      7.10     STOCK TRANSFER AGREEMENTS.

      The  corporation  shall have power to enter into and perform any agreement
with any  number  of  stockholders  of any one or more  classes  of stock of the
corporation  to restrict the transfer of shares of stock of the  corporation  of
any one or more classes owned by such  stockholders in any manner not prohibited
by the DGCL.

      7.11     REGISTERED STOCKHOLDERS.

      The corporation:

           (i) shall be entitled to recognize  the  exclusive  right of a person
      registered on its books as the owner of shares to receive dividends and to
      vote as such owner;

           (ii) shall be entitled to hold liable for calls and  assessments  the
      person registered on its books as the owner of shares; and

           (iii) shall not be bound to recognize any equitable or other claim to
      or interest in such share or shares on the part of another person, whether
      or not it shall have express or other notice thereof,  except as otherwise
      provided by the laws of Delaware.

      7.12     WAIVER OF NOTICE.

      Whenever  notice is required to be given under any  provision of the DGCL,
the certificate of incorporation  or these bylaws,  a written waiver,  signed by
the person  entitled to notice,  or a waiver by electronic  transmission  by the
person  entitled  to notice,  whether  before or after the time of the event for
which notice is to be given, shall be deemed equivalent to notice. Attendance of
a person  at a meeting  shall  constitute  a waiver  of notice of such  meeting,
except when the person attends a meeting for the express purpose of objecting at
the beginning of the meeting,  to the  transaction  of any business  because the
meeting  is  not  lawfully  called  or  convened.  Neither  the  business  to be
transacted  at,  nor the  purpose  of, any  regular  or  special  meeting of the
stockholders  need be specified in any written waiver of notice or any waiver by
electronic  transmission  unless so required by the certificate of incorporation
or these bylaws.

                ARTICLE VIII - NOTICE BY ELECTRONIC TRANSMISSION

      8.1      NOTICE BY ELECTRONIC TRANSMISSION.

      Without  limiting  the  manner  by  which  notice  otherwise  may be given
effectively  to   stockholders   pursuant  to  the  DGCL,  the   certificate  of
incorporation  or  these  bylaws,  any  notice  to  stockholders  given  by  the
corporation under any provision of the DGCL, the certificate of incorporation or
these bylaws shall be  effective if given by a form of  electronic  transmission
consented to by the  stockholder  to whom the notice is given.  Any such consent
shall be revocable by the stockholder by written notice to the corporation.  Any
such consent shall be deemed revoked if:

           (i) the  corporation is unable to deliver by electronic  transmission
      two  consecutive  notices given by the corporation in accordance with such
      consent; and


                                      B-12



           (ii) such  inability  becomes  known to the secretary or an assistant
      secretary of the  corporation  or to the transfer  agent,  or other person
      responsible for the giving of notice.

However,  the inadvertent  failure to treat such inability as a revocation shall
not invalidate any meeting or other action.

      Any notice  given  pursuant  to the  preceding  paragraph  shall be deemed
given:

           (i) if by facsimile  telecommunication,  when directed to a number at
      which the stockholder has consented to receive notice;

           (ii) if by  electronic  mail,  when  directed to an  electronic  mail
      address at which the stockholder has consented to receive notice;

           (iii) if by a posting on an electronic network together with separate
      notice to the stockholder of such specific posting,  upon the later of (A)
      such posting and (B) the giving of such separate notice; and

           (iv) if by any other form of electronic  transmission,  when directed
      to the stockholder.

      An affidavit of the secretary or an assistant secretary or of the transfer
agent or other agent of the corporation that the notice has been given by a form
of  electronic  transmission  shall,  in the  absence of fraud,  be prima  facie
evidence of the facts stated therein.

      8.2      DEFINITION OF ELECTRONIC TRANSMISSION.

      An "electronic transmission" means any form of communication, not directly
involving the physical  transmission of paper, that creates a record that may be
retained,  retrieved,  and  reviewed  by a  recipient  thereof,  and that may be
directly  reproduced  in paper form by such a  recipient  through  an  automated
process.

      8.3      INAPPLICABILITY.

      Notice by a form of  electronic  transmission  shall not apply to Sections
164, 296, 311, 312 or 324 of the DGCL.

                          ARTICLE IX - INDEMNIFICATION

      9.1      INDEMNIFICATION OF DIRECTORS AND OFFICERS

      The corporation  shall indemnify and hold harmless,  to the fullest extent
permitted by the DGCL as it presently  exists or may  hereafter be amended,  any
director or officer of the corporation who was or is made or is threatened to be
made a party or is otherwise involved in any action, suit or proceeding, whether
civil,  criminal,  administrative or investigative (a "Proceeding") by reason of
the  fact  that  he or  she,  or a  person  for  whom  he or she  is  the  legal
representative,  is or  was a  director,  officer,  employee  or  agent  of  the
corporation  or is or  was  serving  at the  request  of  the  corporation  as a
director, officer, employee or agent of another corporation or of a partnership,
joint venture,  trust,  enterprise or non-profit entity,  including service with
respect to employee  benefit plans,  against all liability and loss suffered and
expenses  reasonably  incurred  by such  person  in  connection  with  any  such
Proceeding.  The  corporation  shall  be  required  to  indemnify  a  person  in
connection with a Proceeding initiated by such person only if the Proceeding was
authorized by the Board.

      9.2      INDEMNIFICATION OF OTHERS

      The  corporation  shall have the power to indemnify and hold harmless,  to
the extent  permitted by applicable law as it presently  exists or may hereafter
be amended,  any employee or agent of the  corporation  who was or is made or is
threatened  to be made a party or is  otherwise  involved in any  Proceeding  by
reason of the fact that he or she,  or a person  for whom he or she is the legal
representative,  is or was an employee or agent of the  corporation or is or was
serving at the request of the  corporation as a director,  officer,  employee or
agent  of  another  corporation  or  of a  partnership,  joint  venture,  trust,


                                      B-13


enterprise  or  non-profit  entity,  including  service with respect to employee
benefit plans,  against all liability and loss suffered and expenses  reasonably
incurred by such person in connection with any such Proceeding.

      9.3      PREPAYMENT OF EXPENSES

      The corporation shall pay the expenses incurred by any officer or director
of the corporation,  and may pay the expenses  incurred by any employee or agent
of the  corporation,  in  defending  any  Proceeding  in  advance  of its  final
disposition;  provided,  however,  that the  payment of  expenses  incurred by a
person in advance of the final  disposition of the Proceeding shall be made only
upon receipt of an undertaking by the person to repay all amounts advanced if it
should  be  ultimately  determined  that  the  person  is  not  entitled  to  be
indemnified under this Article IX or otherwise.

      9.4      DETERMINATION; CLAIM

      If a claim for  indemnification  or payment of expenses under this Article
IX is not paid in full within sixty days after a written claim therefor has been
received by the  corporation  the  claimant  may file suit to recover the unpaid
amount of such claim and, if successful  in whole or in part,  shall be entitled
to be paid the  expense  of  prosecuting  such  claim.  In any such  action  the
corporation  shall have the burden of proving that the claimant was not entitled
to the requested indemnification or payment of expenses under applicable law.

      9.5      NON-EXCLUSIVITY OF RIGHTS

      The  rights  conferred  on any  person  by this  Article  IX shall  not be
exclusive of any other  rights  which such person may have or hereafter  acquire
under any statute, provision of the certificate of incorporation,  these bylaws,
agreement, vote of stockholders or disinterested directors or otherwise.

      9.6      INSURANCE

      The  corporation  may  purchase  and  maintain  insurance on behalf of any
person who is or was a director,  officer, employee or agent of the corporation,
or is or was serving at the request of the  corporation as a director,  officer,
employee or agent of another corporation,  partnership,  joint venture, trust or
other enterprise  against any liability asserted against him or her and incurred
by him or her in any such capacity, or arising out of his or her status as such,
whether  or not the  corporation  would have the power to  indemnify  him or her
against such liability under the provisions of the DGCL.

      9.7      OTHER INDEMNIFICATION

      The corporation's  obligation,  if any, to indemnify any person who was or
is serving at its request as a director,  officer,  employee or agent of another
corporation,  partnership, joint venture, trust, enterprise or non-profit entity
shall be reduced by any amount such person may collect as  indemnification  from
such  other  corporation,  partnership,  joint  venture,  trust,  enterprise  or
non-profit enterprise.

      9.8      AMENDMENT OR REPEAL

      Any repeal or modification of the foregoing  provisions of this Article IX
shall not adversely  affect any right or  protection  hereunder of any person in
respect of any act or  omission  occurring  prior to the time of such  repeal or
modification."

                             ARTICLE X - AMENDMENTS

      These bylaws may be adopted,  amended or repealed by the affirmative  vote
of the  holders  of at  least  66.67%  of the  shares  of  capital  stock of the
corporation  issued  and  outstanding  and  entitled  to  vote.   However,   the
corporation may, in its certificate of incorporation, confer the power to adopt,
amend or repeal  these bylaws upon the  directors.  The fact that such power has
been so conferred upon the directors  shall not divest the  stockholders  of the
power, nor limit their power to adopt, amend or repeal these bylaws as set forth
above.


                                      B-14



                            NANOMETRICS INCORPORATED

                       CERTIFICATE OF AMENDMENT OF BYLAWS

      The  undersigned  hereby  certifies  that he or she is the  duly  elected,
qualified,  and  acting  Secretary  of  Nanometrics  Incorporated,   a  Delaware
corporation and that the foregoing bylaws, comprising seventeen (17) pages, were
amended and restated on , 2005 by the corporation's board of directors.

      IN WITNESS WHEREOF,  the undersigned has hereunto set his or her hand this
day of , 2005.
 

                             ---------------------------------------------------
                             Secretary


                                      B-15




                                  APPENDIX C


                            NANOMETRICS INCORPORATED

                           2005 EQUITY INCENTIVE PLAN

     1. Purposes of the Plan. The purposes of this Plan are:

         o   to attract and retain the best available personnel for positions of
             substantial responsibility,

         o   to provide additional incentive to Service Providers, and

         o   to promote the success of the Company's business.

         Awards  granted  under  the  Plan  may  be  Incentive   Stock  Options,
Nonstatutory  Stock  Options,   Restricted  Stock,  Stock  Appreciation  Rights,
Performance   Shares  and   Restricted   Stock  Units,   as  determined  by  the
Administrator at the time of grant.

     2. Definitions. As used herein, the following definitions shall apply:

         (a)  "Administrator"  means the Board or any of its Committees as shall
be administering the Plan, in accordance with Section 4 of the Plan.

         (b) "Annual Revenue" means the Company's or a business unit's net sales
for the Fiscal Year, determined in accordance with generally accepted accounting
principles.

         (c)  "Applicable   Laws"  means  the   requirements   relating  to  the
administration  of equity  compensation  plans under U.S. state  corporate laws,
U.S.  federal  and state  securities  laws,  the Code,  any  stock  exchange  or
quotation  system  on  which  the  Common  Stock is  listed  or  quoted  and the
applicable laws of any other country or  jurisdiction  where Awards are, or will
be, granted under the Plan.

         (d) "Award" means, individually or collectively, a grant under the Plan
of Options,  Restricted Stock, Stock Appreciation Rights,  Performance Shares or
Restricted Stock Units.

         (e) "Award Agreement" means the written or electronic agreement setting
forth the terms and provisions  applicable to each Award granted under the Plan.
The Award Agreement is subject to the terms and conditions of the Plan.

         (f) "Awarded Stock" means the Common Stock subject to an Award.

         (g) "Board" means the Board of Directors of the Company.


                                      C-1



         (h)  "Cash  Position"  means  the  Company's  level  of cash  and  cash
equivalents.

         (i) "Change in Control"  means the  occurrence  of any of the following
events, in one or a series of related transactions:

             (i) any "person," as such term is used in Sections  13(d) and 14(d)
of the Exchange  Act,  other than the Company,  a subsidiary of the Company or a
Company  employee  benefit  plan,  including  any trustee of such plan acting as
trustee,  is or becomes the  "beneficial  owner" (as defined in Rule 13d-3 under
the  Exchange  Act),  directly  or  indirectly,  of  securities  of the  Company
representing  fifty  percent  (50%) or more of the combined  voting power of the
Company's then outstanding securities entitled to vote generally in the election
of directors; or

             (ii) the  consummation of a merger or  consolidation of the Company
or any direct or indirect  subsidiary of the Company with any other corporation,
other than a merger or consolidation which would result in the voting securities
of the Company  outstanding  immediately  prior thereto  continuing to represent
(either by remaining outstanding or by being converted into voting securities of
the  surviving  entity) at least fifty  percent  (50%) of the total voting power
represented  by the voting  securities of the Company or such  surviving  entity
outstanding immediately after such merger or consolidation; or

             (iii)  the  sale  or   disposition   by  the   Company  of  all  or
substantially all the Company's assets; or

             (iv) a change in the composition of the Board, as a result of which
fewer than a majority  of the  directors  are  Incumbent  Directors.  "Incumbent
Directors" shall mean directors who either (A) are Directors as of the date this
Plan is approved by the Board, or (B) are elected, or nominated for election, to
the Board with the  affirmative  votes of at least a majority  of the  Incumbent
Directors  and whose  election  or  nomination  was not in  connection  with any
transaction  described in (i) or (ii) above or in  connection  with an actual or
threatened proxy contest relating to the election of directors of the Company.

         (j) "Code" means the Internal Revenue Code of 1986, as amended.

         (k) "Committee"  means a committee of Directors  appointed by the Board
in accordance with Section 4 of the Plan.

         (l) "Common Stock" means the common stock of the Company.

         (m) "Company" means Nanometrics Incorporated, a California corporation.

         (n) "Consultant" means any person, including an advisor, engaged by the
Company or a Parent or Subsidiary to render  services and who is compensated for
such services.

                                      C-2



         (o) "Continuous  Status as a Service Provider" means the absence of any
interruption or termination of the employment or service  relationship  with the
Company or any Subsidiary.  Continuous Status as a Service Provider shall not be
considered  interrupted in the case of (i) medical leave, military leave, family
leave, or any other leave of absence approved by the Administrator, provided, in
each case,  that such leave does not result in termination of the employment and
service  relationship  with the Company or any  Subsidiary,  as the case may be,
under  the terms of the  respective  Company  policy  for such  leave;  however,
vesting  may be  tolled  while a Service  Provider  is on an  approved  leave of
absence under the terms of the respective Company policy for such leave; or (ii)
in the case of  transfers  between  locations  of the  Company  or  between  the
Company,  its  Parent or any  Subsidiary,  or any  successor.  For  purposes  of
Incentive  Stock  Options,   no  such  leave  may  exceed  ninety  days,  unless
reemployment upon expiration of such leave is guaranteed by statute or contract.
If reemployment upon expiration of a leave of absence approved by the Company is
not so  guaranteed,  then three (3) months  following the 91st day of such leave
any Incentive Stock Option held by the Participant  shall cease to be treated as
an  Incentive  Stock  Option  and  shall  be  treated  for  tax  purposes  as  a
Nonstatutory Stock Option.

         (p) "Director" means a member of the Board.

         (q)  "Disability"  means total and  permanent  disability as defined in
Section 22(e)(3) of the Code.

         (r) "Dividend Equivalent" means a credit,  payable in cash, made at the
discretion of the  Administrator,  to the account of a Participant  in an amount
equal to the cash dividends  paid on one Share for each Share  represented by an
Award held by such Participant.

         (s)  "Earnings  Per  Share"  means as to any  Performance  Period,  the
Company's or a business unit's Net Income,  divided by a weighted average number
of common  shares  outstanding  and dilutive  common  equivalent  shares  deemed
outstanding,   determined  in  accordance  with  generally  accepted  accounting
principles.

         (t)  "Employee"  means any person,  including  Officers and  Directors,
employed  by the Company or any Parent or  Subsidiary  of the  Company.  Neither
service as a Chairman nor as a Director  nor payment of a director's  fee by the
Company shall be sufficient to constitute "employment" by the Company.

         (u)  "Exchange  Act"  means the  Securities  Exchange  Act of 1934,  as
amended.

         (v)  "Exchange  Program"  means a program  under which (i)  outstanding
Awards are  surrendered  or  cancelled  in exchange  for Awards of the same type
(which  may have  lower  exercise  prices  and  different  terms),  Awards  of a
different  type,  and/or cash,  and/or (ii) the exercise price of an outstanding
Award is reduced.  The terms and  conditions  of any  Exchange  Program  will be
determined by the Administrator in its sole discretion.

                                      C-3



         (w) "Fair  Market  Value"  means,  as of any date,  the value of Common
Stock determined as follows:

             (i) If the Common Stock is listed on any established stock exchange
or a national market system,  including  without  limitation the Nasdaq National
Market or The Nasdaq SmallCap Market of The Nasdaq Stock Market, its Fair Market
Value shall be the closing sales price for such stock (or the closing bid, if no
sales were  reported) as quoted on such  exchange or system,  on the last market
trading day prior to the date of  determination,  as reported in The Wall Street
Journal or such other source as the Administrator deems reliable;

             (ii) If the  Common  Stock  is  regularly  quoted  by a  recognized
securities dealer but selling prices are not reported,  the Fair Market Value of
a Share of Common  Stock  shall be the mean  between  the high bid and low asked
prices for the Common Stock on the last market  trading day prior to the date of
determination; or

             (iii) In the absence of an established market for the Common Stock,
the Fair Market Value shall be determined in good faith by the Administrator.

         (x) "Fiscal Year" means a fiscal year of the Company.

         (y) "Individual  Performance Objective" means as to a Participant,  the
objective and measurable  goals set by a "management by objectives"  process and
approved by the Committee (in its discretion).

         (z) "Incentive  Stock Option" means an Option intended to qualify as an
incentive  stock  option  within the  meaning of Section 422 of the Code and the
regulations   promulgated   thereunder  and  is  expressly   designated  by  the
Administrator at the time of grant as an incentive stock option.

         (aa)  "Marketing  and Sales Expenses as a Percentage of Sales" means as
to any  Performance  Period,  the Company's or a business  unit's  marketing and
sales expenses  stated as a percentage of sales,  determined in accordance  with
generally accepted  accounting  principles. 

         (bb) "Net Income as a Percentage of Sales" means as to any  Performance
Period,  the Company's or a business unit's Net Income stated as a percentage of
sales, determined in accordance with generally accepted accounting principles.

         (cc) "Net Income" means as to any Performance  Period, the income after
taxes of the Company or a business unit  determined in accordance with generally
accepted  accounting  principles,  provided  that prior to the  beginning of the
Performance  Period,  the  Committee  shall  determine  whether any  significant
item(s)  shall be included or excluded from the  calculation  of Net Income with
respect to one or more Participants.

         (dd) "Nonstatutory Stock Option" means an Option that by its terms does
not qualify or is not intended to qualify as an Incentive Stock Option.

         (ee)  "Officer"  means a person who is an officer of the Company within
the  meaning  of Section 16 of the  Exchange  Act and the rules and  regulations
promulgated thereunder.

                                       C-4



         (ff) "Operating Cash Flow" means the Company's or a business unit's sum
of Net Income plus depreciation and amortization less capital  expenditures plus
changes in working capital comprised of accounts receivable,  inventories, other
current assets,  trade accounts  payable,  accrued  expenses,  product warranty,
advance payments from customers and long-term  accrued  expenses,  determined in
accordance with generally acceptable accounting principles.

         (gg) "Operating Income" means the Company's or a business unit's income
from  operations  determined in accordance  with generally  accepted  accounting
principles.  

         (hh) "Outside Director" means a Director who is not an Employee.

         (ii) "Option" means a stock option granted pursuant to the Plan.

         (jj)  "Participant"  means the holder of an  outstanding  Award granted
under the Plan.

         (kk) "Parent"  means a "parent  corporation,"  whether now or hereafter
existing, as defined in Section 424(e) of the Code.

         (ll)  "Performance  Goals"  means the  goal(s)  (or  combined  goal(s))
determined  by  the  Committee  (in  its  discretion)  to  be  applicable  to  a
Participant  with  respect to an Award.  As  determined  by the  Committee,  the
Performance  Goals  applicable  to an Award may provide for a targeted  level or
levels of achievement  using one or more of the following  measures:  (a) Annual
Revenue, (b) Cash Position,  (c) Earnings Per Share, (d) Individual  Performance
Objectives,  (e) Marketing and Sales Expenses as a Percentage of Sales,  (f) Net
Income as a Percentage of Sales,  (g) Net Income,  (h) Operating  Cash Flow, (i)
Operating  Income,  (j)  Return on Assets,  (k) Return on Equity,  (l) Return on
Sales, and (m) Total Shareholder  Return.  The Performance Goals may differ from
Participant  to  Participant  and  from  Award to  Award.  The  Committee  shall
appropriately  adjust any evaluation of performance  under a Performance Goal to
exclude (i) any  extraordinary  non-recurring  items as described in  Accounting
Principles  Board Opinion No. 30 and/or in management's  discussion and analysis
of financial  conditions  and results of  operations  appearing in the Company's
annual report to shareholders for the applicable year, or (ii) the effect of any
changes in accounting  principles  affecting the Company's or a business  units'
reported  results.  Any criteria  used may be measured,  as  applicable,  (i) in
absolute terms, (ii) in relative terms  (including,  but not limited to, passage
of time  and/or  against  another  company or  companies),  (iii) on a per-share
basis,  (iv) against the  performance of the Company as a whole or of a business
unit of the  Company,  and/or (v) to the extent not  otherwise  specified by the
definition of the Performance Goal, on a pre-tax or after-tax basis.


         (mm)  "Performance  Period" means the time period of any Fiscal Year or
such longer period as determined by the Committee in its sole discretion  during
which the performance objectives must be met.

         (nn)  "Performance  Share" means a performance share Award granted to a
Participant pursuant to Section 14.

                                      C-5



         (oo) "Period of Restriction" means the period during which the transfer
of Shares of Restricted  Stock are subject to  restrictions  and therefore,  the
Shares are subject to a substantial risk of forfeiture. Such restrictions may be
based on the  passage of time  (including  the  continuation  of  employment  or
service), the achievement of target levels of performance,  or the occurrence of
other events as determined by the Administrator.

         (pp) "Plan" means this 2005 Equity Incentive Plan.

         (qq)  "Restricted  Stock" means shares of Common Stock granted pursuant
to Section 12 of the Plan, as evidenced by an Award Agreement.

         (rr) "Restricted Stock Unit" means a bookkeeping entry  representing an
amount equal to the Fair Market Value of one Share,  granted pursuant to Section
13. Each Restricted  Stock Unit represents an unfunded and unsecured  obligation
of the  Company.  

         (ss) "Return on Assets" means the percentage  equal to the Company's or
a business unit's  Operating Income before  incentive  compensation,  divided by
average net Company or business  unit,  as  applicable,  assets,  determined  in
accordance with generally accepted accounting principles.

         (tt) "Return on Equity" means the percentage equal to the Company's Net
Income divided by average  shareholder's  equity,  determined in accordance with
generally accepted accounting principles.

         (uu) "Return on Sales" means the percentage equal to the Company's or a
business unit's Operating Income before incentive  compensation,  divided by the
Company's  or  the  business  unit's,  as  applicable,  revenue,  determined  in
accordance with generally accepted accounting principles.

         (vv) "Rule 16b-3" means Rule 16b-3 of the Exchange Act or any successor
to Rule 16b-3,  as in effect when  discretion is being exercised with respect to
the Plan.

         (ww) "Section 16(b)" means Section 16(b) of the Exchange Act.

         (xx) "Service Provider" means an Employee, Director or Consultant.

         (yy)  "Share"  means  a share  of the  Common  Stock,  as  adjusted  in
accordance with Section 17 of the Plan.

         (zz) "Stock  Appreciation  Right" or "SAR"  means a stock  appreciation
right  granted  pursuant  to  Section  10  below. 

         (aaa)  "Subsidiary"  means a "subsidiary  corporation",  whether now or
hereafter existing, as defined in Section 424(f) of the Code.

                                      C-6



         (bbb) "Total  Shareholder  Return"  means the total  return  (change in
share price plus  reinvestment  of any  dividends)  of a share of the  Company's
common stock.

     3. Stock  Subject to the Plan.  Subject to the  provisions of Section 17 of
the Plan, the maximum aggregate number of Shares which may issued under the Plan
is 1,200,000 Shares, plus an annual increase to be added on the first day of the
Company's  Fiscal Year for three years  beginning  in 2006 and ending  after the
2008 annual increase equal to the least of (i) 3% of the  outstanding  Shares on
such  date or  (ii)  an  amount  determined  by the  Board.  The  Shares  may be
authorized, but unissued, or reacquired Common Stock.

     Any  Shares  subject  to  Options  or SARs  shall be  counted  against  the
numerical limits of this Section 3 as one Share for every Share subject thereto.
Any  Shares of  Restricted  Stock or Shares  subject  to  Performance  Shares or
Restricted  Stock Units with a per share or unit purchase  price lower than 100%
of Fair Market Value on the date of grant shall be counted against the numerical
limits of this Section 3 as two Shares for every one Share subject  thereto.  To
the extent that a Share that was subject to an Award that  counted as two Shares
against the Plan reserve  pursuant to the  preceding  sentence is recycled  back
into the Plan  under the next  paragraph  of this  Section  3, the Plan shall be
credited with two Shares.

     If an Award expires or becomes  unexercisable without having been exercised
in full or is surrendered  pursuant to an Exchange Program,  or, with respect to
Options,  Restricted  Stock,  Performance  Shares or Restricted  Stock Units, is
forfeited to or  repurchased  by the  Company,  the  unpurchased  Shares (or for
Awards other than Options and SARs, the forfeited or  repurchased  shares) which
were subject  thereto shall become  available for future grant or sale under the
Plan (unless the Plan has  terminated).  With respect to SARs,  Shares  actually
issued  pursuant to an SAR as well as the Shares  withheld  to pay the  exercise
price shall cease to be available under the Plan. Shares that have actually been
issued  under the Plan  under any Award  shall not be  returned  to the Plan and
shall not become  available for future  distribution  under the Plan;  provided,
however,  that if Shares of Restricted Stock,  Performance  Shares or Restricted
Stock Units are  repurchased by the Company at their original  purchase price or
are  forfeited to the Company,  such Shares  shall become  available  for future
grant under the Plan.  Shares used to pay the exercise price of an Option or the
purchase price of Restricted  Stock shall not become  available for future grant
or sale under the Plan. Shares used to satisfy tax withholding obligations shall
not become  available  for future grant or sale under the Plan. To the extent an
Award under the Plan is paid out in cash rather  than stock,  such cash  payment
shall not reduce the number of Shares available for issuance under the Plan. Any
payout of Dividend Equivalents, because they are payable only in cash, shall not
reduce the number of Shares  available for issuance under the Plan.  Conversely,
any forfeiture of Dividend  Equivalents  shall not increase the number of Shares
available for issuance under the Plan.

     4. Administration of the Plan.

         (a) Procedure.

             (i)  Multiple   Administrative   Bodies.  The  Board  or  different
Committees with respect to different groups of Service  Providers may administer
the Plan.

                                      C-7



             (ii)  Section  162(m).   To  the  extent  that  the   Administrator
determines  it  to  be  desirable  to  qualify  Awards   granted   hereunder  as
"performance-based  compensation"  within the  meaning of Section  162(m) of the
Code,  the Plan shall be  administered  by a Committee  of two or more  "outside
directors" within the meaning of Section 162(m) of the Code.

             (iii) Rule 16b-3. To the extent  desirable to qualify  transactions
hereunder as exempt under Rule 16b-3,  the transactions  contemplated  hereunder
shall be structured to satisfy the  requirements for exemption under Rule 16b-3.

             (iv) Other  Administration.  Other than as provided above, the Plan
shall be administered by (a) the Board or (b) a Committee, which committee shall
be constituted  to satisfy  Applicable  Laws.  

         (b) Powers of the Administrator. Subject to the provisions of the Plan,
and in the case of a Committee,  subject to the specific duties delegated by the
Board to such  Committee,  the  Administrator  shall have the authority,  in its
discretion:

             (i) to determine the Fair Market Value;

             (ii) to select the Service  Providers to whom Awards may be granted
hereunder;

             (iii)  to  determine  the  number  of  shares  of  Common  Stock or
equivalent units to be covered by each Award granted hereunder;

             (iv) to approve forms of Award Agreement for use under the Plan;

             (v) to determine the terms and conditions,  not  inconsistent  with
the terms of the Plan, of any Award granted hereunder. Such terms and conditions
include, but are not limited to, the exercise price, the date of grant, the time
or times when Awards may be  exercised  (or are  earned)  (which may be based on
performance  criteria),   any  vesting  acceleration  or  waiver  of  forfeiture
restrictions,  and any  restriction  or  limitation  regarding  any Award or the
Shares   relating   thereto,   based  in  each  case  on  such  factors  as  the
Administrator, in its sole discretion, shall determine;

             (vi) to institute an Exchange Program;  however,  the Administrator
may not institute an Exchange Program without shareholder approval.

             (vii) to construe  and  interpret  the terms of the Plan and Awards
granted pursuant to the Plan;

             (viii) to  prescribe,  amend  and  rescind  rules  and  regulations
relating to the Plan,  including  rules and  regulations  relating to  sub-plans
established  for the  purpose  of  satisfying  applicable  foreign  laws  and/or
qualifying for preferred tax treatment under foreign tax laws;

                                      C-8



             (ix) to modify or amend each Award (subject to Section 19(c) of the
Plan),  including  the  discretionary  authority to extend the  post-termination
exercisability  period of Options and SARs longer than is otherwise provided for
in the Plan;

             (x) to allow Participants to satisfy withholding tax obligations by
electing to have the Company  withhold from the Shares or cash to be issued upon
exercise of an Option, SAR or right to purchase Restricted Stock or upon vesting
or payout of another  Award,  that number of Shares or cash having a Fair Market
Value equal to the minimum amount required to be withheld. The Fair Market Value
of the Shares to be withheld  shall be determined on the date that the amount of
tax to be withheld is to be  determined.  All elections by a Participant to have
Shares or cash  withheld for this  purpose  shall be made in such form and under
such conditions as the Administrator may deem necessary or advisable;

             (xi) to  determine  whether  Awards will be adjusted  for  Dividend
Equivalents;

             (xii) to  authorize  any person to execute on behalf of the Company
any instrument  required to effect the grant of an Award  previously  granted by
the Administrator; and

             (xiii)  to  make  all  other  determinations  deemed  necessary  or
advisable for administering the Plan.

         (c) Effect of Administrator's Decision. The Administrator's  decisions,
determinations   and   interpretations   shall  be  final  and  binding  on  all
Participants and any other holders of Awards.

     5.  Eligibility.  Awards may be granted  to  Service  Providers;  provided,
however, that Incentive Stock Options may be granted only to Employees.

     6. No Employment Rights. Neither the Plan nor any Award shall confer upon a
Participant any right with respect to continuing the Participant's  relationship
as an Employee or other Service  Provider with the Company or its  Subsidiaries,
nor  shall  they  interfere  in any way  with  the  Participant's  right  or the
Company's  or  Subsidiary's  right,  as the  case  may  be,  to  terminate  such
relationship at any time, with or without cause.

     7. Code Section 162(m) Provisions.

         (a) Option and SAR Annual Share Limit. No Participant shall be granted,
in any Fiscal Year, Options and Stock Appreciation  Rights to purchase more than
500,000 Shares;  provided,  however,  that such limit shall be 250,000 Shares in
the Participant's first Fiscal Year of Company service.

         (b)  Restricted  Stock,  Performance  Share and  Restricted  Stock Unit
Annual Limit.  No Participant  shall be granted,  in any Fiscal Year,  more than
250,000 Shares in the aggregate of the following:  (i)  Restricted  Stock,  (ii)
Performance  Shares, or (iii) Restricted Stock Units;  provided,  however,  that
such limit shall be 125,000  Shares in the  Participant's  first  Fiscal Year of
Company service.

                                      C-9



         (c) Section 162(m) Performance Restrictions. For purposes of qualifying
grants of Restricted  Stock,  Performance  Shares or  Restricted  Stock Units as
"performance-based   compensation"   under  Section  162(m)  of  the  Code,  the
Administrator,   in  its  discretion,   may  set  restrictions  based  upon  the
achievement  of Performance  Goals.  The  Performance  Goals shall be set by the
Administrator  on or before the latest date permissible to enable the Restricted
Stock,   Performance   Shares  or   Restricted   Stock   Units  to   qualify  as
"performance-based  compensation"  under Section 162(m) of the Code. In granting
Restricted  Stock,  Performance  Shares  or  Restricted  Stock  Units  which are
intended to qualify under Section  162(m) of the Code, the  Administrator  shall
follow any  procedures  determined  by it from time to time to be  necessary  or
appropriate  to ensure  qualification  of the Award under Section  162(m) of the
Code (e.g., in determining the Performance Goals).

         (d) Changes in  Capitalization.  The numerical  limitations in Sections
7(a) and (b) shall be adjusted  proportionately in connection with any change in
the Company's capitalization as described in Section 17(a).

         (e) If an Award is  cancelled  in the same  Fiscal Year in which it was
granted (other than in connection with a transaction  described in Section 17 of
the Plan),  the cancelled  Award will be counted against the limits set forth in
subsections  (a) and (b) above.  For this purpose,  if the exercise  price of an
Option is reduced,  the  transaction  will be treated as a  cancellation  of the
Option and the grant of a new Option.

     8. Term of Plan.  Subject to Section 23 of the Plan,  the Plan will  become
effective upon its adoption by the Board.  It will continue in effect for a term
of ten (10) years unless terminated earlier under Section 19 of the Plan.

     9. Stock Options.

         (a) Type of  Option.  Each  Option  shall be  designated  in the  Award
Agreement as either an Incentive  Stock Option or a  Nonstatutory  Stock Option.
However,  not withstanding  such  designation,  to the extent that the aggregate
Fair Market Value of the Shares with respect to which  Incentive  Stock  Options
are exercisable  for the first time by the Participant  during any calendar year
(under all plans of the Company and any Parent or Subsidiary)  exceeds $100,000,
such Options shall be treated as  Nonstatutory  Stock  Options.  For purposes of
this Section  9(a),  Incentive  Stock Options shall be taken into account in the
order in which they were  granted.  The Fair Market Value of the Shares shall be
determined as of the time the Option with respect to such Shares is granted.

         (b)  Term.  The  term of each  Option  shall  be  stated  in the  Award
Agreement.  In the case of an Incentive Stock Option, the term shall be ten (10)
years  from the date of grant or such  shorter  term as may be  provided  in the
Award Agreement. Moreover, in the case of an Incentive Stock Option granted to a
Participant  who, at the time the Incentive Stock Option is granted,  owns stock
representing  more than ten percent (10%) of the total combined  voting power of

                                      C-10



all classes of stock of the Company or any Parent or Subsidiary, the term of the
Incentive  Stock  Option  shall be five (5) years from the date of grant or such
shorter term as may be provided in the Award Agreement.

         (c) Option Exercise Price and Consideration.

             (i) Exercise Price.  The per Share exercise price for the Shares to
be  issued  pursuant  to  exercise  of an  Option  will  be  determined  by  the
Administrator, subject to the following:

                   (1) In the case of an Incentive  Stock  Option  granted to an
Employee  who, at the time the  Incentive  Stock  Option is granted,  owns stock
representing  more than ten percent  (10%) of the voting power of all classes of
stock of the Company or any Parent or  Subsidiary,  the per Share exercise price
will be no less  than  110% of the Fair  Market  Value  per Share on the date of
grant.

                   (2) In the case of all other Options,  the per Share exercise
price will be no less than 100% of the Fair  Market  Value per Share on the date
of grant.

                   (3)  Notwithstanding  the  foregoing,  Options may be granted
with a per Share  exercise  price of less than 100% of the Fair Market Value per
Share on the date of grant pursuant to a merger or other corporate transaction.

             (ii) Waiting  Period and Exercise  Dates.  At the time an Option is
granted,  the Administrator  shall fix the period within which the Option may be
exercised and shall determine any conditions  which must be satisfied before the
Option may be exercised.

             (iii) Form of Consideration.  The Administrator shall determine the
acceptable form of consideration for exercising an Option,  including the method
of payment.  In the case of an Incentive Stock Option,  the Administrator  shall
determine the acceptable form of consideration at the time of grant.  Subject to
Applicable  Laws,  such  consideration  may consist  entirely of:

                   (1) cash;

                   (2) check;

                   (3) promissory note;

                   (4) other  Shares  which have a Fair Market Value on the date
of surrender  equal to the  aggregate  exercise  price of the Shares as to which
said Option shall be exercised and which meet the conditions  established by the
Administrator  to avoid adverse  accounting  consequences  (as determined by the
Administrator);

                                      C-11



                   (5)  consideration  received by the Company  under a cashless
exercise program implemented by the Company in connection with the Plan;

                   (6) a reduction in the amount of any Company liability to the
Participant,   including  any  liability   attributable  to  the   Participant's
participation  in  any   Company-sponsored   deferred  compensation  program  or
arrangement;

                   (7) any combination of the foregoing methods of payment;

                   (8) such other  consideration  and method of payment  for the
issuance of Shares to the extent permitted by Applicable Laws; or

                   (9) any combination of the foregoing methods of payment.

     10. Stock Appreciation Rights.

         (a) Grant of SARs.  Subject to the terms and  conditions of the Plan, a
SAR may be  granted to  Service  Providers  at any time and from time to time as
will be determined by the Administrator, in its sole discretion.

         (b) Number of Shares. The Administrator  will have complete  discretion
to determine the number of SARs granted to any Service Provider,  subject to the
limits set forth in Section 7.

         (c) Exercise Price and Other Terms. The  Administrator,  subject to the
provisions of the Plan, will have complete discretion to determine the terms and
conditions of SARs granted under the Plan.

         (d)  Exercise  of SARs.  SARs  will be  exercisable  on such  terms and
conditions as the Administrator, in its sole discretion, will determine.

         (e) SAR  Agreement.  Each  SAR  grant  will be  evidenced  by an  Award
Agreement  that  will  specify  the  exercise  price,  the term of the SAR,  the
conditions   of  exercise,   and  such  other  terms  and   conditions   as  the
Administrator, in its sole discretion, will determine.

         (f)  Expiration of SARs. An SAR granted under the Plan will expire upon
the date determined by the Administrator,  in its sole discretion, and set forth
in the Award Agreement;  provided, however, that no SAR will have a term of more
than ten (10) years fom the date of grant.

         (g) Payment of SAR Amount.  Upon exercise of an SAR, a Participant will
be  entitled to receive  payment  from the  Company in an amount  determined  by
multiplying:

             (i) The difference  between the Fair Market Value of a Share on the
date of exercise over the exercise price; times

             (ii)  The  number  of  Shares  with  respect  to  which  the SAR is
exercised.

                                      C-12




         (h) Form of Payment. The Company's obligation arising upon the exercise
of a SAR may be paid in Common Stock or in cash, or in any combination of Common
Stock and cash, as the  Administrator,  in its sole  discretion,  may determine.
Shares  issued  upon the  exercise of a SAR shall be valued at their Fair Market
Value as of the date of exercise.

     11. Exercise of Option or SAR.

         (a) Procedure for Exercise; Rights as a Shareholder.  Any Option or SAR
granted hereunder shall be exercisable according to the terms of the Plan and at
such times and under such conditions as determined by the  Administrator and set
forth in the Award Agreement. An Option may not be exercised for a fraction of a
Share.

     An Option or SAR shall be deemed exercised when the Company  receives:  (i)
written or electronic  notice of exercise (in  accordance  with the terms of the
Option or SAR) from the person  entitled to exercise the Option or SAR, and (ii)
full payment for the Shares with respect to which the Option is exercised.  Full
payment may consist of any consideration and method of payment authorized by the
Administrator  and permitted by the Award Agreement and the Plan.  Shares issued
upon exercise of an Option or SAR shall be issued in the name of the Participant
or, if requested by the  Participant,  in the name of the Participant and his or
her spouse.  Until the Shares are issued (as evidenced by the appropriate  entry
on the  books  of the  Company  or of a duly  authorized  transfer  agent of the
Company),  no  right to vote or  receive  dividends  or any  other  rights  as a
shareholder shall exist with respect to the Awarded Stock,  notwithstanding  the
exercise of the Option. The Company shall issue or cause to be issued (and which
issuance may be in electronic  entry form) such Shares promptly after the Option
is exercised. No adjustment will be made for a dividend or other right for which
the record date is prior to the date the Shares are  issued,  except as provided
in Section 17 of the Plan.

     Exercising  an Option in any  manner  shall  decrease  the number of Shares
thereafter  available,  both for  purposes  of the Plan and for sale  under  the
Option, by the number of Shares as to which the Option is exercised. Exercise of
a SAR in any  manner  shall,  to the extent  the SAR is  exercised,  result in a
decrease  in the  number of  Shares  which  thereafter  shall be  available  for
purposes of the Plan, and the SAR shall cease to be exercisable to the extent it
has been exercised.

         (b)  Termination  of  Continuous  Status  as a Service  Provider.  Upon
termination of a Participant's  Continuous  Status as a Service  Provider (other
than  termination  by  reason of the  Participant's  death or  Disability),  the
Participant  may exercise his or her Option or SAR within such period of time as
is  specified  in the Award  Agreement to the extent that the Award is vested on
the date of  termination  (but in no event later than the expiration of the term
of such  Award  as set  forth  in the  Award  Agreement).  In the  absence  of a
specified time in the Option Agreement,  the Option shall remain exercisable for
three (3) months following the Participant's  termination.  If the Option or SAR
is not so exercised  within the time specified  herein,  the Option or SAR shall
terminate,  and the  Shares  covered by such  Option or SAR shall  revert to the
Plan.  Unless  otherwise  provided  by  the  Administrator,  if on the  date  of
termination the Participant is not vested as to his or her entire Option or SAR,
the Shares  covered by the unvested  portion of the Option or SAR will revert to
the Plan on the date one (1)  month  following  the  Participant's  termination.
Notwithstanding the foregoing, in no event shall an Option or SAR be exercisable
after  the  expiration  of the  term  of the  Award  as  provided  in the  Award
Agreement.

                                      C-13



         (c) Disability of Participant.  If a Participant  terminates his or her
Continuous  Status as a Service  Provider as a result of his or her  Disability,
the Participant may exercise his or her Option or SAR within such period of time
as is specified in the Award Agreement to the extent the Option or SAR is vested
on the date of  termination  (but in no event later than the  expiration  of the
term of such Option or SAR as set forth in the Award Agreement).  In the absence
of a  specified  time in the Award  Agreement,  the  Option or SAR shall  remain
exercisable for twelve (12) months following the Participant's termination.  If,
after  termination,  the Participant  does not exercise his or her Option or SAR
within the time specified  herein,  the Option or SAR shall  terminate,  and the
Shares covered by such Option or SAR shall revert to the Plan.  Unless otherwise
provided by the Administrator,  if on the date of termination the Participant is
not vested as to his or her  entire  Option or SAR,  the  Shares  covered by the
unvested  portion of the  Option or SAR will  revert to the Plan on the date one
(1)  month  following  the  Participant's   termination.   Notwithstanding   the
foregoing,  in no  event  shall  an  Option  or SAR  be  exercisable  after  the
expiration of the term of the Award as provided in the Award Agreement.

         (d)  Death  of  Participant.  If a  Participant  dies  while a  Service
Provider,  the Option or SAR may be exercised  following the Participant's death
within such period of time as is  specified  in the Award  Agreement  (but in no
event may the option be exercised  later than the expiration of the term of such
Option  or SAR as  set  forth  in the  Award  Agreement),  by the  Participant's
designated  beneficiary,  provided such beneficiary has been designated prior to
Participant's  death  in a form  acceptable  to the  Administrator.  If no  such
beneficiary  has been  designated  by the  Participant,  then such Option may be
exercised by the personal  representative of the Participant's  estate or by the
person(s) to whom the Option or SAR is transferred pursuant to the Participant's
will or in accordance with the laws of descent and distribution.  In the absence
of a  specified  time in the Award  Agreement,  the  Option or SAR shall  remain
exercisable for twelve (12) months following  Participant's death. If the Option
or SAR is not so exercised within the time specified  herein,  the Option or SAR
shall  terminate,  and the Shares  covered by such Option or SAR shall revert to
the Plan.  Unless  otherwise  provided by the  Administrator,  if on the date of
termination the Participant is not vested as to his or her entire Option or SAR,
the Shares  covered by the unvested  portion of the Option or SAR will revert to
the Plan on the date one (1)  month  following  the  Participant's  termination.
Notwithstanding the foregoing, in no event shall an Option or SAR be exercisable
after  the  expiration  of the  term  of the  Award  as  provided  in the  Award
Agreement.

     12. Restricted Stock.

         (a) Grant of Restricted  Stock.  Subject to the terms and provisions of
the Plan  (including the limits set forth in Section 7), the  Administrator,  at
any time and from time to time, may grant Shares of Restricted  Stock to Service
Providers in such amounts as the  Administrator,  in its sole  discretion,  will
determine.

         (b) Restricted Stock Agreement.  Each Award of Restricted Stock will be
evidenced by an Award Agreement that will specify the Period of Restriction, the
number  of  Shares  granted,   and  such  other  terms  and  conditions  as  the

                                      C-14



Administrator,  in its sole discretion, will determine. Unless the Administrator
determines otherwise,  Shares of Restricted Stock will be held by the Company as
escrow agent until the restrictions on such Shares have lapsed.

         (c) Transferability.  Unless determined otherwise by the Administrator,
Shares of Restricted  Stock may not be sold,  pledged,  assigned,  hypothecated,
transferred,  or disposed of in any manner  other than by will or by the laws of
descent or distribution until the end of the applicable Period of Restriction.

         (d) Other Restrictions. The Administrator,  in its sole discretion, may
impose  such other  restrictions  on Shares of  Restricted  Stock as it may deem
advisable or appropriate.

             (i) General  Restrictions.  The  Administrator may set restrictions
based upon the  achievement  of  Company-wide,  departmental,  business unit, or
individual  goals  (including,  but not  limited  to,  continued  employment  or
service),  applicable  federal  or state  securities  laws,  or any other  basis
determined by the Administrator in its discretion.

             (ii)  Section  162(m)  Performance  Restrictions.  For  purposes of
qualifying grants of Restricted Stock as "performance-based  compensation" under
Section  162(m)  of  the  Code,  the  Committee,  in  its  discretion,  may  set
restrictions  based upon the achievement of Performance  Goals.  The Performance
Goals shall be set by the Committee on or before the latest date  permissible to
enable the Restricted Stock to qualify as "performance-based compensation" under
Section  162(m) of the Code. In granting  Restricted  Stock which is intended to
qualify  under  Section  162(m) of the Code,  the  Committee  shall  follow  any
procedures  determined by it from time to time to be necessary or appropriate to
ensure  qualification  of the Restricted  Stock under Section 162(m) of the Code
(e.g., in determining the Performance Goals).

         (e)  Removal of  Restrictions.  Except as  otherwise  provided  in this
Section 12, Shares of Restricted  Stock covered by each  Restricted  Stock grant
made under the Plan will be released  from escrow as soon as  practicable  after
the last day of the Period of Restriction. The Administrator, in its discretion,
may accelerate the time at which any restrictions will lapse or be removed.

         (f) Voting Rights. During the Period of Restriction,  Service Providers
holding  Shares of Restricted  Stock granted  hereunder may exercise full voting
rights  with  respect  to those  Shares,  unless  the  Administrator  determines
otherwise.

         (g)   Dividends   and  Other   Distributions.   During  the  Period  of
Restriction,  Service  Providers  holding  Shares of  Restricted  Stock  will be
entitled to receive all dividends and other  distributions  paid with respect to
such  Shares  unless  otherwise  provided  in the Award  Agreement.  If any such
dividends or distributions are paid in Shares, the Shares will be subject to the
same  restrictions  on  transferability  and  forfeitability  as the  Shares  of
Restricted Stock with respect to which they were paid.

                                      C-15



         (h) Return of Restricted Stock to Company. On the date set forth in the
Award  Agreement,  the Restricted Stock for which  restrictions  have not lapsed
will revert to the Company and again will become  available  for grant under the
Plan.

     13. Restricted Stock Units.

         (a) Grant.  Restricted  Stock Units may be granted at any time and from
time to time as  determined by the  Administrator.  Each  Restricted  Stock Unit
grant shall be evidenced  by an Award  Agreement  that shall  specify such other
terms  and  conditions  as the  Administrator,  in its  sole  discretion,  shall
determine,  including all terms,  conditions,  and  restrictions  related to the
grant,  the number of Restricted  Stock Units  (subject to the  limitations  set
forth in Section 7) and the form of payout, which, subject to Section 13(d), may
be left to the discretion of the Administrator.

         (b) Vesting  Criteria  and Other  Terms.  The  Administrator  shall set
vesting criteria in its discretion,  which, depending on the extent to which the
criteria are met, will determine the number of Restricted  Stock Units that will
be paid out to the Participant.

             (i)  General  Restrictions.   The  Administrator  may  set  vesting
criteria based upon the  achievement  of  Company-wide,  departmental,  business
unit, or individual goals (including,  but not limited to, continued  employment
or service),  applicable  federal or state  securities  laws, or any other basis
determined by the Administrator in its discretion.

             (ii)  Section  162(m)  Performance  Restrictions.  For  purposes of
qualifying grants of Restricted Stock Units as "performance-based  compensation"
under Section  162(m) of the Code,  the Committee,  in its  discretion,  may set
performance  objectives  based upon the  achievement of Performance  Goals.  The
Performance  Goals  shall be set by the  Committee  on or before the latest date
permissible   to   enable   the   Restricted   Stock   Units   to   qualify   as
"performance-based  compensation"  under Section 162(m) of the Code. In granting
Restricted  Stock Units that are intended to qualify under Section 162(m) of the
Code, the Committee  shall follow any  procedures  determined by it from time to
time to be necessary or  appropriate to ensure  qualification  of the Restricted
Stock  Units  under  Section  162(m)  of the  Code  (e.g.,  in  determining  the
Performance Goals).

         (c) Earning Restricted Stock Units. Upon meeting the applicable vesting
criteria,  the Participant shall be entitled to receive a payout as specified in
the Award Agreement.  Notwithstanding the foregoing, at any time after the grant
of Restricted Stock Units, the Administrator, in its sole discretion, may reduce
or waive any vesting criteria that must be met to receive a payout.

         (d) Form and  Timing of  Payment.  Payment of earned  Restricted  Stock
Units  shall be made as soon as  practicable  after the date(s) set forth in the
Award  Agreement.  The  Administrator,  in its sole  discretion,  may pay earned
Restricted  Stock  Units in  cash,  Shares,  or a  combination  thereof.  Shares
represented by Restricted Stock Units that are fully paid in cash again shall be
available for grant under the Plan.

                                      C-16



         (e)  Cancellation.  On the date set forth in the Award  Agreement,  all
unearned  Restricted  Stock  Units  shall  be  forfeited  to  the  Company. 

     14. Performance Shares.

         (a) Grant of Performance Shares. Subject to the terms and conditions of
the Plan,  Performance Shares may be granted to Service Providers at any time as
shall be determined by the  Administrator,  in its sole  discretion.  Subject to
Section 7 hereof, the Administrator  shall have complete discretion to determine
the number of Shares subject to a Performance Share Award granted to any Service
Provider.

         (b) Value of Performance  Shares.  Each Performance  Share will have an
initial value equal to the Fair Market Value of a Share on the date of grant.

         (c) Performance  Objectives and Other Terms. The Administrator will set
performance objectives in its discretion which, depending on the extent to which
they are met, will determine the number or value of Performance Shares that will
be paid out to the Service  Providers.  Each Award of Performance Shares will be
evidenced by an Award Agreement that will specify the performance  period during
which the applicable objectives must be met, and such other terms and conditions
as the Administrator, in its sole discretion, will determine.

             (i) General  Restrictions.  The  Administrator  may set performance
objective based upon the  achievement of  Company-wide,  departmental,  business
unit, or individual goals (including,  but not limited to, continued  employment
or service),  applicable  federal or state  securities  laws, or any other basis
determined by the Administrator in its discretion.

             (ii)  Section  162(m)  Performance  Restrictions.  For  purposes of
qualifying  grants of  Performance  Shares as  "performance-based  compensation"
under Section  162(m) of the Code,  the Committee,  in its  discretion,  may set
performance  objectives  based upon the  achievement of Performance  Goals.  The
Performance  Goals  shall be set by the  Committee  on or before the latest date
permissible to enable the  Performance  Shares to qualify as  "performance-based
compensation"  under Section 162(m) of the Code. In granting  Performance Shares
that are intended to qualify  under  Section  162(m) of the Code,  the Committee
shall follow any  procedures  determined by it from time to time to be necessary
or appropriate to ensure  qualification of the Performance  Shares under Section
162(m) of the Code (e.g., in determining the Performance Goals).

         (d) Earning of Performance  Shares.  After the  applicable  Performance
Period has ended, the holder of Performance Shares will be entitled to receive a
payout of the number of Performance  Shares earned by the  Participant  over the
Performance  Period,  to be  determined as a function of the extent to which the
corresponding  performance  objectives have been achieved.  After the grant of a
Performance  Share, the  Administrator,  in its sole  discretion,  may reduce or
waive any performance objectives for such Performance Share.

                                      C-17



         (e) Form and Timing of Payment of Performance Shares. Payment of earned
Performance  Shares will be made as soon as practicable  after the expiration of
the applicable  Performance  Period. The Administrator,  in its sole discretion,
may pay earned  Performance Shares in the form of cash, in Shares (which have an
aggregate Fair Market Value equal to the value of the earned  Performance Shares
at the close of the applicable performance period) or in a combination thereof.

         (f)  Cancellation of Performance  Shares.  On the date set forth in the
Award Agreement,  all unearned or unvested  Performance Shares will be forfeited
to the Company, and again will be available for grant under the Plan.

     15.  Leaves of Absence.  Unless the  Administrator  provides  otherwise  or
except as  otherwise  required by  Applicable  Laws,  vesting of Awards  granted
hereunder shall cease commencing on the first day of any unpaid leave of absence
and shall only recommence upon return to active service.

     16.   Transferability  of  Awards.   Unless  determined  otherwise  by  the
Administrator  or as otherwise  provided in the Plan,  an Award may not be sold,
pledged, assigned, hypothecated, transferred, or disposed of in any manner other
than by will or by the laws of descent or  distribution,  and may be  exercised,
during  the  lifetime  of  the  Participant,  only  by the  Participant.  If the
Administrator  makes  an Award  transferable,  such  Award  shall  contain  such
additional terms and conditions as the Administrator deems appropriate.

     17.  Adjustments  Upon Changes in  Capitalization,  Dissolution,  Merger or
Change in Control.

         (a) Changes in  Capitalization.  Subject to any required  action by the
shareholders  of the Company,  the number of shares of Common  Stock  covered by
each outstanding  Award and the number of shares of Common Stock which have been
authorized  for issuance  under the Plan but as to which no Awards have yet been
granted or which have been returned to the Plan upon  cancellation or expiration
of an Award,  as well as the price per share, if any, of Common Stock covered by
each such  outstanding  Award and the 162(m) fiscal year share  issuance  limits
under Sections 7(a) and (b) hereof shall, shall be proportionately  adjusted for
any dividend or other distribution  (whether in the form of cash, Shares,  other
securities,  or other property),  recapitalization,  stock split,  reverse stock
split, reorganization,  merger, consolidation,  split-up, spin-off, combination,
repurchase,  or exchange of Shares or other securities of the Company,  or other
change in the corporate structure of the Company affecting the Shares should the
Committee  (in  its  sole  discretion)   determine  such  an  adjustment  to  be
appropriate  in order to prevent  dilution  or  enlargement  of the  benefits or
potential benefits intended to be made available under the Plan. Such adjustment
shall be made by the Board or the Committee, whose determination in that respect
shall be final, binding and conclusive.  Except as expressly provided herein, no
issuance  by the  Company  of  shares  of  stock  of any  class,  or  securities
convertible into shares of stock of any class,  shall affect,  and no adjustment
by reason  thereof  shall be made with respect to, the number or price of shares
of Common Stock subject to an Award.

         (b)  Dissolution  or   Liquidation.   In  the  event  of  the  proposed
dissolution or liquidation of the Company, all outstanding Awards will terminate

                                      C-18



immediately prior to the consummation of such proposed action,  unless otherwise
provided by the  Administrator.  The Administrator in its discretion may provide
for a Participant to have the right to exercise his or her Option,  SAR or right
to purchase Restricted Stock until ten (10) days prior to such transaction as to
all of the Awarded Stock covered thereby, including Shares as to which the Award
would not otherwise be exercisable.  In addition,  the Administrator may provide
that any Company  repurchase option or forfeiture rights applicable to any Award
shall lapse 100%, and that any Award vesting shall accelerate 100%, provided the
proposed  dissolution or  liquidation  takes place at the time and in the manner
contemplated.  To the extent it has not been previously  exercised (with respect
to Options, SARs and right to purchase Restricted Stock) or vested (with respect
to other Awards), an Award will terminate  immediately prior to the consummation
of such proposed action.

         (c) Merger or Change in Control.  In the event of a merger or Change in
Control,  each  outstanding  Award  shall  be  assumed  or an  equivalent  award
substituted  by the  successor  corporation  or a Parent  or  Subsidiary  of the
successor  corporation.  In the event that the successor  corporation refuses to
assume or substitute for the Award, the Participant  shall (i) fully vest in and
have the right to exercise the Option, SAR or right to purchase Restricted Stock
as to all of the  Awarded  Stock,  including  Shares  as to which  it would  not
otherwise  be vested or  exercisable,  and (ii) fully earn and  receive a payout
with respect to other Awards.  If an Award is not assumed or substituted  for in
the event of a merger or Change in Control,  the Administrator  shall notify the
Participant in writing or  electronically  that (i) the Option,  SAR or right to
purchase  Restricted Stock shall be fully vested and exercisable for a period of
fifteen  (15)  days  from the  date of such  notice,  and  (ii) all  outstanding
Options,  SARs and rights to purchase  Restricted Stock shall terminate upon the
expiration of such period and (iii) all other  outstanding  Awards shall be paid
out  immediately  prior to the merger or Change in Control.  For the purposes of
this paragraph,  the Award shall be considered  assumed if, following the merger
or Change in  Control,  the  assumed  Award  confers  the right to  purchase  or
receive,  for each Share of Awarded Stock subject to the Award immediately prior
to the merger or Change in Control,  the consideration  (whether stock, cash, or
other  securities  or  property)  received in the merger or Change in Control by
holders  of  Common  Stock  for each  Share  held on the  effective  date of the
transaction (and if holders were offered a choice of consideration,  the type of
consideration  chosen by the holders of a majority of the  outstanding  Shares);
provided,  however, that if such consideration  received in the merger or Change
in  Control is not  solely  common  stock of the  successor  corporation  or its
Parent,  the Administrator  may, with the consent of the successor  corporation,
provide for the  consideration  to be received  upon the  exercise (or payout or
vesting, as applicable) of the Award, for each Share of Awarded Stock subject to
the Award, to be solely common stock of the successor  corporation or its Parent
equal in fair market value to the per share consideration received by holders of
Common Stock in the merger or Change in Control.

     18.  Date of  Grant.  The  date of  grant of an  Award  shall  be,  for all
purposes,  the date on which the Administrator makes the determination  granting
such Award,  or such other  later date as is  determined  by the  Administrator.
Notice of the  determination  shall be  provided  to each  Participant  within a
reasonable time after the date of such grant.

     19. Amendment and Termination of the Plan.

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         (a) Amendment and Termination.  The Board may at any time amend, alter,
suspend or terminate the Plan.

         (b) Shareholder  Approval.  The Plan will be subject to approval by the
shareholders of the Company within twelve (12) months after the date the Plan is
adopted.  Such  shareholder  approval  will be obtained in the manner and to the
degree  required under  Applicable  Laws.  The Company shall obtain  shareholder
approval of any Plan  amendment to the extent  necessary and desirable to comply
with Applicable Laws.

         (c) Effect of  Amendment  or  Termination.  No  amendment,  alteration,
suspension  or   termination  of  the  Plan  shall  impair  the  rights  of  any
Participant,  unless mutually agreed  otherwise  between the Participant and the
Administrator,  which  agreement must be in writing (or  electronic  format) and
signed by the  Participant  and the Company.  Termination  of the Plan shall not
affect  the  Administrator's  ability  to  exercise  the  powers  granted  to it
hereunder  with  respect to Awards  granted  under the Plan prior to the date of
such termination.

     20. Conditions Upon Issuance of Shares.

         (a)  Legal  Compliance.  Shares  shall not be  issued  pursuant  to the
exercise or payout, as applicable, of an Award unless the exercise or payout, as
applicable,  of such Award and the  issuance  and  delivery of such Shares shall
comply  with  Applicable  Laws and shall be further  subject to the  approval of
counsel for the Company with respect to such compliance.

         (b)  Investment  Representations.  As a  condition  to the  exercise or
payout,  as  applicable,  of an  Award,  the  Company  may  require  the  person
exercising  such Option,  SAR or right to purchase  Restricted  Stock, or in the
case of another Award, the person receiving the payout, to represent and warrant
at the time of any such  exercise that the Shares are being  purchased  only for
investment and without any present  intention to sell or distribute  such Shares
if,  in the  opinion  of  counsel  for the  Company,  such a  representation  is
required.

     21. Inability to Obtain  Authority.  The inability of the Company to obtain
authority  from any  regulatory  body having  jurisdiction,  which  authority is
deemed by the Company's  counsel to be necessary to the lawful issuance and sale
of any Shares  hereunder,  shall relieve the Company of any liability in respect
of the failure to issue or sell such Shares as to which such requisite authority
shall not have been obtained.

     22. Severability.  Notwithstanding any contrary provision of the Plan or an
Award  to the  contrary,  if any  one or  more of the  provisions  (or any  part
thereof)  of  this  Plan  or the  Awards  shall  be  held  invalid,  illegal  or
unenforceable in any respect,  such provision shall be modified so as to make it
valid, legal and enforceable,  and the validity,  legality and enforceability of
the  remaining  provisions  (or any  part  thereof)  of the  Plan or  Award,  as
applicable, shall not in any way be affected or impaired thereby.

     23. Shareholder Approval.  Subject to Section 19 of the Plan, the Plan will
become  effective upon its adoption by the Board. It will continue in effect for

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a term of five (5) years from the date of  approval by the  shareholders  of the
Company unless terminated earlier under Section 19 of the Plan.

     24.  Non-U.S.  Employees.  Notwithstanding  anything  in  the  Plan  to the
contrary,  with respect to any  employee  who is resident  outside of the United
States,  the Administrator  may, in its sole discretion,  amend the terms of the
Plan in order to conform such terms to the  requirements of local law or to meet
the objectives of the Plan. The Administrator may, where appropriate,  establish
one or more sub-plans for this purpose.


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